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Theiler; Thomas Patent Filings

Theiler; Thomas

Patent Applications and Registrations

Patent applications and USPTO patent grants for Theiler; Thomas.The latest application filed is for "device and method for producing dielectric layers in microwave plasma".

Company Profile
0.4.3
  • Theiler; Thomas - Ulm DE
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Device and method for producing dielectric layers in microwave plasma
Grant 8,716,153 - Lerch , et al. May 6, 2
2014-05-06
Device And Method For Producing Dielectric Layers In Microwave Plasma
App 20110217849 - Lerch; Wilfried ;   et al.
2011-09-08
Method for the thermal treatment of disk-shaped substrates
Grant 7,704,898 - Nenyei , et al. April 27, 2
2010-04-27
Method for the Thermal Treatment of Disk-Shaped Substrates
App 20080311761 - Nenyei; Zsolt ;   et al.
2008-12-18
Device and method for the reduction of particles in the thermal treatment of rotating substrates
App 20070098904 - Aschner; Helmut ;   et al.
2007-05-03
Rapid thermal processing (RTP) system with rotating substrate
Grant 5,965,047 - Blersch , et al. October 12, 1
1999-10-12

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