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Radiation Detector Including Field Effect Transistor In Resonant Cavity Nanostructure App 20220042853 - Assadi; Saeed ;   et al. | 2022-02-10 |
Radiation detector including field effect transistor in resonant cavity nanostructure Grant 11,209,318 - Assadi , et al. December 28, 2 | 2021-12-28 |
Radiation Detector Including Field Effect Transistor In Resonant Cavity Nanostructure App 20190383667 - Assadi; Saeed ;   et al. | 2019-12-19 |
Optical Metrology Of Structures Formed On Semiconductor Wafers Using Machine Learning Systems App 20090198635 - Doddi; Srinivas ;   et al. | 2009-08-06 |
Transforming Metrology Data From A Semiconductor Treatment System Using Multivariate Analysis App 20090094001 - VUONG; Vi ;   et al. | 2009-04-09 |
Modeling and measuring structures with spatially varying properties in optical metrology Grant 7,515,282 - Li , et al. April 7, 2 | 2009-04-07 |
Model and parameter selection for optical metrology Grant 7,505,153 - Vuong , et al. March 17, 2 | 2009-03-17 |
Selection of wavelengths for integrated circuit optical metrology Grant 7,474,993 - Doddi , et al. January 6, 2 | 2009-01-06 |
In-die optical metrology Grant 7,474,420 - Li , et al. January 6, 2 | 2009-01-06 |
Transforming metrology data from a semiconductor treatment system using multivariate analysis Grant 7,467,064 - Vuong , et al. December 16, 2 | 2008-12-16 |
Optical Metrology Optimization For Repetitive Structures App 20080285054 - VUONG; Vi ;   et al. | 2008-11-20 |
Examining a structure formed on a semiconductor wafer using machine learning systems Grant 7,453,584 - Li , et al. November 18, 2 | 2008-11-18 |
Generic interface for an optical metrology system Grant 7,450,232 - Li , et al. November 11, 2 | 2008-11-11 |
Optimized characterization of wafers structures for optical metrology Grant 7,444,196 - Scheer , et al. October 28, 2 | 2008-10-28 |
Optical Metrology Of Single Features App 20080259357 - BISCHOFF; Joerg ;   et al. | 2008-10-23 |
Adaptive correlation of pattern resist structures using optical metrology Grant 7,440,881 - Engelhard , et al. October 21, 2 | 2008-10-21 |
Generation Of A Library Of Periodic Grating Diffraction Signals App 20080249754 - Niu; Xinhui ;   et al. | 2008-10-09 |
Optimization of diffraction order selection for two-dimensional structures Grant 7,428,060 - Jin , et al. September 23, 2 | 2008-09-23 |
Generating simulated diffraction signals for two-dimensional structures Grant 7,427,521 - Bischoff , et al. September 23, 2 | 2008-09-23 |
Split machine learning systems Grant 7,421,414 - Liu , et al. September 2, 2 | 2008-09-02 |
Azimuthal scanning of a structure formed on a semiconductor wafer Grant 7,414,733 - Bischoff , et al. August 19, 2 | 2008-08-19 |
Optical Metrology Model Optimization For Repetitive Structures App 20080195342 - LI; Shifang ;   et al. | 2008-08-14 |
Optical metrology model optimization for process control Grant 7,395,132 - Prager , et al. July 1, 2 | 2008-07-01 |
Selecting a hypothetical profile to use in optical metrology Grant 7,394,554 - Vuong , et al. July 1, 2 | 2008-07-01 |
Model And Parameter Selection For Optical Metrology App 20080151269 - Vuong; Vi ;   et al. | 2008-06-26 |
Optical metrology optimization for repetitive structures Grant 7,388,677 - Vuong , et al. June 17, 2 | 2008-06-17 |
Optical metrology of single features Grant 7,379,192 - Bischoff , et al. May 27, 2 | 2008-05-27 |
Optical metrology model optimization for repetitive structures Grant 7,355,728 - Li , et al. April 8, 2 | 2008-04-08 |
