Tharaldsen; Robert Albert
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tharaldsen; Robert Albert.The latest application filed is for "holographic mask inspection system with spatial filter".
- Tharaldsen; Robert Albert - Sherman CT US
| Patent | Date |
|---|---|
| Diffraction elements for alignment targets Grant 8,681,313 - Vladimirsky , et al. March 25, 2 | 2014-03-25 |
| Time differential reticle inspection Grant 8,623,576 - Catey , et al. January 7, 2 | 2014-01-07 |
| Holographic Mask Inspection System with Spatial Filter App 20120281197 - Tharaldsen; Robert Albert ; et al. | 2012-11-08 |
| Time Differential Reticle Inspection App 20120171600 - Catey; Eric Brian ; et al. | 2012-07-05 |
| Reticle inspection systems and method Grant 8,189,203 - Shmarev , et al. May 29, 2 | 2012-05-29 |
| Diffraction Elements for Alignment Targets App 20110019173 - Vladimirsky; Yuli ; et al. | 2011-01-27 |
| Reticle Inspection Systems and Method App 20100149548 - SHMAREV; YEVGENIY KONSTANTINOVICH ; et al. | 2010-06-17 |
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