loadpatents
Patent applications and USPTO patent grants for Todokoro; Hideo.The latest application filed is for "charged particle beam device".
Patent | Date |
---|---|
Charged particle beam device Grant 10,903,037 - Kasuya , et al. January 26, 2 | 2021-01-26 |
Charged Particle Beam Device App 20200090897 - KASUYA; Keigo ;   et al. | 2020-03-19 |
Sample electrification measurement method and charged particle beam apparatus Grant 8,835,844 - Ezumi , et al. September 16, 2 | 2014-09-16 |
Charged particle beam apparatus, and method of controlling the same Grant 8,772,735 - Kasuya , et al. July 8, 2 | 2014-07-08 |
Method and an apparatus of an inspection system using an electron beam Grant 8,604,430 - Iwabuchi , et al. December 10, 2 | 2013-12-10 |
Charged Particle Beam Apparatus, And Method Of Controlling The Same App 20130063029 - KASUYA; Keigo ;   et al. | 2013-03-14 |
Charged particle beam apparatus, and method of controlling the same Grant 8,319,193 - Kasuya , et al. November 27, 2 | 2012-11-27 |
Method And An Apparatus Of An Inspection System Using An Electron Beam App 20120132801 - IWABUCHI; Yuko ;   et al. | 2012-05-31 |
Method and apparatus of an inspection system using an electron beam Grant 8,134,125 - Iwabuchi , et al. March 13, 2 | 2012-03-13 |
Apparatus and method for wafer pattern inspection Grant 7,982,188 - Shinada , et al. July 19, 2 | 2011-07-19 |
Scanning electron microscope Grant 7,977,632 - Todokoro , et al. July 12, 2 | 2011-07-12 |
Charged particle beam apparatus for forming a specimen image Grant 7,956,324 - Takahashi , et al. June 7, 2 | 2011-06-07 |
Charged Particle Beam Apparatus, And Method Of Controlling The Same App 20110089336 - Kasuya; Keigo ;   et al. | 2011-04-21 |
Sample Electrification Measurement Method and Charged Particle Beam Apparatus App 20100294929 - Ezumi; Makoto ;   et al. | 2010-11-25 |
Monochromator and scanning electron microscope using the same Grant 7,838,827 - Ose , et al. November 23, 2 | 2010-11-23 |
Electron beam apparatus with aberration corrector Grant 7,825,377 - Kawasaki , et al. November 2, 2 | 2010-11-02 |
Image evaluation method and microscope Grant 7,805,023 - Ishitani , et al. September 28, 2 | 2010-09-28 |
Method of forming a sample image and charged particle beam apparatus Grant 7,800,059 - Sato , et al. September 21, 2 | 2010-09-21 |
Sample electrification measurement method and charged particle beam apparatus Grant 7,700,918 - Ezumi , et al. April 20, 2 | 2010-04-20 |
Charge control apparatus and measurement apparatus equipped with the charge control apparatus Grant 7,683,319 - Makino , et al. March 23, 2 | 2010-03-23 |
Charged particle beam apparatus Grant 7,642,514 - Takane , et al. January 5, 2 | 2010-01-05 |
Charge control apparatus and measurement apparatus equipped with the charge control apparatus App 20090166557 - Makino; Hiroshi ;   et al. | 2009-07-02 |
Method And Apparatus Of An Inspection System Using An Electron Beam App 20090057556 - Iwabuchi; Yuko ;   et al. | 2009-03-05 |
Electron beam apparatus Grant 7,491,933 - Sato , et al. February 17, 2 | 2009-02-17 |
Scanning Electron Microscope App 20090039259 - TODOKORO; Hideo ;   et al. | 2009-02-12 |
Electron beam apparatus with aberration corrector App 20090008551 - Kawasaki; Takeshi ;   et al. | 2009-01-08 |
Charged particle beam apparatus App 20080302962 - Takahashi; Noritsugu ;   et al. | 2008-12-11 |
Electron Microscope And Electron Beam Inspection System App 20080265161 - Murakoshi; Hisaya ;   et al. | 2008-10-30 |
