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Method for process metrology
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Method for determining contribution to a fingerprint
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Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
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Method And Apparatus To Determine A Patterning Process Parameter
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Method And Apparatus To Determine A Patterning Process Parameter
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Method And Apparatus To Determine A Patterning Process Parameter
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Method and apparatus to determine a patterning process parameter
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Method and apparatus to determine a patterning process parameter
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Method of determining a height profile, a measurement system and a computer readable medium
Grant 11,137,695 - Donkerbroek , et al. October 5, 2 | 2021-10-05 |
Method For Process Metrology
App 20210302845 - VERSTRAETEN; Bert ; et al. | 2021-09-30 |
Method and apparatus to determine a patterning process parameter
Grant 11,101,184 - Van Leest , et al. August 24, 2 | 2021-08-24 |
Method and apparatus to determine a patterning process parameter
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Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method
Grant 11,092,900 - Van Der Schaar , et al. August 17, 2 | 2021-08-17 |
Method For Performing A Manufacturing Process And Associated Apparatuses
App 20210240073 - THEEUWES; Thomas ; et al. | 2021-08-05 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20210035871 - VAN LEEST; Adriaan Johan ; et al. | 2021-02-04 |
Method For Determining Contribution To A Fingerprint
App 20210003927 - Harutyunyan; Davit ; et al. | 2021-01-07 |
Substrate, metrology apparatus and associated methods for a lithographic process
Grant 10,871,367 - Verma , et al. December 22, 2 | 2020-12-22 |
Metrology method and apparatus, computer program and lithographic system
Grant 10,845,713 - Theeuwes , et al. November 24, 2 | 2020-11-24 |
Method for determining contribution to a fingerprint
Grant 10,816,904 - Harutyunyan , et al. October 27, 2 | 2020-10-27 |
Method and apparatus to determine a patterning process parameter
Grant 10,811,323 - Van Leest , et al. October 20, 2 | 2020-10-20 |
Substrate, Metrology Apparatus And Associated Methods For A Lithographic Process
App 20200284578 - VERMA; Alok ; et al. | 2020-09-10 |
Methods and Patterning Devices and Apparatuses for Measuring Focus Performance of a Lithographic Apparatus, Device Manufacturing
App 20200264522 - DE WINTER; Laurentius Cornelius ; et al. | 2020-08-20 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20200185281 - VAN LEEST; Adriaan Johan ; et al. | 2020-06-11 |
Substrate, metrology apparatus and associated methods for a lithographic process
Grant 10,677,589 - Verma , et al. | 2020-06-09 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20200126872 - VAN LEEST; Adriaan Johan ; et al. | 2020-04-23 |
Method and apparatus to determine a patterning process parameter, associated with a change in a physical configuration, using measured pixel optical characteristic values
Grant 10,615,084 - Van Leest , et al. | 2020-04-07 |
Method and Apparatus for Measuring a Parameter of a Lithographic Process, Substrate and Patterning Devices for use in the Method
App 20200073254 - VAN DER SCHAAR; Maurits ; et al. | 2020-03-05 |
Method and apparatus to determine a patterning process parameter
Grant 10,546,790 - Van Leest , et al. Ja | 2020-01-28 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20200013685 - VAN LEEST; Adriaan Johan ; et al. | 2020-01-09 |
Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method
Grant 10,481,503 - Van Der Schaar , et al. Nov | 2019-11-19 |
Method and apparatus to determine a patterning process parameter using an asymmetric optical characteristic distribution portion
Grant 10,453,758 - Van Leest , et al. Oc | 2019-10-22 |
Estimation of data in metrology
Grant 10,429,746 - Onose , et al. O | 2019-10-01 |
A Method Of Determining A Height Profile, A Measurement System And A Computer Readable Medium
App 20190294060 - DONKERBROEK; Arend Johannes ; et al. | 2019-09-26 |
Method For Determining Contribution To A Fingerprint
App 20190271919 - HARUTYUNYAN; Davit ; et al. | 2019-09-05 |
Metrology Method And Apparatus, Computer Program And Lithographic System
App 20190163075 - THEEUWES; Thomas ; et al. | 2019-05-30 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20190155173 - Tsiatmas; Anagnostis ; et al. | 2019-05-23 |
Estimation Of Data In Metrology
App 20190129313 - ONOSE; Alexandru ; et al. | 2019-05-02 |
Separation Of Contributions To Metrology Data
App 20190086810 - TEL; Wim Tjibbo ; et al. | 2019-03-21 |
Substrate, Metrology Apparatus And Associated Methods For A Lithographic Process
App 20190063911 - Verma; Alok ; et al. | 2019-02-28 |
Inspection method and apparatus, and lithographic apparatus
Grant 9,927,717 - Rhe , et al. March 27, 2 | 2018-03-27 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20170255112 - VAN LEEST; Adriaan Johan ; et al. | 2017-09-07 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20170255737 - VAN LEEST; Adriaan Johan ; et al. | 2017-09-07 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20170255738 - VAN LEEST; Adriaan Johan ; et al. | 2017-09-07 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20170255736 - VAN LEEST; Adriaan Johan ; et al. | 2017-09-07 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20170256465 - VAN LEEST; Adriaan Johan ; et al. | 2017-09-07 |
Method And Apparatus for Measuring a Parameter of a Lithographic Process, Substrate and Patterning Devices for use in the Method
App 20170059999 - VAN DER SCHAAR; Maurits ; et al. | 2017-03-02 |
Inspection Method And Apparatus, And Lithographic Apparatus
App 20160327870 - RHE; Kyu Kab ; et al. | 2016-11-10 |
Method of determining focus corrections, lithographic processing cell and device manufacturing method
Grant 9,360,770 - Kisteman , et al. June 7, 2 | 2016-06-07 |
Method of determining focus corrections, lithographic processing cell and device manufacturing method
Grant 9,360,769 - Kisteman , et al. June 7, 2 | 2016-06-07 |
Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
Grant 9,177,219 - Tel , et al. November 3, 2 | 2015-11-03 |
Method of Determining Focus Corrections, Lithographic Processing Cell and Device Manufacturing Method
App 20150085267 - KISTEMAN; Arend Johannes ; et al. | 2015-03-26 |
Method of Determining Focus Corrections, Lithographic Processing Cell and Device Manufacturing Method
App 20130050668 - Kisteman; Arend Johannes ; et al. | 2013-02-28 |
Method Of Calibrating A Lithographic Apparatus, Device Manufacturing Method and Associated Data Processing Apparatus and Computer Program Product
App 20120008127 - TEL; Wim Tjibbo ; et al. | 2012-01-12 |
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