Patent | Date |
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Receptacle device, device and method for handling substrate stacks Grant 10,347,523 - Thallner , et al. July 9, 2 | 2019-07-09 |
Method for producing a microlens Grant 10,279,551 - Thallner , et al. | 2019-05-07 |
Sample holder, device and method for detaching of a first substrate Grant 10,276,409 - Thallner | 2019-04-30 |
Device And Method For Aligning Substrates App 20180269096 - THALLNER; Erich | 2018-09-20 |
Method For Producing A Microlens App 20180229458 - Thallner; Erich ;   et al. | 2018-08-16 |
Receptacle Device, Device And Method For Handling Substrate Stacks App 20180190536 - THALLNER; Erich ;   et al. | 2018-07-05 |
Device and method for aligning substrates Grant 10,014,202 - Thallner July 3, 2 | 2018-07-03 |
Receptacle device, device and method for handling substrate stacks Grant 9,941,149 - Thallner , et al. April 10, 2 | 2018-04-10 |
Receptacle Device, Device And Method For Handling Substrate Stacks App 20170229336 - THALLNER; Erich ;   et al. | 2017-08-10 |
Substrate composite, method and device for bonding of substrates Grant 9,682,539 - Thallner June 20, 2 | 2017-06-20 |
Receptacle device, device and method for handling substrate stacks Grant 9,666,470 - Thallner , et al. May 30, 2 | 2017-05-30 |
Sample Holder, Device And Method For Detaching Of A First Substrate App 20170133243 - Thallner; Erich | 2017-05-11 |
Substrate Processing And Alignment App 20170033053 - Thallner; Erich | 2017-02-02 |
Substrate processing and alignment Grant 9,478,501 - Thallner October 25, 2 | 2016-10-25 |
Device and method for aligning substrates Grant 9,418,882 - Thallner August 16, 2 | 2016-08-16 |
Device And Method For Aligning Substrates App 20160148826 - THALLNER; Erich | 2016-05-26 |
Substrate-product substrate combination and device and method for producing a substrate-product substrate combination Grant 9,343,348 - Thallner May 17, 2 | 2016-05-17 |
Receptacle Device, Device And Method For Handling Substrate Stacks App 20160020136 - THALLNER; Erich ;   et al. | 2016-01-21 |
Method And Device For Producing A Microlens App 20150231840 - Thallner; Erich ;   et al. | 2015-08-20 |
Substrate Composite, Method And Device For Bonding Of Substrates App 20150202851 - Thallner; Erich | 2015-07-23 |
Substrate-product Substrate Combination And Device And Method For Producing A Substrate-product Substrate Combination App 20150170953 - Thallner; Erich | 2015-06-18 |
Device And Method For Aligning Substrates App 20150170950 - Thallner; Erich | 2015-06-18 |
Method and device for producing a microlens Grant 9,052,422 - Thallner , et al. June 9, 2 | 2015-06-09 |
Method and device for bonding two wafers Grant 8,926,775 - Thallner January 6, 2 | 2015-01-06 |
Device for releasing an interconnect layer that provides connection between a carrier and a wafer Grant 8,905,111 - Thallner December 9, 2 | 2014-12-09 |
Device and method for the application of a sheet-like jointing means onto a contact area of a wafer Grant 8,875,766 - Thallner November 4, 2 | 2014-11-04 |
Device and method for loosening a polymer layer from a surface of a substrate Grant 8,828,147 - Crowder , et al. September 9, 2 | 2014-09-09 |
Combination of a substrate and a wafer Grant 8,802,542 - Thallner August 12, 2 | 2014-08-12 |
Method And Device For Bonding Two Wafers App 20140196846 - Thallner; Erich | 2014-07-17 |
Combination of a substrate and a wafer Grant 8,664,082 - Thallner March 4, 2 | 2014-03-04 |
