Patent | Date |
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Spinwave Wave Resonator App 20210111473 - ADELMANN; Hanns Christoph ;   et al. | 2021-04-15 |
Two axes MEMS resonant magnetometer Grant 9,594,128 - Farghaly , et al. March 14, 2 | 2017-03-14 |
Two Axes MEMS Resonant Magnetometer App 20140292323 - Farghaly; Mahmoud A. ;   et al. | 2014-10-02 |
MEMS element and electrical device using the same Grant 8,610,224 - Naito , et al. December 17, 2 | 2013-12-17 |
Mems Element And Electrical Device Using The Same App 20130214366 - NAITO; Yasuyuki ;   et al. | 2013-08-22 |
Oven Controlled MEMS Oscillator Device App 20120305542 - Donnay; Stephane ;   et al. | 2012-12-06 |
Optimal Leg Design for MEMS Resonator App 20120188023 - Rottenberg; Xavier ;   et al. | 2012-07-26 |
Method For Precisely Controlled Masked Anodization App 20120132529 - Zekry; Joseph ;   et al. | 2012-05-31 |
Temperature Measurement System Comprising A Resonant Mems Device App 20110210801 - Rottenberg; Xavier ;   et al. | 2011-09-01 |
Method for the production of planar structures Grant 8,003,537 - Rottenberg , et al. August 23, 2 | 2011-08-23 |
Temperature Compensation Device and Method for MEMS Resonator App 20110175492 - Stoffels; Steve ;   et al. | 2011-07-21 |
Micro Electromechanical Device With Stress and Stress Gradient Compensation App 20110010136 - Klaasse; Gerrit ;   et al. | 2011-01-13 |
System for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules Grant 7,835,157 - Tilmans , et al. November 16, 2 | 2010-11-16 |
Reconfigurable cavity resonator with movable micro-electromechanical elements as tuning elements Grant 7,586,393 - Tilmans , et al. September 8, 2 | 2009-09-08 |
Method for designing a micro electromechanical device with reduced self-actuation Grant 7,439,117 - Tilmans , et al. October 21, 2 | 2008-10-21 |
Method And System For Fabrication Of Integrated Tunable/switchable Passive Microwave And Millimeter Wave Modules App 20080157897 - Tilmans; Hendrikus ;   et al. | 2008-07-03 |
Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules Grant 7,368,311 - Tilmans , et al. May 6, 2 | 2008-05-06 |
Method For The Production Of Planar Structures App 20080038916 - Rottenberg; Xavier ;   et al. | 2008-02-14 |
Reconfigurable Cavity Resonator With Movable Micro-electromechanical Elements As Tuning Elements App 20070257750 - Tilmans; Hendrikus ;   et al. | 2007-11-08 |
Micro electromechanical device with stress and stress gradient compensation App 20070069605 - Klaasse; Gerrit ;   et al. | 2007-03-29 |
Method for designing a micro electromechanical device with reduced self-actuation App 20060168788 - Tilmans; Hendrikus ;   et al. | 2006-08-03 |
Switchable capacitor and method of making the same Grant 7,002,439 - Rottenberg , et al. February 21, 2 | 2006-02-21 |
Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules Grant 6,876,056 - Tilmans , et al. April 5, 2 | 2005-04-05 |
Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules App 20050003606 - Tilmans, Hendrikus ;   et al. | 2005-01-06 |
Switchable capacitor and method of making the same App 20040124497 - Rottenberg, Xavier ;   et al. | 2004-07-01 |
Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules App 20030042567 - Tilmans, Hendrikus ;   et al. | 2003-03-06 |