| Patent | Date |
|---|
Gas injection apparatus with heating channels
Grant 11,268,193 - Hawrylchak , et al. March 8, 2 | 2022-03-08 |
Dogbone Inlet Cone Profile For Remote Plasma Oxidation Chamber
App 20210272776 - PANDEY; Vishwas Kumar ; et al. | 2021-09-02 |
Side inject nozzle design for processing chamber
Grant 11,091,835 - Tjandra , et al. August 17, 2 | 2021-08-17 |
Chamber inlet
Grant D924,825 - Shono , et al. July 13, 2 | 2021-07-13 |
Dogbone inlet cone profile for remote plasma oxidation chamber
Grant 11,049,696 - Pandey , et al. June 29, 2 | 2021-06-29 |
Side Inject Designs For Improved Radical Concentrations
App 20210074505 - SHONO; Eric Kihara ; et al. | 2021-03-11 |
Gas Injection Apparatus With Heating Channels
App 20210040612 - HAWRYLCHAK; Lara ; et al. | 2021-02-11 |
Side inject designs for improved radical concentrations
Grant 10,847,337 - Shono , et al. November 24, 2 | 2020-11-24 |
Dogbone Inlet Cone Profile For Remote Plasma Oxidation Chamber
App 20200219703 - PANDEY; Vishwas Kumar ; et al. | 2020-07-09 |
Method And Apparatus For Supplying Improved Gas Flow To A Processing Volume Of A Processing Chamber
App 20200199748 - PANDEY; Vishwas Kumar ; et al. | 2020-06-25 |
Gas injection apparatus with heating channels
Grant 10,689,757 - Hawrylchak , et al. | 2020-06-23 |
Dogbone inlet cone profile for remote plasma oxidation chamber
Grant 10,636,626 - Pandey , et al. | 2020-04-28 |
Silicon germanium selective oxidation process
Grant 10,600,641 - Tjandra | 2020-03-24 |
Improved Side Inject Nozzle Design For Processing Chamber
App 20200040453 - TJANDRA; Agus Sofian ; et al. | 2020-02-06 |
Method And Apparatus For Providing Radical Species To A Processing Volume Of A Processing Chamber
App 20190295822 - OLSEN; Christopher S. ; et al. | 2019-09-26 |
Side Inject Designs For Improved Radical Concentrations
App 20190228942 - SHONO; Eric Kihara ; et al. | 2019-07-25 |
Dogbone Inlet Cone Profile For Remote Plasma Oxidation Chamber
App 20190228951 - PANDEY; Vishwas Kumar ; et al. | 2019-07-25 |
Side inject nozzle design for processing chamber
Grant 10,260,149 - Tjandra , et al. | 2019-04-16 |
Silicon Germanium Selective Oxidation Process
App 20190006175 - TJANDRA; Agus Sofian | 2019-01-03 |
Remote Plasma Oxidation Chamber
App 20180347045 - OLSEN; Christopher S. ; et al. | 2018-12-06 |
Silicon germanium selective oxidation process
Grant 10,020,186 - Tjandra July 10, 2 | 2018-07-10 |
Gas Injection Apparatus With Heating Channels
App 20180187305 - HAWRYLCHAK; Lara ; et al. | 2018-07-05 |
Silicon Germanium Selective Oxidation Process
App 20180033615 - TJANDRA; Agus Sofian | 2018-02-01 |
H.sub.2/O.sub.2 side inject to improve process uniformity for low temperature oxidation process
Grant 9,869,017 - Tjandra , et al. January 16, 2 | 2018-01-16 |
Side Inject Nozzle Design For Processing Chamber
App 20170314126 - TJANDRA; Agus Sofian ; et al. | 2017-11-02 |
H2/o2 Side Inject To Improve Process Uniformity For Low Temperature Oxidation Process
App 20160010206 - TJANDRA; Agus Sofian ; et al. | 2016-01-14 |
Gas injection apparatus and substrate process chamber incorporating same
Grant 9,123,758 - Tjandra , et al. September 1, 2 | 2015-09-01 |
Methods And Apparatus For Selective Oxidation Of A Substrate
App 20140349491 - TJANDRA; AGUS SOFIAN ; et al. | 2014-11-27 |
Gas Injection Apparatus And Substrate Process Chamber Incorporating Same
App 20140216585 - TJANDRA; AGUS SOFIAN ; et al. | 2014-08-07 |
Methods of forming oxide layers on substrates
Grant 8,492,292 - Yokota , et al. July 23, 2 | 2013-07-23 |
Methods Of Forming Oxide Layers On Substrates
App 20100330814 - Yokota; Yoshitaka ; et al. | 2010-12-30 |
Plasma And Thermal Anneal Treatment To Improve Oxidation Resistance Of Metal-containing Films
App 20100120245 - Tjandra; Agus Sofian ; et al. | 2010-05-13 |
| 