Device For Releasing An Interconnect Layer That Provides Connection Between A Carrier And A Wafer App 20130327485 - Thallner; Erich | 2013-12-12 |
Method for stripping a wafer from a carrier Grant 8,603,294 - Thallner December 10, 2 | 2013-12-10 |
Method and device for producing a nanopatterned disc Grant 8,591,794 - Thallner November 26, 2 | 2013-11-26 |
Combination Of A Substrate And A Wafer App 20130309840 - Thallner; Erich | 2013-11-21 |
Device And Method For The Application Of A Sheet-like Jointing Means Onto A Contact Area Of A Wafer App 20130306242 - Thallner; Erich | 2013-11-21 |
Device and method for coating a micro- and/or nano-structured structural substrate and coated structural substrate Grant 8,586,132 - Thallner November 19, 2 | 2013-11-19 |
Combination Of A Substrate And A Wafer App 20130295746 - Thallner; Erich | 2013-11-07 |
Combination of a substrate and a wafer Grant 8,536,020 - Thallner September 17, 2 | 2013-09-17 |
Device and method for the application of a sheet-like jointing means onto a contact area of a wafer Grant 8,500,930 - Thallner August 6, 2 | 2013-08-06 |
Method For Stripping A Wafer From A Carrier App 20130139972 - Thallner; Erich | 2013-06-06 |
Device for stripping a wafer from a carrier Grant 8,443,864 - Thallner May 21, 2 | 2013-05-21 |
Method And Device For Producing A Microlens App 20130037975 - Thallner; Erich ;   et al. | 2013-02-14 |
Combination of a substrate and a wafer Grant 8,349,701 - Thallner January 8, 2 | 2013-01-08 |
Combination of a substrate and a wafer Grant 8,293,063 - Thallner October 23, 2 | 2012-10-23 |
Combination Of A Substrate And A Wafer App 20120247640 - Thallner; Erich | 2012-10-04 |
Combination Of A Substrate And A Wafer App 20120216959 - Thallner; Erich | 2012-08-30 |
Device for transferring structures which are provided in a mask onto a substrate Grant 8,212,989 - Thallner July 3, 2 | 2012-07-03 |
Device And Method For Coating A Micro- And/or Nano-structured Structural Substrate And Coated Structural Substrate App 20120135143 - Thallner; Erich | 2012-05-31 |
Combination of a substrate and a wafer Grant 8,156,981 - Thallner April 17, 2 | 2012-04-17 |
Handling device and handling method for wafers Grant 8,157,307 - Thallner April 17, 2 | 2012-04-17 |
Device and process for applying and/or detaching a wafer to/from a carrier Grant 8,157,615 - Thallner April 17, 2 | 2012-04-17 |
Method and device for producing a nanopatterned disc Grant 8,142,701 - Thallner March 27, 2 | 2012-03-27 |
Method And Device For Producing A Nanopatterned Disc App 20120045575 - Thallner; Erich | 2012-02-23 |
Method for holding wafers and device for fixing two parallel arranged wafers relative to one another Grant 8,118,290 - Thallner February 21, 2 | 2012-02-21 |
Device And Method For Stripping A Wafer From A Carrier App 20120000613 - Thallner; Erich | 2012-01-05 |
Handling device and handling method for wafers Grant 8,087,708 - Thallner January 3, 2 | 2012-01-03 |
Device And Method For Loosening A Polymer Layer From A Surface Of A Substrate App 20110265822 - Crowder; Matt ;   et al. | 2011-11-03 |
Method for bonding wafers Grant 7,998,833 - Thallner August 16, 2 | 2011-08-16 |
Handling Device And Handling Method For Wafers App 20110133500 - Thallner; Erich | 2011-06-09 |
Handling Device And Handling Method For Wafers App 20110127785 - Thallner; Erich | 2011-06-02 |
Combination of a substrate and a wafer Grant 7,910,454 - Thallner March 22, 2 | 2011-03-22 |
Handling device and handling method for wafers Grant 7,909,374 - Thallner March 22, 2 | 2011-03-22 |