Scanning electron microscope Grant 7,442,923 - Todokoro , et al. October 28, 2 | 2008-10-28 |
Method and an apparatus of an inspection system using an electron beam Grant 7,439,506 - Iwabuchi , et al. October 21, 2 | 2008-10-21 |
Monochromator and scanning electron microscope using the same App 20080237463 - Ose; Yoichi ;   et al. | 2008-10-02 |
Method of forming a sample image and charged particle beam apparatus App 20080217535 - Sato; Mitsugu ;   et al. | 2008-09-11 |
Sample electrification measurement method and charged particle beam apparatus App 20080201091 - Ezumi; Makoto ;   et al. | 2008-08-21 |
Inspection system, inspection method, and process management method Grant 7,411,190 - Makino , et al. August 12, 2 | 2008-08-12 |
Charged particle beam apparatus and charged particle beam irradiation method Grant 7,408,172 - Sato , et al. August 5, 2 | 2008-08-05 |
Scanning electron microscope Grant 7,399,966 - Todokoro , et al. July 15, 2 | 2008-07-15 |
Electron microscope and electron beam inspection system Grant 7,394,066 - Murakoshi , et al. July 1, 2 | 2008-07-01 |
Method and scanning electron microscope for measuring width of material on sample Grant 7,385,196 - Shimoma , et al. June 10, 2 | 2008-06-10 |
Charged particle beam apparatus App 20080116376 - Takane; Atsushi ;   et al. | 2008-05-22 |
Electron beam apparatus with aberration corrector Grant 7,375,323 - Kawasaki , et al. May 20, 2 | 2008-05-20 |
Sample electrification measurement method and charged particle beam apparatus Grant 7,372,028 - Ezumi , et al. May 13, 2 | 2008-05-13 |
Method of forming a sample image and charged particle beam apparatus Grant 7,361,894 - Sato , et al. April 22, 2 | 2008-04-22 |
Image evaluation method and microscope Grant 7,340,111 - Ishitani , et al. March 4, 2 | 2008-03-04 |
Charged Particle Beam Apparatus And Charged Particle Beam Irradiation Method App 20080042074 - SATO; MITSUGU ;   et al. | 2008-02-21 |
Charged particle beam apparatus Grant 7,329,868 - Takane , et al. February 12, 2 | 2008-02-12 |
Monochromator and scanning electron microscope using the same Grant 7,315,024 - Ose , et al. January 1, 2 | 2008-01-01 |
Image evaluation method and microscope App 20070280559 - Ishitani; Tohru ;   et al. | 2007-12-06 |
Scanning electron microscope Grant 7,294,835 - Todokoro , et al. November 13, 2 | 2007-11-13 |
Charged particle beam apparatus and charged particle beam irradiation method Grant 7,282,722 - Sato , et al. October 16, 2 | 2007-10-16 |
Scanning electron microscope App 20070221846 - Todokoro; Hideo ;   et al. | 2007-09-27 |
Method and an apparatus of an inspection system using an electron beam App 20070215803 - Iwabuchi; Yuko ;   et al. | 2007-09-20 |
Electron microscope and electron bean inspection system. App 20070181808 - Murakoshi; Hisaya ;   et al. | 2007-08-09 |
Image evaluation method and microscope Grant 7,236,651 - Ishitani , et al. June 26, 2 | 2007-06-26 |
Method and an apparatus of an inspection system using an electron beam Grant 7,232,996 - Iwabuchi , et al. June 19, 2 | 2007-06-19 |
Electron beam apparatus with aberration corrector App 20070114409 - Kawasaki; Takeshi ;   et al. | 2007-05-24 |
Electron beam apparatus with aberration corrector Grant 7,199,365 - Kawasaki , et al. April 3, 2 | 2007-04-03 |
Scanning charged-particle microscope Grant 7,186,975 - Ishitani , et al. March 6, 2 | 2007-03-06 |
Method of forming a sample image and charged particle beam apparatus App 20070029478 - Sato; Mitsugu ;   et al. | 2007-02-08 |
