loadpatents
Patent applications and USPTO patent grants for Thompson; Raymon F..The latest application filed is for "wafer processing apparatus having independently rotatable wafer support and processing dish".
Patent | Date |
---|---|
Electroplating Apparatus Having Scroll Pump App 20150014175 - Thompson; Raymon F. | 2015-01-15 |
Wafer Processing Apparatus Having Scroll Pump App 20150014176 - Thompson; Raymon F. | 2015-01-15 |
Wafer Processing Apparatus Having Independently Rotatable Wafer Support And Processing Dish App 20150017805 - Thompson; Raymon F. | 2015-01-15 |
Wafer handling system Grant 8,028,978 - Nelson , et al. October 4, 2 | 2011-10-04 |
Semiconductor workpiece Grant 7,898,089 - Dolechek , et al. March 1, 2 | 2011-03-01 |
Process and apparatus for thinning a semiconductor workpiece Grant 7,625,821 - Dolechek , et al. December 1, 2 | 2009-12-01 |
Semiconductor workpiece Grant 7,354,649 - Dolechek , et al. April 8, 2 | 2008-04-08 |
Semiconductor workpiece App 20080063853 - Dolechek; Kert L. ;   et al. | 2008-03-13 |
Process for thinning a semiconductor workpiece Grant 7,288,489 - Dolechek , et al. October 30, 2 | 2007-10-30 |
Process and apparatus for thinning a semiconductor workpiece Grant 7,193,295 - Dolechek , et al. March 20, 2 | 2007-03-20 |
Apparatus for use in processing a semiconductor workpiece App 20070026772 - Dolechek; Kert L. ;   et al. | 2007-02-01 |
Semiconductor processing apparatus Grant 7,138,016 - Reardon , et al. November 21, 2 | 2006-11-21 |
Die-level wafer contact for direct-on-barrier plating App 20060226019 - Thompson; Raymon F. ;   et al. | 2006-10-12 |
Apparatus For Use In Thinning A Semiconductor Workpiece App 20060220329 - Dolechek; Kert L. ;   et al. | 2006-10-05 |
Process And Apparatus For Thinning A Semiconductor Workpiece App 20060203418 - Dolechek; Kert L. ;   et al. | 2006-09-14 |
Process And Apparatus For Thinning A Semiconductor Workpiece App 20060203419 - Dolechek; Kert L. ;   et al. | 2006-09-14 |
Semiconductor processing apparatus Grant 7,094,291 - Reardon , et al. August 22, 2 | 2006-08-22 |
Process For Thinning A Semiconductor Workpiece App 20060118515 - Dolechek; Kert L. ;   et al. | 2006-06-08 |
Apparatus for use in thinning a semiconductor workpiece App 20060046499 - Dolechek; Kert L. ;   et al. | 2006-03-02 |
Process and apparatus for thinning a semiconductor workpiece App 20060040467 - Dolechek; Kert L. ;   et al. | 2006-02-23 |
Process chamber and system for thinning a semiconductor workpiece App 20060040111 - Dolechek; Kert L. ;   et al. | 2006-02-23 |
Semiconductor workpiece App 20060040086 - Dolechek; Kert L. ;   et al. | 2006-02-23 |
System for processing a workpiece Grant 6,997,988 - Curtis , et al. February 14, 2 | 2006-02-14 |
Semiconductor processing system with wafer container docking and loading station Grant 6,960,257 - Thompson , et al. November 1, 2 | 2005-11-01 |
Single workpiece processing system Grant 6,900,132 - Thompson , et al. May 31, 2 | 2005-05-31 |
Diffuser with spiral opening pattern for electroplating reactor vessel Grant 6,881,309 - Hanson , et al. April 19, 2 | 2005-04-19 |
Method for processing a semiconductor wafer App 20050032391 - Peace, Steven L. ;   et al. | 2005-02-10 |
Selective treatment of the surface of a microelectronic workpiece App 20050020001 - Aegerter, Brian ;   et al. | 2005-01-27 |
Reactor for processing a semiconductor wafer Grant 6,794,291 - Peace , et al. September 21, 2 | 2004-09-21 |
Single workpiece processing system App 20040112738 - Thompson, Raymon F. ;   et al. | 2004-06-17 |
System for processing a workpiece Grant 6,695,914 - Curtis , et al. February 24, 2 | 2004-02-24 |
Reactor for processing a semiconductor wafer Grant 6,692,613 - Peace , et al. February 17, 2 | 2004-02-17 |
System for processing a workpiece Grant 6,666,922 - Curtis , et al. December 23, 2 | 2003-12-23 |
System for processing a workpiece Grant 6,660,098 - Curtis , et al. December 9, 2 | 2003-12-09 |
Dual cassette centrifugal processor Grant 6,660,104 - Thompson , et al. December 9, 2 | 2003-12-09 |
Semiconductor processing system with wafer container docking and loading station App 20030202871 - Thompson, Raymon F. ;   et al. | 2003-10-30 |
Wafer handling system App 20030188447 - Nelson, Gordon R. ;   et al. | 2003-10-09 |
Micro-environment chamber and system for rinsing and drying a semiconductor workpiece Grant 6,622,737 - Curtis , et al. September 23, 2 | 2003-09-23 |
Micro-environment chamber and system for rinsing and drying a semiconductor workpiece App 20020195129 - Curtis, Gary L. ;   et al. | 2002-12-26 |
Reactor for processing a semiconductor wafer App 20020189652 - Peace, Steven L. ;   et al. | 2002-12-19 |
