Thakur; Randhir P. S.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Thakur; Randhir P. S..The latest application filed is for "method and apparatus for microwave assisted chalcogen radicals generation for 2-d materials".

Company Profile

0.174.79

Thakur; Randhir P. S. - Fremont CA
Thakur; Randhir P. S. - San Jose CA
Thakur; Randhir P.S. - Boise ID
Thakur; Randhir P. S. - Cupertino CA
Thakur; Randhir P S - San Jose CA
Thakur; Randhir P S - Boise UT
Thakur; Randhir P. S. - Capertino CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and apparatus for microwave assisted chalcogen radicals generation for 2-D materials Grant 9,879,341 - Singh , et al. January 30, 2	2018-01-30
Method And Apparatus For Microwave Assisted Chalcogen Radicals Generation For 2-d Materials App 20160372351 - SINGH; Kaushal K. ; et al.	2016-12-22
Methods for enhancing light absorption during PV applications Grant 8,822,259 - Singh , et al. September 2, 2	2014-09-02
Processing Multilayer Semiconductors With Multiple Heat Sources App 20140003800 - RAMAMURTHY; Sundar ; et al.	2014-01-02
Fast axis beam profile shaping for high power laser diode based annealing system Grant 8,288,683 - Jennings , et al. October 16, 2	2012-10-16
Method For Forming A Self-aligned Isolation Structure Utilizing Sidewall Spacers As An Etch Mask And Remaining As A Portion Of The Isolation Structure App 20120208345 - Gonzalez; Fernando ; et al.	2012-08-16
Method to avoid threshold voltage shift in thicker dielectric films Grant 8,202,806 - Thakur , et al. June 19, 2	2012-06-19
Method for forming a self-aligned isolation structure utilizing sidewall spacers as an etch mask and remaining as a portion of the isolation structure Grant 8,173,517 - Gonzalez , et al. May 8, 2	2012-05-08
Apparatus for cyclical depositing of thin films Grant 8,123,860 - Thakur , et al. February 28, 2	2012-02-28
Hot wire chemical vapor deposition (CVD) inline coating tool Grant 8,117,987 - Haas , et al. February 21, 2	2012-02-21
Methods For Enhancing Light Absorption During Pv Applications App 20110263068 - SINGH; KAUSHAL K. ; et al.	2011-10-27
Methods for enhancing capacitors having roughened features to increase charge-storage capacity Grant 7,989,864 - Thakur , et al. August 2, 2	2011-08-02
Hot Wire Chemical Vapor Deposition (cvd) Inline Coating Tool App 20110104848 - HAAS; DIETER ; et al.	2011-05-05
Method For Forming A Self Aligned Isolation Trench App 20100273309 - Gonzalez; Fernando ; et al.	2010-10-28
Methods for surface activation by plasma immersion ion implantation process utilized in silicon-on-insulator structure Grant 7,745,309 - Thakur , et al. June 29, 2	2010-06-29
Fast axis beam profile shaping by collimation lenslets for high power laser diode based annealing system Grant 7,674,999 - Jennings , et al. March 9, 2	2010-03-09
Methods For Enhancing Capacitors Having Roughened Features To Increase Charge-storage Capacity App 20090294819 - Thakur; Randhir P.S. ; et al.	2009-12-03
Process for growing a dielectric layer on a silicon-containing surface using a mixture of N.sub.2O and O.sub.3 Grant 7,618,901 - Sandhu , et al. November 17, 2	2009-11-17
Methods for enhancing capacitors having roughened features to increase charge-storage capacity Grant 7,576,380 - Thakur , et al. August 18, 2	2009-08-18
Fast axis beam profile shaping for high power laser diode based annealing system App 20090152247 - Jennings; Dean ; et al.	2009-06-18
Apparatus For Cyclical Depositing Of Thin Films App 20090056626 - THAKUR; RANDHIR P.S. ; et al.	2009-03-05
Approach to avoid buckling in BPSG by using an intermediate barrier layer Grant 7,485,961 - Doan , et al. February 3, 2	2009-02-03
Methods For Substrate Surface Cleaning Suitable For Fabricating Silicon-on-insulator Structures App 20080268617 - Thakur; Randhir P. S. ; et al.	2008-10-30