Combination Of A Substrate And A Wafer App 20110045240 - Thallner; Erich | 2011-02-24 |
Combination Of A Substrate And A Wafer App 20110042010 - Thallner; Erich | 2011-02-24 |
Method and device for bonding wafers Grant 7,811,898 - Thallner October 12, 2 | 2010-10-12 |
Apparatus for imprinting and/or embossing substrates Grant 7,722,350 - Thallner May 25, 2 | 2010-05-25 |
Method For Bonding Wafers App 20090298207 - Thallner; Erich | 2009-12-03 |
Device and Method for Coating a Micro-and/or Nano-Structured Structural Substrate and Coated Structural Substrate App 20090274872 - Thallner; Erich | 2009-11-05 |
Device And Process For Applying And/or Detaching A Wafer To/from A Carrier App 20090258583 - Thallner; Erich | 2009-10-15 |
Device and method for bonding wafers Grant 7,598,152 - Thallner October 6, 2 | 2009-10-06 |
Stamp Comprising a Nanostamping Structure, Device and Method for the Production Thereof App 20090158947 - Thallner; Erich | 2009-06-25 |
Process and device for bonding wafers Grant 7,547,611 - Thallner June 16, 2 | 2009-06-16 |
Device For Transferring Structures Which Are Provided In A Mask Onto A Substrate App 20080284999 - Thallner; Erich | 2008-11-20 |
Apparatus For Imprinting And/or Embossing Substrates App 20080267743 - Thallner; Erich | 2008-10-30 |
Adjusting device and arrangement for adjusting a wafer Grant 7,432,701 - Thallner October 7, 2 | 2008-10-07 |
Method And Device For Producing A Nanopatterned Disc App 20080233331 - Thallner; Erich | 2008-09-25 |
Process And Device For Bonding Wafers App 20080153258 - Thallner; Erich | 2008-06-26 |
Handling Device And Handling Method For Wafers App 20080008565 - Thallner; Erich | 2008-01-10 |
Method For Holding Wafers And Device For Fixing Two Parallel Arranged Wafers Relative To One Another App 20070292248 - Thallner; Erich | 2007-12-20 |
Device and method for coating a microstructured and/or nanostructured structural substrate App 20070237897 - Thallner; Erich | 2007-10-11 |
Substrate processing and alignment App 20070210460 - Thallner; Erich | 2007-09-13 |
Alignment device Grant 7,246,445 - Thallner July 24, 2 | 2007-07-24 |
Combination Of A Substrate And A Wafer App 20070155129 - Thallner; Erich | 2007-07-05 |
Method and device for bonding wafers App 20070087527 - Thallner; Erich | 2007-04-19 |
Adjusting device and arrangement for adjusting a wafer App 20050258851 - Thallner, Erich | 2005-11-24 |
Device and method for the application of a sheet-like jointing means onto a contact area of a wafer App 20050199330 - Thallner, Erich | 2005-09-15 |
Device and method for bonding wafers App 20050181579 - Thallner, Erich | 2005-08-18 |
Alignment device App 20050146169 - Thallner, Erich | 2005-07-07 |
Device and method for bonding wafers App 20050064680 - Thallner, Erich | 2005-03-24 |
Method and device for forming a surface structure on a wafer App 20050005801 - Thallner, Erich | 2005-01-13 |
Device for detaching a carrier from a semi-conductor disk Grant 6,792,991 - Thallner September 21, 2 | 2004-09-21 |
Adjustment table Grant 6,727,983 - Thallner April 27, 2 | 2004-04-27 |
Device for accommodating a wafer App 20030178864 - Thallner, Erich | 2003-09-25 |
Adjustment table App 20030058427 - Thallner, Erich | 2003-03-27 |
Device for detaching a carrier from a semi-conductor disk App 20020185644 - Thallner, Erich | 2002-12-12 |
Method and apparatus for the aligned joining of disk-shaped semiconductor substrates Grant 6,214,692 - Thallner April 10, 2 | 2001-04-10 |