Library Accuracy Enhancment And Evaluation App 20080071504 - Li; Shifang ;   et al. | 2008-03-20 |
Model and parameter selection for optical metrology Grant 7,330,279 - Vuong , et al. February 12, 2 | 2008-02-12 |
Examining A Structure Formed On A Semiconductor Wafer Using Machine Learning Systems App 20080033683 - LI; Shifang ;   et al. | 2008-02-07 |
Library accuracy enhancement and evaluation Grant 7,302,367 - Li , et al. November 27, 2 | 2007-11-27 |
Optimized characterization of wafers structures for optical metrology App 20070250200 - Scheer; Steven ;   et al. | 2007-10-25 |
Azimuthal scanning of a structure formed on a semiconductor wafer App 20070236705 - Bischoff; Joerg ;   et al. | 2007-10-11 |
Examining a structure formed on a semiconductor wafer using machine learning systems Grant 7,280,229 - Li , et al. October 9, 2 | 2007-10-09 |
Optical metrology of multiple patterned layers App 20070229854 - Wu; Li ;   et al. | 2007-10-04 |
In-die optical metrology App 20070229855 - Li; Shifang ;   et al. | 2007-10-04 |
Generation of a library of periodic grating diffraction signals Grant 7,277,189 - Niu , et al. October 2, 2 | 2007-10-02 |
Optical metrology model optimization for process control App 20070225851 - Prager; Dan ;   et al. | 2007-09-27 |
Library accuracy enhancement and evaluation App 20070225940 - Li; Shifang ;   et al. | 2007-09-27 |
Optimization of diffraction order selection for two-dimensional structures App 20070223011 - Jin; Wen ;   et al. | 2007-09-27 |
Resolution enhanced optical metrology Grant 7,274,472 - Bischoff September 25, 2 | 2007-09-25 |
Optical metrology of a structure formed on a semiconductor wafer using optical pulses Grant 7,274,465 - Bischoff , et al. September 25, 2 | 2007-09-25 |
Generic interface for an optical metrology system Grant 7,271,902 - Li , et al. September 18, 2 | 2007-09-18 |
Weighting function to enhance measured diffraction signals in optical metrology App 20070211260 - Vuong; Vi ;   et al. | 2007-09-13 |
Selection of wavelengths for integrated circuit optical metrology App 20070198211 - Doddi; Srinivas ;   et al. | 2007-08-23 |
Transforming metrology data from a semiconductor treatment system using multivariate analysis App 20070185684 - Vuong; Vi ;   et al. | 2007-08-09 |
Optical metrology model optimization based on goals App 20070135959 - Vuong; Vi ;   et al. | 2007-06-14 |
Azimuthal scanning of a structure formed on a semiconductor wafer Grant 7,224,471 - Bischoff , et al. May 29, 2 | 2007-05-29 |
Selection of wavelengths for integrated circuit optical metrology Grant 7,216,045 - Doddi , et al. May 8, 2 | 2007-05-08 |
Optical metrology model optimization based on goals Grant 7,171,284 - Vuong , et al. January 30, 2 | 2007-01-30 |
Modeling and measuring structures with spatially varying properties in optical metrology App 20070002337 - Li; Shifang ;   et al. | 2007-01-04 |
Optical metrology model optimization for repetitive structures App 20060290947 - Li; Shifang ;   et al. | 2006-12-28 |
Generation and use of integrated circuit profile-based simulation information Grant 7,136,796 - Jakatdar , et al. November 14, 2 | 2006-11-14 |
Parametric optimization of optical metrology model Grant 7,126,700 - Bao , et al. October 24, 2 | 2006-10-24 |
Split machine learning systems App 20060224528 - Liu; Wei ;   et al. | 2006-10-05 |
Selecting unit cell configuration for repeating structures in optical metrology App 20060187466 - Li; Shifang ;   et al. | 2006-08-24 |
Optical metrology of single features App 20060187468 - Bischoff; Joerg ;   et al. | 2006-08-24 |