Methods of forming HSG layers and devices Grant 7,432,152 - Thakur , et al. October 7, 2	2008-10-07
Fast axis beam profile shaping by collimation lenslets for high power laser diode based annealing system App 20080210671 - Jennings; Dean ; et al.	2008-09-04
Methods For Surface Activation By Plasma Immersion Ion Implantation Process Utilized In Silicon-on-insulator Structure App 20080038900 - Thakur; Randhir P S ; et al.	2008-02-14
Methods and apparatus for forming a high dielectric film and the dielectric film formed thereby App 20070148990 - DeBoer; Scott J. ; et al.	2007-06-28
Process for growing a dielectric layer on a silicon-containing surface using a mixture of N.sub.2O and O.sub.3 Grant 7,235,498 - Sandhu , et al. June 26, 2	2007-06-26
High quality oxide on an epitaxial layer Grant 7,232,728 - Lee , et al. June 19, 2	2007-06-19
Forming integrated circuits using selective deposition of undoped silicon film seeded in chlorine and hydride gas Grant 7,229,890 - Thakur , et al. June 12, 2	2007-06-12
Methods to form electronic devices and methods to form a material over a semiconductive substrate Grant 7,217,614 - Thakur May 15, 2	2007-05-15
Apparatus For Cyclical Depositing Of Thin Films App 20070095285 - Thakur; Randhir P.S. ; et al.	2007-05-03
Capacitor constructions with a barrier layer to threshold voltage shift inducing material Grant 7,205,600 - Agarwal , et al. April 17, 2	2007-04-17
Antifuse having tantalum oxynitride film and method for making same Grant 7,206,215 - DeBoer , et al. April 17, 2	2007-04-17
Methods for forming a high dielectric film Grant 7,192,889 - DeBoer , et al. March 20, 2	2007-03-20
Apparatus for cyclical deposition of thin films Grant 7,175,713 - Thakur , et al. February 13, 2	2007-02-13
Methods for enhancing capacitors having roughened features to increase charge-storage capacity App 20060275983 - Thakur; Randhir P.S. ; et al.	2006-12-07
High quality oxide on an epitaxial layer App 20060264007 - Lee; Ruojia R. ; et al.	2006-11-23
Forming Integrated Circuits Using Selective Deposition Of Undoped Silicon Film Seeded In Chlorine And Hydride Gas App 20060246679 - Thakur; Randhir P.S. ; et al.	2006-11-02
Antifuse Having Tantalum Oxynitride Film And Method For Making Same App 20060199311 - DeBoer; Scott Jeffrey ; et al.	2006-09-07
Methods for enhancing capacitors having roughened features to increase charge-storage capacity Grant 7,101,756 - Thakur , et al. September 5, 2	2006-09-05
Methods to form electronic devices and methods to form a material over a semiconductive substrate App 20060166431 - Thakur; Randhir P.S.	2006-07-27
Method to avoid threshold voltage shift in thicker dielectric films Grant 7,067,442 - Thakur , et al. June 27, 2	2006-06-27
Method to prevent metal oxide formation during polycide reoxidation Grant 7,067,411 - Schuegraf , et al. June 27, 2	2006-06-27
Methods to form electronic devices and methods to form a material over a semiconductive substrate App 20060094252 - Thakur; Randhir P.S.	2006-05-04
Capacitor having tantalum oxynitride film and method for making same Grant 7,038,265 - DeBoer , et al. May 2, 2	2006-05-02
Methods for enhancing capacitors having roughened features to increase charge-storage capacity Grant 7,034,353 - Thakur , et al. April 25, 2	2006-04-25
Selective spacer to prevent metal oxide formation during polycide reoxidation Grant 7,009,264 - Schuegraf , et al. March 7, 2	2006-03-07
Method to avoid threshold voltage shift in thicker dielectric films App 20060030162 - Thakur; Randhir P.S. ; et al.	2006-02-09
High pressure anneals of integrated circuit structures Grant 6,974,773 - Thakur , et al. December 13, 2	2005-12-13
Methods and apparatus for forming a high dielectric film and the dielectric film formed thereby Grant 6,927,179 - DeBoer , et al. August 9, 2	2005-08-09
