loadpatents
Patent applications and USPTO patent grants for Tjandra; Agus.The latest application filed is for "methods and apparatus for selective oxidation of a substrate".
Patent | Date |
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Methods and apparatus for selective oxidation of a substrate Grant 9,514,968 - Tjandra , et al. December 6, 2 | 2016-12-06 |
Methods And Apparatus For Selective Oxidation Of A Substrate App 20150206777 - TJANDRA; AGUS ;   et al. | 2015-07-23 |
Methods and apparatus for selective oxidation of a substrate Grant 8,993,458 - Tjandra , et al. March 31, 2 | 2015-03-31 |
Thermal reactor with improved gas flow distribution Grant 8,608,853 - Tseng , et al. December 17, 2 | 2013-12-17 |
Methods And Apparatus For Selective Oxidation Of A Substrate App 20130210240 - TJANDRA; AGUS ;   et al. | 2013-08-15 |
Thermal Reactor With Improved Gas Flow Distribution App 20120058648 - Tseng; Ming-Kuei (Michael) ;   et al. | 2012-03-08 |
Thermal reactor with improved gas flow distribution Grant 8,056,500 - Tseng , et al. November 15, 2 | 2011-11-15 |
Thermal Reactor With Improved Gas Flow Distribution App 20090163042 - Tseng; Ming-Kuei (Michael) ;   et al. | 2009-06-25 |
Lamp array for thermal processing exhibiting improved radial uniformity Grant 7,509,035 - Ranish , et al. March 24, 2 | 2009-03-24 |
Substrate processing platform allowing processing in different ambients App 20060240680 - Yokota; Yoshitaka ;   et al. | 2006-10-26 |
Lamp array for thermal processing exhibiting improved radial uniformity App 20060066193 - Ranish; Joseph M. ;   et al. | 2006-03-30 |
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