Charged particle beam apparatus App 20070023657 - Takane; Atsushi ;   et al. | 2007-02-01 |
Method for determining depression/protrusion of sample and charged particle beam apparatus therefor Grant 7,166,840 - Takane , et al. January 23, 2 | 2007-01-23 |
Method of forming a sample image and charged particle beam apparatus Grant 7,164,126 - Sato , et al. January 16, 2 | 2007-01-16 |
Apparatus and method for wafer pattern inspection App 20060249676 - Shinada; Hiroyuki ;   et al. | 2006-11-09 |
Inspection system, inspection method, and process management method App 20060231758 - Makino; Hiroshi ;   et al. | 2006-10-19 |
Monochromator and scanning electron microscope using the same App 20060219910 - Ose; Yoichi ;   et al. | 2006-10-05 |
Sample electrification measurement method and charged particle beam apparatus App 20060219918 - Ezumi; Makoto ;   et al. | 2006-10-05 |
Charged particle beam apparatus Grant 7,109,485 - Takane , et al. September 19, 2 | 2006-09-19 |
Sample electrification measurement method and charged particle beam apparatus Grant 7,087,899 - Ezumi , et al. August 8, 2 | 2006-08-08 |
Method and an apparatus of an inspection system using an electron beam App 20060151699 - Iwabuchi; Yuko ;   et al. | 2006-07-13 |
Inspection system, inspection method, and process management method Grant 7,075,076 - Makino , et al. July 11, 2 | 2006-07-11 |
Scanning electron microscope Grant 7,075,078 - Ose , et al. July 11, 2 | 2006-07-11 |
Scanning electron microscope App 20060113474 - Todokoro; Hideo ;   et al. | 2006-06-01 |
Scanning electron microscope Grant 7,049,591 - Todokoro , et al. May 23, 2 | 2006-05-23 |
Method of forming a sample image and charged particle beam apparatus Grant 7,034,296 - Sato , et al. April 25, 2 | 2006-04-25 |
Scanning electron microscope App 20060071167 - Todokoro; Hideo ;   et al. | 2006-04-06 |
Apparatus and method for wafer pattern inspection Grant 7,022,986 - Shinada , et al. April 4, 2 | 2006-04-04 |
Monochromator and scanning electron microscope using the same Grant 7,022,983 - Ose , et al. April 4, 2 | 2006-04-04 |
Method and an apparatus of an inspection system using an electron beam Grant 7,012,252 - Iwabuchi , et al. March 14, 2 | 2006-03-14 |
Electron beam apparatus with aberration corrector App 20060016991 - Kawasaki; Takeshi ;   et al. | 2006-01-26 |
Electron beam apparatus App 20060016992 - Sato; Mitsugu ;   et al. | 2006-01-26 |
Electron microscope and electron beam inspection system App 20060011835 - Murakoshi; Hisaya ;   et al. | 2006-01-19 |
Method and an apparatus of an inspection system using an electron beam Grant 6,987,265 - Iwabuchi , et al. January 17, 2 | 2006-01-17 |
Electron beam apparatus with aberration corrector Grant 6,982,427 - Kawasaki , et al. January 3, 2 | 2006-01-03 |
Scanning electron microscope Grant 6,979,821 - Suzuki , et al. December 27, 2 | 2005-12-27 |
Charged particle beam apparatus and charged particle beam irradiation method App 20050253083 - Sato, Mitsugu ;   et al. | 2005-11-17 |
Electron microscope observation system and observation method Grant 6,956,212 - Todokoro October 18, 2 | 2005-10-18 |
Charged particle beam apparatus and charged particle beam irradiation method Grant 6,956,211 - Sato , et al. October 18, 2 | 2005-10-18 |
Method and an apparatus of an inspection system using an electron beam App 20050205782 - Iwabuchi, Yuko ;   et al. | 2005-09-22 |
Sample electrification measurement method and charged particle beam apparatus Grant 6,946,656 - Ezumi , et al. September 20, 2 | 2005-09-20 |