Reactor for processing a semiconductor wafer App 20020185163 - Peace, Steven L. ;   et al. | 2002-12-12 |
Dual cassette centrifugal processor App 20020179122 - Thompson, Raymon F. ;   et al. | 2002-12-05 |
Selective treatment of the surface of a microelectronic workpiece App 20020144973 - Aegerter, Brian ;   et al. | 2002-10-10 |
Reactor for processing a semiconductor wafer Grant 6,423,642 - Peace , et al. July 23, 2 | 2002-07-23 |
Selective treatment of the surface of a microelectronic workpiece Grant 6,413,436 - Aegerter , et al. July 2, 2 | 2002-07-02 |
Diffuser with spiral opening pattern for electroplating reactor vessel App 20020046942 - Hanson, Kyle M. ;   et al. | 2002-04-25 |
System for processing a workpiece App 20020023717 - Curtis, Gary L. ;   et al. | 2002-02-28 |
System for processing a workpiece App 20010053411 - Curtis, Gary L. ;   et al. | 2001-12-20 |
System for processing a workpiece App 20010050060 - Curtis, Gary L. ;   et al. | 2001-12-13 |
System for processing a workpiece App 20010047757 - Curtis, Gary L. ;   et al. | 2001-12-06 |
System for processing a workpiece App 20010047752 - Curtis, Gary L. ;   et al. | 2001-12-06 |
Micro-environment chamber and system for rinsing and drying a semiconductor workpiece App 20010032660 - Curtis, Gary L. ;   et al. | 2001-10-25 |
Reactor for processing a microelectronic workpiece App 20010015176 - Curtis, Gary L. ;   et al. | 2001-08-23 |
Reactor for processing a microelectronic workpiece Grant 6,264,752 - Curtis , et al. July 24, 2 | 2001-07-24 |
Diffuser with spiral opening pattern for an electroplating reactor vessel Grant 6,254,742 - Hanson , et al. July 3, 2 | 2001-07-03 |
Gas intake assembly for a wafer processing system Grant 6,105,592 - Thompson , et al. August 22, 2 | 2000-08-22 |
Semiconductor wafer processing system Grant 6,014,817 - Thompson , et al. January 18, 2 | 2000-01-18 |
Semiconductor processing systems Grant 5,882,168 - Thompson , et al. March 16, 1 | 1999-03-16 |
Semiconductor processing system with wafer container docking and loading station Grant 5,836,736 - Thompson , et al. November 17, 1 | 1998-11-17 |
Carrierless centrifugal semiconductor processing system Grant 5,784,797 - Curtis , et al. July 28, 1 | 1998-07-28 |
Semiconductor processing systems Grant 5,784,802 - Thompson , et al. July 28, 1 | 1998-07-28 |
Semiconductor processing systems Grant 5,678,320 - Thompson , et al. October 21, 1 | 1997-10-21 |
Semiconductor processing system with wafer container docking and loading station Grant 5,660,517 - Thompson , et al. August 26, 1 | 1997-08-26 |
Semiconductor wafer processing system Grant 5,544,421 - Thompson , et al. August 13, 1 | 1996-08-13 |
Semiconductor processor wafer holder Grant 5,431,421 - Thompson , et al. July 11, 1 | 1995-07-11 |
Multi-station semiconductor processor with volatilization Grant 5,377,708 - Bergman , et al. January 3, 1 | 1995-01-03 |
Semiconductor processor apparatus with dynamic wafer vapor treatment and particulate volatilization Grant 5,235,995 - Bergman , et al. August 17, 1 | 1993-08-17 |
Robot loadable centrifugal semiconductor processor with extendible rotor Grant 5,232,328 - Owczarz , et al. August 3, 1 | 1993-08-03 |
Method for single wafer processing in which a semiconductor wafer is contacted with a fluid Grant 5,230,743 - Thompson , et al. July 27, 1 | 1993-07-27 |
Single wafer processor Grant 5,224,504 - Thompson , et al. July 6, 1 | 1993-07-06 |
Centrifugal wafer carrier cleaning apparatus Grant 5,224,503 - Thompson , et al. July 6, 1 | 1993-07-06 |
Single wafer processor with a frame Grant 5,222,310 - Thompson , et al. June 29, 1 | 1993-06-29 |
Semiconductor processor methods Grant 5,221,360 - Thompson , et al. June 22, 1 | 1993-06-22 |
Semiconductor processor with extendible receiver for handling multiple discrete wafers without wafer carriers Grant 5,174,045 - Thompson , et al. December 29, 1 | 1992-12-29 |
Single wafer processor Grant 5,168,886 - Thompson , et al. December 8, 1 | 1992-12-08 |
Single wafer processor apparatus Grant 5,168,887 - Thompson , et al. December 8, 1 | 1992-12-08 |
Semiconductor processor draining Grant 5,154,199 - Thompson , et al. October 13, 1 | 1992-10-13 |
Semiconductor processor gas-liquid separation Grant 5,095,927 - Thompson , et al. March 17, 1 | 1992-03-17 |
Low contamination blending and metering systems for semiconductor processing Grant 5,085,560 - Thompson , et al. February 4, 1 | 1992-02-04 |
Rinser dryer system Grant 5,022,419 - Thompson , et al. June 11, 1 | 1991-06-11 |
Slow acting fluid valve Grant 4,872,638 - Thompson , et al. October 10, 1 | 1989-10-10 |
Centrifugal wafer processor Grant 4,300,581 - Thompson November 17, 1 | 1981-11-17 |
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