Method to form a corrugated structure for enhanced capacitance Grant 6,927,445 - Thakur , et al. August 9, 2	2005-08-09
Capacitor having tantalum oxynitride film and method for making same App 20050161710 - DeBoer, Scott Jeffrey ; et al.	2005-07-28
Methods for forming wordlines, transistor gates, and conductive interconnects, and wordline, transistor gate, and conductive interconnect structures Grant 6,908,803 - Schuegraf , et al. June 21, 2	2005-06-21
Conductor layer nitridation Grant 6,887,774 - Hu , et al. May 3, 2	2005-05-03
Structure for contact formation using a silicon-germanium alloy Grant 6,879,044 - Thakur April 12, 2	2005-04-12
Process for growing a dielectric layer on a silicon-containing surface using a mixture of N2O and O3 Grant 6,864,125 - Sandhu , et al. March 8, 2	2005-03-08
Capacitor having tantalum oxynitride film and method for making same Grant 6,864,527 - DeBoer , et al. March 8, 2	2005-03-08
Method and apparatus for reducing fixed charge in semiconductor device layers Grant 6,864,561 - Iyer , et al. March 8, 2	2005-03-08
Forming a conductive structure in a semiconductor device Grant 6,849,544 - Weimer , et al. February 1, 2	2005-02-01
Methods and apparatus for forming a high dielectric film and the dielectric film formed thereby App 20050009361 - DeBoer, Scott J. ; et al.	2005-01-13
Conductor layer nitridation App 20040238845 - Hu, Yongjun ; et al.	2004-12-02
Methods for forming wordlines, transistor gates, and conductive interconnects, and wordline, transistor gate, and conductive interconnect structures Grant 6,812,530 - Schuegraf , et al. November 2, 2	2004-11-02
Pulse precursor deposition process for forming layers in semiconductor devices Grant 6,808,758 - Thakur October 26, 2	2004-10-26
Structure for contact formation using a silicon-germanium alloy Grant 6,806,572 - Thakur October 19, 2	2004-10-19
Approach to avoid buckling in BPSG by using an intermediate barrier layer App 20040188840 - Doan, Trung T. ; et al.	2004-09-30
Conductor layer nitridation Grant 6,798,026 - Hu , et al. September 28, 2	2004-09-28
Methods for forming wordlines, transistor gates, and conductive interconnects Grant 6,797,601 - Schuegraf , et al. September 28, 2	2004-09-28
High pressure reoxidation/anneal of high dielectric constant Grant 6,794,703 - Thakur , et al. September 21, 2	2004-09-21
Methods for forming wordlines, transistor gates, and conductive interconnects, and wordline, transistor gate, and conductive interconnect structures App 20040178437 - Schuegraf, Klaus Florian ; et al.	2004-09-16
Method to form a DRAM capacitor using low temperature reoxidation Grant 6,787,482 - Thakur , et al. September 7, 2	2004-09-07
Selective spacer technology to prevent metal oxide formation during polycide reoxidation App 20040171244 - Schuegraf, Klaus Florian ; et al.	2004-09-02
Method of forming a capacitor with two diffusion barrier layers formed in the same step Grant 6,784,052 - Schuegraf , et al. August 31, 2	2004-08-31
Structure for contact formation using a silicon-germanium alloy App 20040159948 - Thakur, Randhir P.S.	2004-08-19
Methods for enhancing capacitors having roughened features to increase charge-storage capacity App 20040161893 - Thakur, Randhir P.S. ; et al.	2004-08-19
Methods of forming capacitors Grant 6,773,981 - Al-Shareef , et al. August 10, 2	2004-08-10
Method and apparatus for reducing fixed charge in semiconductor device layers App 20040119096 - Iyer, Ravi ; et al.	2004-06-24
Metal barrier integrity via use of a novel two step PVD-ALD deposition procedure App 20040087136 - Wu, Zhen-Cheng ; et al.	2004-05-06
Methods for forming wordlines, transistor gates, and conductive interconnects, and wordline, transistor gate, and conductive interconnect structures Grant 6,730,584 - Schuegraf , et al. May 4, 2	2004-05-04
Methods of forming circuitry App 20040063296 - Schuegraf, Klaus Florian ; et al.	2004-04-01