Image evaluation method and microscope App 20050199811 - Ishitani, Tohru ;   et al. | 2005-09-15 |
Charged particle beam apparatus Grant 6,936,818 - Takane , et al. August 30, 2 | 2005-08-30 |
Charged particle beam apparatus App 20050184237 - Takane, Atsushi ;   et al. | 2005-08-25 |
Sample electrification measurement method and charged particle beam apparatus App 20050161600 - Ezumi, Makoto ;   et al. | 2005-07-28 |
Method for determining depression/protrusion of sample and charged particle beam apparatus therefor App 20050151078 - Takane, Atsushi ;   et al. | 2005-07-14 |
Scanning electron microscope App 20050139773 - Ose, Yoichi ;   et al. | 2005-06-30 |
Scanning electron microscope App 20050133719 - Todokoro, Hideo ;   et al. | 2005-06-23 |
Scanning electron microscope Grant 6,885,001 - Ose , et al. April 26, 2 | 2005-04-26 |
Method for determining depression/protrusion of sample and charged particle beam apparatus therefor Grant 6,872,943 - Takane , et al. March 29, 2 | 2005-03-29 |
Scanning electron microscope Grant 6,872,944 - Todokoro , et al. March 29, 2 | 2005-03-29 |
Electron microscope observation system and observation method App 20050061975 - Todokoro, Hideo | 2005-03-24 |
Inspection system, inspection method, and process management method App 20050051722 - Makino, Hiroshi ;   et al. | 2005-03-10 |
Electron beam apparatus Grant 6,864,482 - Sato , et al. March 8, 2 | 2005-03-08 |
Scanning electron microscope Grant 6,847,038 - Todokoro , et al. January 25, 2 | 2005-01-25 |
Method and scanning electron microscope for measuring width of material on sample App 20050006581 - Shimoma, Goroku ;   et al. | 2005-01-13 |
Combination perpendicular magnetic head having shield material formed at both ends of an upper pole of a write element Grant 6,839,200 - Takano , et al. January 4, 2 | 2005-01-04 |
Electronic microscope observation system and observation method Grant 6,822,232 - Todokoro November 23, 2 | 2004-11-23 |
Electron beam apparatus App 20040227081 - Sato, Mitsugu ;   et al. | 2004-11-18 |
Sample electrification measurement method and charged particle beam apparatus App 20040211899 - Ezumi, Makoto ;   et al. | 2004-10-28 |
Scanning electron microscope App 20040188612 - Ose, Yoichi ;   et al. | 2004-09-30 |
Monochromator and scanning electron microscope using the same App 20040188607 - Ose, Yoichi ;   et al. | 2004-09-30 |
Electron beam apparatus with aberration corrector App 20040188635 - Kawasaki, Takeshi ;   et al. | 2004-09-30 |
Method and scanning electron microscope for measuring dimension of material on sample Grant 6,791,084 - Shimoma , et al. September 14, 2 | 2004-09-14 |
Scanning electron microscope Grant 6,787,772 - Ose , et al. September 7, 2 | 2004-09-07 |
Charged particle beam apparatus and charged particle beam irradiation method App 20040119022 - Sato, Mitsugu ;   et al. | 2004-06-24 |
Scanning electron microscope App 20040113074 - Suzuki, Naomasa ;   et al. | 2004-06-17 |
Scanning electron microscope App 20040089805 - Todokoro, Hideo ;   et al. | 2004-05-13 |
Narrow track thin film magnetic head and fabrication method thereof App 20040080865 - Takano, Hisashi ;   et al. | 2004-04-29 |
Charged particle beam apparatus App 20040069956 - Takane, Atsushi ;   et al. | 2004-04-15 |
Scanning electron microscope App 20040051041 - Todokoro, Hideo ;   et al. | 2004-03-18 |
Scanning electron microscope App 20040036021 - Todokoro, Hideo ;   et al. | 2004-02-26 |
