Tichenor; Daniel A.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tichenor; Daniel A..The latest application filed is for "condenser optic with sacrificial reflective surface".
- Tichenor; Daniel A. - Castro Valley CA
- Tichenor; Daniel A. - Freemont CA
| Patent | Date |
|---|---|
| Condenser optic with sacrificial reflective surface Grant 7,239,443 - Tichenor , et al. July 3, 2 | 2007-07-03 |
| Condenser optic with sacrificial reflective surface App 20060245045 - Tichenor; Daniel A. ; et al. | 2006-11-02 |
| Condenser optic with sacrificial reflective surface Grant 7,081,992 - Tichenor , et al. July 25, 2 | 2006-07-25 |
| Condenser optic with sacrificial reflective surface App 20050157383 - Tichenor, Daniel A. ; et al. | 2005-07-21 |
| Compensation of flare-induced CD changes EUVL Grant 6,815,129 - Bjorkholm , et al. November 9, 2 | 2004-11-09 |
| Mask-to-wafer alignment system Grant 6,642,995 - Sweatt , et al. November 4, 2 | 2003-11-04 |
| Mask-to-wafer alignment system App 20030086068 - Sweatt, William C. ; et al. | 2003-05-08 |
| Diffraction spectral filter for use in extreme-UV lithography condenser Grant 6,469,827 - Sweatt , et al. October 22, 2 | 2002-10-22 |
| Projection lithography with distortion compensation using reticle chuck contouring Grant 6,229,871 - Tichenor May 8, 2 | 2001-05-08 |
| Extreme ultraviolet lithography machine Grant 6,031,598 - Tichenor , et al. February 29, 2 | 2000-02-29 |
| Optical double-slit particle measuring system Grant 4,441,816 - Hencken , et al. April 10, 1 | 1984-04-10 |
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