Apparatus for reducing isolation stress in integrated circuits Grant 6,703,690 - Thakur , et al. March 9, 2	2004-03-09
Approach to avoid buckling BPSG by using an intermediate barrier layer Grant 6,690,044 - Doan , et al. February 10, 2	2004-02-10
Capacitor/antifuse structure having a barrier-layer electrode and improved barrier layer Grant 6,682,970 - Thakur , et al. January 27, 2	2004-01-27
Method of increasing the etch selectivity of a contact sidewall to a preclean etchant Grant 6,677,247 - Yuan , et al. January 13, 2	2004-01-13
Semiconductive wafer assemblies Grant 6,677,661 - DeBoer , et al. January 13, 2	2004-01-13
Method and apparatus to control the formation of layers useful in integrated circuits Grant 6,669,782 - Thakur December 30, 2	2003-12-30
Methods of forming a layer of silicon nitride in a semiconductor fabrication process Grant 6,670,288 - DeBoer , et al. December 30, 2	2003-12-30
Method and apparatus for reducing fixed charge in semiconductor device layers Grant 6,667,540 - Iyer , et al. December 23, 2	2003-12-23
Method to form a corrugated structure for enhanced capacitance with plurality of boro-phospho silicate glass including germanium Grant 6,660,611 - Thakur , et al. December 9, 2	2003-12-09
Metal nitride formation App 20030224217 - Byun, Jeong Soo ; et al.	2003-12-04
Methods of forming interconnect regions of integrated circuitry Grant 6,645,845 - Schuegraf , et al. November 11, 2	2003-11-11
Forming a conductive structure in a semiconductor device App 20030207556 - Weimer, Ronald A. ; et al.	2003-11-06
Refractory metal roughness reduction using high temperature anneal in hydrides or organo-silane ambients Grant 6,635,568 - Thakur October 21, 2	2003-10-21
Methods for forming wordlines, transistor gates, and conductive interonnects, and wordline, transistor gate, and conductive interconnect structures App 20030189253 - Schuegraf, Klaus Florian ; et al.	2003-10-09
Method of forming capacitors containing tantalum Grant 6,627,508 - DeBoer , et al. September 30, 2	2003-09-30
Apparatus for cyclical deposition of thin films App 20030172872 - Thakur, Randhir P.S. ; et al.	2003-09-18
Methods to form electronic devices Grant 6,620,740 - Thakur September 16, 2	2003-09-16
Film having enhanced reflow characteristics at low thermal budget Grant 6,620,534 - Sandhu , et al. September 16, 2	2003-09-16
Methods for forming wordlines, transistor gates, and conductive interconnects, and wordline, transistor gate, and conductive interconnect structures Grant 6,611,032 - Schuegraf , et al. August 26, 2	2003-08-26
Selective deposition of undoped silicon film seeded in chlorine and hydride gas for a stacked capacitor App 20030153142 - Thakur, Randhir P.S. ; et al.	2003-08-14
Method and apparatus for reducing isolation stress in integrated circuits Grant 6,602,798 - Thakur , et al. August 5, 2	2003-08-05
Forming a conductive structure in a semiconductor device Grant 6,596,595 - Weimer , et al. July 22, 2	2003-07-22
Method for processing wafers in a semiconductor fabrication system Grant 6,592,661 - Thakur , et al. July 15, 2	2003-07-15
Method of increasing the etch selectivity of a contact sidewall to a preclean etchant App 20030127427 - Yuan, Zheng ; et al.	2003-07-10
Methods to form electronic devices and methods to form a material over a semiconductive substrate App 20030113968 - Thakur, Randhir P.S.	2003-06-19
Method to form hemispherical grained polysilicon Grant 6,573,552 - Thakur June 3, 2	2003-06-03
Methods For Forming Wordlines, Transistor Gates, And Conductive Interconnects, And Wordline, Transistor Gate, And Conductive Interconnect Structures App 20030062566 - SCHUEGRAF, KLAUS FLORIAN ; et al.	2003-04-03
Capacitor/antifuse structure having a barrier-layer electrode and improved barrier layer Grant 6,541,811 - Thakur , et al. April 1, 2	2003-04-01