Scanning electron microscope Grant 6,667,476 - Todokoro , et al. December 23, 2 | 2003-12-23 |
Magnetic head having track width defined by trench portions filled with magnetic shield material Grant 6,665,141 - Takano , et al. December 16, 2 | 2003-12-16 |
Charged particle beam apparatus Grant 6,653,633 - Takane , et al. November 25, 2 | 2003-11-25 |
Scanning electron microscope Grant 6,646,262 - Todokoro , et al. November 11, 2 | 2003-11-11 |
Scanning electron microscope with voltage applied to the sample Grant 6,635,873 - Todokoro , et al. October 21, 2 | 2003-10-21 |
Method of forming a sample image and charged particle beam apparatus App 20030141451 - Sato, Mitsugu ;   et al. | 2003-07-31 |
Charged particle beam apparatus App 20030136907 - Takane, Atsushi ;   et al. | 2003-07-24 |
Scanning Electron Microscope App 20030127604 - TODOKORO, HIDEO ;   et al. | 2003-07-10 |
Apparatus and method for wafer pattern inspection App 20030127593 - Shinada, Hiroyuki ;   et al. | 2003-07-10 |
Scanning electron microscope App 20030122074 - Suzuki, Naomasa ;   et al. | 2003-07-03 |
Method of forming a sample image and charged particle beam apparatus App 20030111602 - Sato, Mitsugu ;   et al. | 2003-06-19 |
Narrow track thin film magnetic head and fabrication method thereof App 20030099063 - Takano, Hisashi ;   et al. | 2003-05-29 |
Scanning electron microscope Grant 6,555,819 - Suzuki , et al. April 29, 2 | 2003-04-29 |
Method and scanning electron microscope for measuring width of material on sample App 20030071214 - Shimoma, Goroku ;   et al. | 2003-04-17 |
Image-formation apparatus using charged particle beams under various focus conditions Grant 6,538,249 - Takane , et al. March 25, 2 | 2003-03-25 |
Image evaluation method and microscope App 20030039386 - Ishitani, Tohru ;   et al. | 2003-02-27 |
Method and apparatus for inspecting patterns of a semiconductor device with an electron beam Grant 6,512,227 - Iwabuchi , et al. January 28, 2 | 2003-01-28 |
Method for determining depression/protrusion of sample and charged particle beam apparatus therefor App 20030010914 - Takane, Atsushi ;   et al. | 2003-01-16 |
Scanning electron microscope App 20020148960 - Todokoro, Hideo ;   et al. | 2002-10-17 |
Method and an apparatus of an inspection system using an electron beam Grant 6,452,178 - Iwabuchi , et al. September 17, 2 | 2002-09-17 |
Method and an apparatus of an inspection system using an electron beam App 20020092986 - Iwabuchi, Yuko ;   et al. | 2002-07-18 |
Scanning charged-particle microscope App 20020079448 - Ishitani, Tohru ;   et al. | 2002-06-27 |
Narrow track thin film magnetic head and fabrication method thereof App 20020080521 - Takano, Hisashi ;   et al. | 2002-06-27 |
Method and apparatus for inspecting patterns of a semiconductor device with an electron beam App 20020024021 - Iwabuchi, Yuko ;   et al. | 2002-02-28 |
Method and an apparatus of an inspection system using an electron beam Grant 6,348,690 - Iwabuchi , et al. February 19, 2 | 2002-02-19 |
Projecting type charged particle microscope and projecting type substrate inspection system Grant 6,310,341 - Todokoro , et al. October 30, 2 | 2001-10-30 |
Method and an apparatus of an inspection system using an electron beam App 20010030294 - Iwabuchi, Yuko ;   et al. | 2001-10-18 |
Narrow track thin film head having a focused ion beam etched air bearing surface Grant 6,278,578 - Takano , et al. August 21, 2 | 2001-08-21 |
Scanning electron microscope App 20010010357 - Ose, Yoichi ;   et al. | 2001-08-02 |