Optical metrology of a structure formed on a semiconductor wafer using optical pulses App 20060181713 - Bischoff; Joerg ;   et al. | 2006-08-17 |
Optimized model and parameter selection for optical metrology Grant 7,092,110 - Balasubramanian , et al. August 15, 2 | 2006-08-15 |
Model optimization for structures with additional materials Grant 7,072,049 - Niu , et al. July 4, 2 | 2006-07-04 |
Generic interface for an optical metrology system Grant 7,064,829 - Li , et al. June 20, 2 | 2006-06-20 |
Optical metrology model optimization for process control Grant 7,065,423 - Prager , et al. June 20, 2 | 2006-06-20 |
Examining a structure formed on a semiconductor wafer using machine learning systems App 20060119863 - Li; Shifang ;   et al. | 2006-06-08 |
Edge roughness measurement in optical metrology Grant 7,046,375 - Bischoff , et al. May 16, 2 | 2006-05-16 |
Balancing planarization of layers and the effect of underlying structure on the metrology signal Grant 7,041,515 - Jakatdar , et al. May 9, 2 | 2006-05-09 |
Optical metrology of single features Grant 7,030,999 - Bischoff , et al. April 18, 2 | 2006-04-18 |
Generating a library of simulated-diffraction signals and hypothetical profiles of periodic gratings Grant 7,031,894 - Niu , et al. April 18, 2 | 2006-04-18 |
Optical metrology model optimization based on goals App 20060064280 - Vuong; Vi ;   et al. | 2006-03-23 |
Controlling critical dimensions of structures formed on a wafer in semiconductor processing App 20060046166 - Yang; Wenge ;   et al. | 2006-03-02 |
Optical metrology model optimization for process control App 20060009872 - Prager; Dan ;   et al. | 2006-01-12 |
Shape roughness measurement in optical metrology App 20050275850 - Bischoff, Joerg ;   et al. | 2005-12-15 |
Generation of a library of periodic grating diffraction signals App 20050256687 - Niu, Xinhui ;   et al. | 2005-11-17 |
Method and system of dynamic learning through a regression-based library generation process Grant 6,961,679 - Niu , et al. November 1, 2 | 2005-11-01 |
Caching of intra-layer calculations for rapid rigorous coupled-wave analyses Grant 6,952,271 - Niu , et al. October 4, 2 | 2005-10-04 |
Optical metrology optimization for repetitive structures App 20050209816 - Vuong, Vi ;   et al. | 2005-09-22 |
Overlay measurements using zero-order cross polarization measurements Grant 6,947,141 - Bischoff , et al. September 20, 2 | 2005-09-20 |
Generation of a library of periodic grating diffraction signals Grant 6,943,900 - Niu , et al. September 13, 2 | 2005-09-13 |
Selecting a profile model for use in optical metrology using a machine learining system App 20050192914 - Drege, Emmanuel ;   et al. | 2005-09-01 |
Method and system for dynamic learning through a regression-based library generation process Grant 6,928,395 - Niu , et al. August 9, 2 | 2005-08-09 |
Caching of intra-layer calculations for rapid rigorous coupled-wave analyses Grant 6,891,626 - Niu , et al. May 10, 2 | 2005-05-10 |
Azimuthal scanning of a structure formed on a semiconductor wafer App 20050088665 - Bischoff, Joerg ;   et al. | 2005-04-28 |
Grating test patterns and methods for overlay metrology Grant 6,855,464 - Niu , et al. February 15, 2 | 2005-02-15 |
Clustering for data compression Grant 6,857,114 - Doddi February 15, 2 | 2005-02-15 |
Overlay measurements using zero-order cross polarization measurements App 20050030536 - Bischoff, Joerg ;   et al. | 2005-02-10 |
Metrology hardware adaptation with universal library Grant 6,853,942 - Drege , et al. February 8, 2 | 2005-02-08 |
Adaptive correlation of pattern resist structures using optical metrology App 20050007577 - Engelhard, Daniel Edward ;   et al. | 2005-01-13 |