Structure for contact formation using a silicon-germanium alloy App 20030057555 - Thakur, Randhir P.S.	2003-03-27
Method to form a DRAM capacitor using low temperature reoxidation App 20030049941 - Thakur, Randhir P. S. ; et al.	2003-03-13
Method of forming a film having enhanced reflow characteristics at low thermal budget App 20030038309 - Sandhu, Gurtei ; et al.	2003-02-27
Capacitor/antifuse Structure Having A Barrier-layer Electrode And Improved Barrier Layer App 20030036223 - Thakur, Randhir P.S. ; et al.	2003-02-20
Capacitor forming methods and capacitor constructions App 20030030093 - Agarwal, Vishnu K. ; et al.	2003-02-13
Pre-metal dielectric rapid thermal processing for sub-micron technology Grant 6,514,876 - Thakur , et al. February 4, 2	2003-02-04
Capacitor having tantalum oxynitride film and method for making same App 20030015769 - DeBoer, Scott Jeffrey ; et al.	2003-01-23
Capacitor having tantalum oxynitride film and method for making same App 20030001194 - DeBoer, Scott Jeffrey ; et al.	2003-01-02
Conductor layer nitridation App 20030001212 - Hu, Yongjun ; et al.	2003-01-02
Method and apparatus for reducing fixed charge in semiconductor device layers App 20020190384 - Iyer, Ravi ; et al.	2002-12-19
Methods and apparatus for forming a high dielectric film and the dielectric film formed thereby App 20020187654 - DeBoer, Scott J. ; et al.	2002-12-12
High pressure reoxidation/anneal of high dielectric constant materials Grant 6,486,020 - Thakur , et al. November 26, 2	2002-11-26
Method and apparatus for reducing isolation stress in integrated circuits App 20020163056 - Thakur, Randhir P.S. ; et al.	2002-11-07
Semiconductor interconnection structure and method Grant 6,476,433 - Wu , et al. November 5, 2	2002-11-05
Methods for forming a dielectric film Grant 6,461,982 - DeBoer , et al. October 8, 2	2002-10-08
Capacitor having tantalum oxynitride film and method for making same Grant 6,458,645 - DeBoer , et al. October 1, 2	2002-10-01
Methods to form electronic devices App 20020137363 - Thakur, Randhir P.S.	2002-09-26
Integrated circuitry and methods of forming circuitry App 20020119624 - Schuegraf, Klaus Florian ; et al.	2002-08-29
Semiconductor structure having a doped conductive layer Grant 6,436,818 - Hu , et al. August 20, 2	2002-08-20
Method to form a corrugated structure for enhanced capacitance App 20020093090 - Thakur, Randhir P.S. ; et al.	2002-07-18
Novel method, system, and process for acquiring, evaluating, patenting, and marketing innovation App 20020091543 - Thakur, Randhir P.S.	2002-07-11
Methods For Forming Wordlines, Transistor Gates, And Conductive Interconnects, And Wordline, Transistor Gate, And Conductive Interconnect Structures App 20020086503 - SCHUEGRAF, KLAUS FLORIAN ; et al.	2002-07-04
Method and apparatus for reducing isolation stress in integrated circuits Grant 6,414,376 - Thakur , et al. July 2, 2	2002-07-02
Method for efficient manufacturing of integrated circuits App 20020083401 - Breiner, Lyle ; et al.	2002-06-27
System for controlling the temperature of a reflective substrate during rapid heating Grant 6,403,923 - Tay , et al. June 11, 2	2002-06-11
Reflectance method for evaluating the surface characteristics of opaque materials App 20020067489 - Thakur, Randhir P.S. ; et al.	2002-06-06
Capacitor with conductively doped Si-Ge alloy electrode Grant 6,400,552 - Al-Shareef , et al. June 4, 2	2002-06-04
Capacitor/antifuse structure having a barrier-layer electrode and improved barrier layer Grant 6,392,284 - Thakur , et al. May 21, 2	2002-05-21
Rapid thermal etch and rapid thermal oxidation Grant 6,380,103 - Gonzalez , et al. April 30, 2	2002-04-30
Semiconductor Structure Having A Doped Conductive Layer App 20020045342 - HU, YONGJUN ; et al.	2002-04-18
