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Patent applications and USPTO patent grants for Tian; Caiz Hong.The latest application filed is for "surface wave plasma processing system and method of using".
Patent | Date |
---|---|
Method and system for improving coupling between a surface wave plasma source and a plasma space Grant 7,584,714 - Chen , et al. September 8, 2 | 2009-09-08 |
Method for treating a substrate Grant 7,268,084 - Chen , et al. September 11, 2 | 2007-09-11 |
Surface wave plasma processing system and method of using Grant 7,138,767 - Chen , et al. November 21, 2 | 2006-11-21 |
Surface wave plasma processing system and method of using App 20060071607 - Chen; Lee ;   et al. | 2006-04-06 |
Plasma processing system for treating a substrate App 20060065367 - Chen; Lee ;   et al. | 2006-03-30 |
Method and system for improving coupling between a surface wave plasma source and a plasma space App 20060065621 - Chen; Lee ;   et al. | 2006-03-30 |
Method for treating a substrate App 20060065629 - Chen; Lee ;   et al. | 2006-03-30 |
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