Tieger; Daniel R.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tieger; Daniel R..The latest application filed is for "temperature control for insertable target holder for solid dopant materials".
- Tieger; Daniel R. - Manchester MA
| Patent | Date |
|---|---|
| Insertable target holder for solid dopant materials Grant 11,404,254 - Patel , et al. August 2, 2 | 2022-08-02 |
| Temperature Control For Insertable Target Holder For Solid Dopant Materials App 20210375585 - Patel; Shreyansh P. ; et al. | 2021-12-02 |
| Temperature control for insertable target holder for solid dopant materials Grant 11,170,973 - Patel , et al. November 9, 2 | 2021-11-09 |
| Temperature Control For Insertable Target Holder For Solid Dopant Materials App 20210110995 - Patel; Shreyansh P. ; et al. | 2021-04-15 |
| Insertable target holder for improved stability and performance for solid dopant materials Grant 10,957,509 - Wright , et al. March 23, 2 | 2021-03-23 |
| Ion source with multiple configurations Grant 10,896,799 - Becker , et al. January 19, 2 | 2021-01-19 |
| Insertable Target Holder For Solid Dopant Materials App 20200090916 - Patel; Shreyansh ; et al. | 2020-03-19 |
| Ion source for enhanced ionization Grant 10,290,461 - Tieger , et al. | 2019-05-14 |
| Ion Source For Enhanced Ionization App 20190122851 - Tieger; Daniel R. ; et al. | 2019-04-25 |
| Ion source for enhanced ionization Grant 9,691,584 - Tieger , et al. June 27, 2 | 2017-06-27 |
| Laser-Induced Borane Production for Ion Implantation App 20160175804 - Lee; William Davis ; et al. | 2016-06-23 |
| Methods for beam current modulation by ion source parameter modulation Grant 8,803,110 - Graf , et al. August 12, 2 | 2014-08-12 |
| Carbon implantation process and carbon ion precursor composition Grant 8,524,584 - Lee , et al. September 3, 2 | 2013-09-03 |
| Aromatic molecular carbon implantation processes Grant 8,350,236 - Lee , et al. January 8, 2 | 2013-01-08 |
| Carbon Implantation Process And Carbon Ion Precursor Composition App 20120190181 - LEE; WILLIAM D. ; et al. | 2012-07-26 |
| Hybrid ion source/multimode ion source Grant 8,193,513 - DiVergilio , et al. June 5, 2 | 2012-06-05 |
| Aromatic Molecular Carbon Implantation Processes App 20110171817 - Lee; W. Davis ; et al. | 2011-07-14 |
| Methods for implanting B22Hx and its ionized lower mass byproducts Grant 7,759,657 - Tieger , et al. July 20, 2 | 2010-07-20 |
| METHODS FOR IMPLANTING B22Hx AND ITS IONIZED LOWER MASS BYPRODUCTS App 20090314958 - Tieger; Daniel R. ; et al. | 2009-12-24 |
| Methods for rapidly switching off an ion beam Grant 7,589,333 - Graf , et al. September 15, 2 | 2009-09-15 |
| Fluorine based cleaning of an ion source Grant 7,531,819 - DiVergilio , et al. May 12, 2 | 2009-05-12 |
| Hybrid Ion Source/multimode Ion Source App 20090032728 - DiVergilio; William F. ; et al. | 2009-02-05 |
| Methods for beam current modulation by ion source parameter modulation App 20080078957 - Graf; Michael A. ; et al. | 2008-04-03 |
| Methods for rapidly switching off an ion beam App 20080078955 - Graf; Michael A. ; et al. | 2008-04-03 |
| Fluorine based cleaning of an ion source App 20070137671 - DiVergilio; William F. ; et al. | 2007-06-21 |
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