Method to form a corrugated structure for enhanced capacitance App 20020045314 - Thakur, Randhir P.S. ; et al.	2002-04-18
Method of monitoring a process of manufacturing a semiconductor wafer including hemispherical grain polysilicon Grant 6,368,887 - Lowrey , et al. April 9, 2	2002-04-09
Forming a conductive structure in a semiconductor device Grant 6,362,086 - Weimer , et al. March 26, 2	2002-03-26
System for controlling the temperature of a reflective substrate during rapid heating Grant 6,359,263 - Tay , et al. March 19, 2	2002-03-19
Methods for enhancing capacitors having roughened features to increase charge-storage capacity App 20020025650 - Thakur, Randhir P.S. ; et al.	2002-02-28
Methods of forming capacitors and related integrated circuitry App 20020022320 - DeBoer, Scott J. ; et al.	2002-02-21
Method to form a corrugated structure for enhanced capacitance Grant 6,346,455 - Thakur , et al. February 12, 2	2002-02-12
Conductor Layer Nitridation App 20020008292 - HU, YONGIUN ; et al.	2002-01-24
Refractory metal roughness reduction using high temperature anneal in hydrides or organo-silane ambients App 20020006722 - Thakur, Randhir P.S.	2002-01-17
Reflectance method for evaluating the surface characteristics of opaque materials App 20020003622 - Thakur, Randhir P.S. ; et al.	2002-01-10
Capacitor with conductively doped Si-Ge alloy electrode App 20010053057 - Al-Shareef, Husam N. ; et al.	2001-12-20
Apparatus for forming a high dielectric film Grant 6,325,017 - DeBoer , et al. December 4, 2	2001-12-04
Method For Forming A Self-aligned Isolation Trench App 20010046753 - GONZALEZ, FERNANDO ; et al.	2001-11-29
System For Controlling The Temperature Of A Reflective Substrate During Rapid Heating App 20010040156 - TAY, SING PIN ; et al.	2001-11-15
Methods for forming wordlines, transistor gates, and conductive interconnects, and wordline, transistor gate, and conductive interconnect structures App 20010035541 - Schuegraf, Klaus Florian ; et al.	2001-11-01
Methods And Apparatus For Forming A High Dielectric Film And The Dielectric Film Formed Thereby App 20010036752 - DEBOER, SCOTT J. ; et al.	2001-11-01
Methods to form electronic devices App 20010034096 - Thakur, Randhir P. S.	2001-10-25
Method for efficient manufacturing of integrated circuits Grant 6,298,470 - Breiner , et al. October 2, 2	2001-10-02
Integrated circuitry and methods of forming circuitry App 20010023953 - Schuegraf, Klaus Florian ; et al.	2001-09-27
Rapid thermal etch and rapid thermal oxidation App 20010023135 - Gonzalez, Fernando ; et al.	2001-09-20
Forming a conductive structure in a semiconductor device Grant 6,291,868 - Weimer , et al. September 18, 2	2001-09-18
Reflectance method for evaluating the surface characteristics of opaque materials App 20010017698 - Thakur, Randhir P.S. ; et al.	2001-08-30
Process for forming thin dielectric layers in semiconductor devices Grant 6,281,141 - Das , et al. August 28, 2	2001-08-28
Semiconductor circuit components and capacitors Grant 6,282,080 - DeBoer , et al. August 28, 2	2001-08-28
High pressure anneals of integrated circuit structures App 20010016417 - Thakur, Randhir P.S. ; et al.	2001-08-23
Forming A Conductive Structure In A Semiconductor Device App 20010014522 - WEIMER, RONALD A. ; et al.	2001-08-16
Capacitor Having Tantalum Oxynitride Film And Method For Making Same App 20010011740 - DEBOER, SCOTT JEFFREY ; et al.	2001-08-09
Semiconductor processing method of making a hemispherical grain (HSG) polysilicon layer App 20010009808 - Ping, Er-Xang ; et al.	2001-07-26
Reflectance method for evaluating the surface characteristics of opaque materials App 20010008448 - Thakur, Randhir P.S. ; et al.	2001-07-19
Using implants to lower anneal temperatures Grant 6,262,485 - Thakur , et al. July 17, 2	2001-07-17
Method to form hemispherical grained polysilicon Grant 6,255,159 - Thakur July 3, 2	2001-07-03