Integrated circuit profile value determination Grant 6,842,261 - Bao , et al. January 11, 2 | 2005-01-11 |
Optical profilometry of additional-material deviations in a periodic grating Grant 6,839,145 - Niu , et al. January 4, 2 | 2005-01-04 |
System and method for efficient simulation of reflectometry response from two-dimensional grating structures Grant 6,833,914 - Bao , et al. December 21, 2 | 2004-12-21 |
Method and system of dynamic learning through a regression-based library generation process App 20040225477 - Niu, Xinhui ;   et al. | 2004-11-11 |
Method and system of dynamic learning through a regression-based library generation process App 20040220760 - Niu, Xinhui ;   et al. | 2004-11-04 |
Optical metrology of single features App 20040212812 - Bischoff, Joerg ;   et al. | 2004-10-28 |
Overlay measurements using zero-order cross polarization measurements Grant 6,804,005 - Bischoff , et al. October 12, 2 | 2004-10-12 |
Adaptive correlation of pattern resist structures using optical metrology Grant 6,791,679 - Engelhard , et al. September 14, 2 | 2004-09-14 |
Metrology diffraction signal adaptation for tool-to-tool matching Grant 6,792,328 - Laughery , et al. September 14, 2 | 2004-09-14 |
Method and system of dynamic learning through a regression-based library generation process Grant 6,785,638 - Niu , et al. August 31, 2 | 2004-08-31 |
Single pass lithography overlay technique Grant 6,780,550 - Laughery , et al. August 24, 2 | 2004-08-24 |
Optical metrology of single features Grant 6,775,015 - Bischoff , et al. August 10, 2 | 2004-08-10 |
Overlay measurements using periodic gratings Grant 6,772,084 - Bischoff , et al. August 3, 2 | 2004-08-03 |
Balancing planarization of layers and the effect of underlying structure on the metrology signal App 20040147048 - Jakatdar, Nickhil ;   et al. | 2004-07-29 |
System and method for real-time library generation of grating profiles Grant 6,768,983 - Jakatdar , et al. July 27, 2 | 2004-07-27 |
System and method for characterizing macro-grating test patterns in advanced lithography and etch processes Grant 6,750,961 - Niu , et al. June 15, 2 | 2004-06-15 |
Balancing planarization of layers and the effect of underlying structure on the metrology signal Grant 6,743,646 - Jakatdar , et al. June 1, 2 | 2004-06-01 |
Metrology hardware specification using a hardware simulator Grant 6,721,691 - Bao , et al. April 13, 2 | 2004-04-13 |
Grating test patterns and methods for overlay metrology Grant 6,699,624 - Niu , et al. March 2, 2 | 2004-03-02 |
Profiler business model Grant 6,694,275 - Jakadar , et al. February 17, 2 | 2004-02-17 |
Combined optical profilometry and projection microscopy of integrated circuit structures Grant 6,645,824 - Yang , et al. November 11, 2 | 2003-11-11 |
System and method for grating profile classification Grant 6,636,843 - Doddi , et al. October 21, 2 | 2003-10-21 |
Measurement of metal electroplating and seed layer thickness and profile Grant 6,608,686 - Lane , et al. August 19, 2 | 2003-08-19 |
Optical profilometry of additional-material deviations in a periodic grating Grant 6,608,690 - Niu , et al. August 19, 2 | 2003-08-19 |
Profile refinement for integrated circuit metrology Grant 6,609,086 - Bao , et al. August 19, 2 | 2003-08-19 |
System and method for characterizing macro-grating test patterns in advanced lithography and etch processes Grant 6,538,731 - Niu , et al. March 25, 2 | 2003-03-25 |
System and method for grating profile classification App 20020188580 - Doddi, Srinivas ;   et al. | 2002-12-12 |