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Patent applications and USPTO patent grants for Thome; Bruno.The latest application filed is for "microlithographic projection exposure apparatus".
Patent | Date |
---|---|
Microlithographic Projection Exposure Apparatus App 20170322343 - Kamenov; Vladimir ;   et al. | 2017-11-09 |
Microlithographic projection exposure apparatus Grant 9,733,395 - Kamenov , et al. August 15, 2 | 2017-08-15 |
Microlithographic illumination system Grant 9,341,953 - Deguenther , et al. May 17, 2 | 2016-05-17 |
Microlithographic Projection Exposure Apparatus App 20140320955 - Kamenov; Vladimir ;   et al. | 2014-10-30 |
Microlithographic Illumination System App 20140176930 - Deguenther; Markus ;   et al. | 2014-06-26 |
Microlithographic illumination system Grant 8,705,005 - Deguenther , et al. April 22, 2 | 2014-04-22 |
Microlithographic Projection Exposure Apparatus App 20110222043 - Kamenov; Vladimir ;   et al. | 2011-09-15 |
Microlithographic Illumination System App 20090021715 - Deguenther; Markus ;   et al. | 2009-01-22 |
Microlithographic projection exposure apparatus App 20080297754 - Kamenov; Vladimir ;   et al. | 2008-12-04 |
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