High pressure reoxidation/anneal of high dielectric constant materials Grant 6,251,720 - Thakur , et al. June 26, 2	2001-06-26
Capacitors, methods of forming capacitors and integrated circuitry Grant 6,239,459 - Al-Shareef , et al. May 29, 2	2001-05-29
Capacitor/antifuse structure having a barrier-layer electrode and improved barrier layer Grant 6,225,157 - Thakur , et al. May 1, 2	2001-05-01
Methods to form electronic devices Grant 6,204,142 - Thakur March 20, 2	2001-03-20
Method for determining the temperature in a thermal processing chamber Grant 6,200,023 - Tay , et al. March 13, 2	2001-03-13
Semiconductor processing method of making a hemispherical grain (HSG) polysilicon layer Grant 6,194,264 - Ping , et al. February 27, 2	2001-02-27
Rapid thermal etch and rapid thermal oxidation Grant 6,194,327 - Gonzalez , et al. February 27, 2	2001-02-27
Method to achieve rough silicon surface on both sides of container for enhanced capacitance/area electrodes Grant 6,190,992 - Sandhu , et al. February 20, 2	2001-02-20
Capacitors, methods of forming capacitors, and DRAM memory cells Grant 6,191,443 - Al-Shareef , et al. February 20, 2	2001-02-20
Semiconductor interconnection structure and method Grant 6,172,387 - Thakur , et al. January 9, 2	2001-01-09
Method of monitoring a process of manufacturing a semiconductor wafer including hemispherical grain polysilicon Grant 6,171,872 - Lowrey , et al. January 9, 2	2001-01-09
Semiconductor processing method of forming a capacitor Grant 6,165,833 - Parekh , et al. December 26, 2	2000-12-26
Method of forming capacitors having high-K oxygen containing capacitor dielectric layers, method of processing high-K oxygen containing dielectric layers, method of forming a DRAM cell having having high-K oxygen containing capacitor dielectric layers Grant 6,162,744 - Al-Shareef , et al. December 19, 2	2000-12-19
Semiconductor processing method of providing a doped polysilicon layer Grant 6,159,828 - Ping , et al. December 12, 2	2000-12-12
Reduced leakage DRAM storage unit Grant 6,157,566 - Wu , et al. December 5, 2	2000-12-05
Capacitor/antifuse structure having a barrier-layer electrode and improved barrier layer Grant 6,150,706 - Thakur , et al. November 21, 2	2000-11-21
DRAM capacitors made from silicon-germanium and electrode-limited conduction dielectric films Grant 6,150,208 - Deboer , et al. November 21, 2	2000-11-21
Selective deposition of amorphous silicon film seeded in a chlorine gas and a hydride gas ambient when forming a stacked capacitor with HSG Grant 6,146,967 - Thakur , et al. November 14, 2	2000-11-14
Method of forming capacitors containing tantalum Grant 6,146,959 - DeBoer , et al. November 14, 2	2000-11-14
Method to form hemi-spherical grain (HSG) silicon Grant 6,121,081 - Thakur , et al. September 19, 2	2000-09-19
Boride electrodes and barriers for cell dielectrics Grant 6,111,285 - Al-Shareef , et al. August 29, 2	2000-08-29
Self-aligned isolation trench Grant 6,097,076 - Gonzalez , et al. August 1, 2	2000-08-01
Conditioning of dielectric materials Grant 6,090,723 - Thakur , et al. July 18, 2	2000-07-18
Field isolation structure formed using ozone oxidation and tapering Grant 6,072,226 - Thakur , et al. June 6, 2	2000-06-06
Method of forming capacitors and related integrated circuitry Grant 6,046,093 - DeBoer , et al. April 4, 2	2000-04-04
Using implants to lower anneal temperatures Grant 6,027,990 - Thakur , et al. February 22, 2	2000-02-22
Semiconductor structure having a doped conductive layer Grant 6,015,997 - Hu , et al. January 18, 2	2000-01-18
Semiconductor processing method of providing a conductively doped layer of hemispherical grain polysilicon and a hemispherical grain polysilicon layer produced according to the method Grant 6,015,743 - Zahurak , et al. January 18, 2	2000-01-18