Scanning electron microscope and method for dimension measuring by using the same Grant 6,114,695 - Todokoro , et al. September 5, 2 | 2000-09-05 |
Scanning electron microscope Grant 6,084,238 - Todokoro , et al. July 4, 2 | 2000-07-04 |
Electron microscope Grant 6,051,834 - Kakibayashi , et al. April 18, 2 | 2000-04-18 |
Scanning electron microscope and method for dimension measuring by using the same Grant 5,969,357 - Todokoro , et al. October 19, 1 | 1999-10-19 |
Scanning microscope Grant 5,929,439 - Todokoro , et al. July 27, 1 | 1999-07-27 |
Scanning electron microscope Grant 5,900,629 - Todokoro , et al. May 4, 1 | 1999-05-04 |
Method and apparatus for X-ray analyses Grant 5,877,498 - Sugimoto , et al. March 2, 1 | 1999-03-02 |
Scanning electron microscope Grant 5,872,358 - Todokoro , et al. February 16, 1 | 1999-02-16 |
Scanning electron microscope and method for dimension measuring by using the same Grant 5,866,904 - Todokoro , et al. February 2, 1 | 1999-02-02 |
Electron microscope Grant 5,866,905 - Kakibayashi , et al. February 2, 1 | 1999-02-02 |
Electron beam apparatus Grant 5,598,002 - Todokoro , et al. January 28, 1 | 1997-01-28 |
Scanning electron microscope and method for dimension measuring by using the same Grant 5,594,245 - Todokoro , et al. January 14, 1 | 1997-01-14 |
Method and apparatus for x-ray analyses Grant 5,594,246 - Sudo , et al. January 14, 1 | 1997-01-14 |
Surface analysis method and apparatus for carrying out the same Grant 5,481,109 - Ninomiya , et al. January 2, 1 | 1996-01-02 |
Scanning electron microscope and method for controlling a scanning electron microscope Grant 5,424,541 - Todokoro , et al. June 13, 1 | 1995-06-13 |
Electron beam apparatus Grant 5,412,209 - Otaka , et al. May 2, 1 | 1995-05-02 |
Magnetic recording head capable of defining narrow track width and magnetic recording apparatus using the same Grant 5,402,295 - Suzuki , et al. March 28, 1 | 1995-03-28 |
Electron beam writing system Grant 5,387,799 - Sohda , et al. February 7, 1 | 1995-02-07 |
Instrument and method for 3-dimensional atomic arrangement observation Grant 5,278,408 - Kakibayashi , et al. January 11, 1 | 1994-01-11 |
Scanning microscope and a method of operating such a scanning microscope Grant 5,276,325 - Todokoro , et al. January 4, 1 | 1994-01-04 |
Method and apparatus of fabricating electric circuit pattern on thick and thin film hybrid multilayer wiring substrate Grant 5,162,240 - Saitou , et al. November 10, 1 | 1992-11-10 |
Voltage measurement method using electron beam Grant 5,093,616 - Seitoh , et al. March 3, 1 | 1992-03-03 |
Apparatus using charged particle beam Grant 4,827,127 - Todokoro May 2, 1 | 1989-05-02 |
Electron beam metrology system Grant 4,751,384 - Murakoshi , et al. June 14, 1 | 1988-06-14 |
Ion microbeam apparatus Grant 4,710,632 - Ishitani , et al. December 1, 1 | 1987-12-01 |
Apparatus for chopping a charged particle beam Grant 4,626,690 - Todokoro , et al. December 2, 1 | 1986-12-02 |
Potential analyzer Grant 4,554,455 - Todokoro , et al. November 19, 1 | 1985-11-19 |
Field emission electron gun with anode heater and plural exhausts Grant 4,295,072 - Todokoro , et al. October 13, 1 | 1981-10-13 |
Field emission electron gun Grant 4,274,035 - Fukuhara , et al. June 16, 1 | 1981-06-16 |
Scanning transmission electron microscope Grant 4,099,055 - Todokoro July 4, 1 | 1978-07-04 |
Stereoscopic measuring apparatus Grant 4,039,829 - Kato , et al. August 2, 1 | 1977-08-02 |
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