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Patent applications and USPTO patent grants for Thanu; Rajkumar.The latest application filed is for "vacuum robot apparatus for variable pitch access".
Patent | Date |
---|---|
Robot for simultaneous substrate transfer Grant 11,443,973 - Schaller , et al. September 13, 2 | 2022-09-13 |
Vacuum Robot Apparatus For Variable Pitch Access App 20220274788 - Thanu; Rajkumar ;   et al. | 2022-09-01 |
Multi-turn drive assembly and systems and methods of use thereof Grant 11,413,744 - Hudgens , et al. August 16, 2 | 2022-08-16 |
Vacuum robot apparatus for variable pitch access Grant 11,358,809 - Thanu , et al. June 14, 2 | 2022-06-14 |
Generating Electric Power For A Robotic End Effector App 20220088803 - Berger; Alexander ;   et al. | 2022-03-24 |
Multi-turn Drive Assembly And Systems And Methods Of Use Thereof App 20210276180 - Hudgens; Jeff ;   et al. | 2021-09-09 |
Long reach vacuum robot with dual wafer pockets Grant 10,968,052 - Thanu , et al. April 6, 2 | 2021-04-06 |
Ultrathin Conformal Coatings For Electrostatic Dissipation In Semiconductor Process Tools App 20210100141 - Natu; Gayatri ;   et al. | 2021-04-01 |
Ultrathin Conformal Coatings For Electrostatic Dissipation In Semiconductor Process Tools App 20210100087 - Natu; Gayatri ;   et al. | 2021-04-01 |
Robot For Simultaneous Substrate Transfer App 20210013084 - Schaller; Jason M. ;   et al. | 2021-01-14 |
Long Reach Vacuum Robot With Dual Wafer Pockets App 20200399077 - Thanu; Rajkumar ;   et al. | 2020-12-24 |
Robot Apparatus Including Dual End Effectors With Variable Pitch And Methods App 20200384634 - Muthukamatchy; Karuppasamy ;   et al. | 2020-12-10 |
Dual Pitch End Effector Robot Apparatus, Dual Pitch Load Locks, Systems, And Methods App 20200384636 - Muthukamatchy; Karuppasamy ;   et al. | 2020-12-10 |
Long reach vacuum robot with dual wafer pockets Grant 10,710,819 - Thanu , et al. | 2020-07-14 |
Sensor based auto-calibration wafer Grant 10,537,997 - Ramachandran , et al. Ja | 2020-01-21 |
Sensor Based Auto-calibration Wafer App 20170326733 - RAMACHANDRAN; Narayanan ;   et al. | 2017-11-16 |
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