Toh; Shi Wei
Patent Applications and Registrations
Patent applications and USPTO patent grants for Toh; Shi Wei.The latest application filed is for "process kit for a substrate support".
- Toh; Shi Wei - Sunnyvale CA
- Toh; Shi Wei - Mountain View CA
- TOH; SHI WEI - Singapore SG
| Patent | Date |
|---|---|
| Process kit for a substrate support Grant 11,387,134 - Mustafa , et al. July 12, 2 | 2022-07-12 |
| Process Kit For A Substrate Support App 20190229007 - MUSTAFA; MUHANNAD ; et al. | 2019-07-25 |
| Substrate processing apparatus and methods Grant 10,256,076 - Toh , et al. | 2019-04-09 |
| Device conformity control by low temperature, low pressure, inductively coupled ammonia-nitrogen trifluoride plasma Grant 10,008,388 - Hsieh , et al. June 26, 2 | 2018-06-26 |
| Device Conformity Control By Low Temperature, Low Pressure, Inductively Coupled Ammonia-nitrogen Trifluoride Plasma App 20170301556 - HSIEH; Ping Han ; et al. | 2017-10-19 |
| Substrate Processing Apparatus And Methods App 20170117118 - TOH; Shi Wei ; et al. | 2017-04-27 |
| Etch Enhancement Via Controlled Introduction Of Chamber Contaminants App 20160133441 - GERMAIN; JONATHAN ; et al. | 2016-05-12 |
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