loadpatents
Patent applications and USPTO patent grants for TILSCH; Markus K..The latest application filed is for "coating control using forward parameter correction and adapted reverse engineering".
Patent | Date |
---|---|
Coating Control Using Forward Parameter Correction And Adapted Reverse Engineering App 20210332474 - YUAN; Zhao ;   et al. | 2021-10-28 |
Optical Monitor App 20210002756 - TILSCH; Markus K. ;   et al. | 2021-01-07 |
Silicon Coating On Hard Shields App 20190218669 - PREUSS; Adam Andrew ;   et al. | 2019-07-18 |
Method and sputter-deposition system for depositing a layer composed of a mixture of materials and having a predetermined refractive index Grant 8,864,958 - Tilsch , et al. October 21, 2 | 2014-10-21 |
Method and control system for depositing a layer Grant 8,658,001 - Ockenfuss , et al. February 25, 2 | 2014-02-25 |
Magnetron sputtering device Grant 8,163,144 - Tilsch , et al. April 24, 2 | 2012-04-24 |
Substrate holder assembly device Grant 7,954,219 - Seddon , et al. June 7, 2 | 2011-06-07 |
Cathode for sputter coating Grant 7,879,209 - Tilsch , et al. February 1, 2 | 2011-02-01 |
Magnetic latch for a vapour deposition system Grant 7,785,456 - Seddon , et al. August 31, 2 | 2010-08-31 |
Anode For Sputter Coating App 20090250341 - Ockenfuss; Georg J. ;   et al. | 2009-10-08 |
Method And Sputter-Deposition System For Depositing A Layer Composed Of A Mixture Of Materials And Having A Predetermined Refractive Index App 20080223714 - Tilsch; Markus K. ;   et al. | 2008-09-18 |
Method And Control System For Depositing A Layer App 20080223716 - Ockenfuss; Georg J. ;   et al. | 2008-09-18 |
Substrate Holder Assembly Device App 20080006529 - Seddon; Richard I. ;   et al. | 2008-01-10 |
Tunable optical add/drop device Grant 7,062,122 - Bergeron , et al. June 13, 2 | 2006-06-13 |
Magnetic latch for a vapour deposition system App 20060081468 - Seddon; Richard I. ;   et al. | 2006-04-20 |
Magnetron sputtering device App 20060070877 - Tilsch; Markus K. ;   et al. | 2006-04-06 |
Anode for sputter coating App 20060049041 - Ockenfuss; Georg J. ;   et al. | 2006-03-09 |
Cathode for sputter coating App 20060049042 - Tilsch; Markus K. ;   et al. | 2006-03-09 |
Wavelength tunable add-drop optical filter App 20040096148 - Bergeron, Adam ;   et al. | 2004-05-20 |
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