Method for cleaning semiconductor wafers Grant 5,994,240 - Thakur November 30, 1	1999-11-30
Capacitor/antifuse structure having a barrier-layer electrode and improved barrier layer Grant 5,969,983 - Thakur , et al. October 19, 1	1999-10-19
Method to form a DRAM capacitor using low temperature reoxidation Grant 5,966,595 - Thakur , et al. October 12, 1	1999-10-12
Method for cleaning semiconductor wafers and Grant 5,963,833 - Thakur October 5, 1	1999-10-05
Method of fabricating a semiconductor device utilizing polysilicon grains Grant 5,960,294 - Zahurak , et al. September 28, 1	1999-09-28
Method for forming a self-aligned isolation trench Grant 5,953,621 - Gonzalez , et al. September 14, 1	1999-09-14
Low temperature sub-atmospheric ozone oxidation process for making thin gate oxides Grant 5,946,588 - Ahmad , et al. August 31, 1	1999-08-31
Method for making a container capacitor with increased surface area Grant 5,937,294 - Sandhu , et al. August 10, 1	1999-08-10
Method and apparatus for reducing fixed charge in semiconductor device layers Grant 5,933,760 - Iyer , et al. August 3, 1	1999-08-03
Conductor layer nitridation Grant 5,926,730 - Hu , et al. July 20, 1	1999-07-20
Method for fabricating stacked layer silicon nitride for low leakage and high capacitance Grant 5,913,149 - Thakur , et al. June 15, 1	1999-06-15
Semiconductor circuit components and capacitors Grant 5,910,880 - DeBoer , et al. June 8, 1	1999-06-08
Method of monitoring a process of manufacturing a semiconductor wafer including hemispherical grain polysilicon Grant 5,891,744 - Lowrey , et al. April 6, 1	1999-04-06
Method for uniformly doping hemispherical grain polycrystalline silicon Grant 5,885,869 - Turner , et al. March 23, 1	1999-03-23
In situ rapid thermal etch and rapid thermal oxidation Grant 5,869,405 - Gonzalez , et al. February 9, 1	1999-02-09
Semiconductor processing method of providing a doped polysilicon layer Grant 5,869,389 - Ping , et al. February 9, 1	1999-02-09
Apparatus for forming materials Grant 5,863,327 - Thakur January 26, 1	1999-01-26
Method for repeatable temperature measurement using surface reflectivity Grant RE36,050 - Thakur , et al. January 19, 1	1999-01-19
Controlling semiconductor structural warpage in rapid thermal processing by selective and dynamic control of a heating source Grant 5,851,929 - Thakur , et al. December 22, 1	1998-12-22
Method for in-situ incorporation of desirable impurities into high pressure oxides Grant 5,846,888 - Chapek , et al. December 8, 1	1998-12-08
Method to form hemi-spherical grain (HSG) silicon Grant 5,837,580 - Thakur , et al. November 17, 1	1998-11-17
Surface properties detection by reflectance metrology Grant 5,835,225 - Thakur November 10, 1	1998-11-10
Ultraviolet light reflectance method for evaluating the surface characteristics of opaque materials Grant 5,825,498 - Thakur , et al. October 20, 1	1998-10-20
Acceleration of etch selectivity for self-aligned contact Grant 5,804,506 - Haller , et al. September 8, 1	1998-09-08
Method of forming hemispherical grained silicon Grant 5,759,262 - Weimer , et al. June 2, 1	1998-06-02
Method of forming high-integrity ultrathin oxides Grant 5,738,909 - Thakur , et al. April 14, 1	1998-04-14
High performance PMOSFET using split-polysilicon CMOS process incorporating advanced stacked capacitior cells for fabricating multi-megabit DRAMS Grant 5,716,862 - Ahmad , et al. February 10, 1	1998-02-10
Semiconductor processing method of making a hemispherical grain (HSG) polysilicon layer Grant 5,691,228 - Ping , et al. November 25, 1	1997-11-25
Dielectric material and process to create same Grant 5,686,748 - Thakur , et al. November 11, 1	1997-11-11
Method for forming an improved field isolation structure using ozone enhanced oxidation and tapering Grant 5,672,539 - Thakur , et al. September 30, 1	1997-09-30
Method to thermally form hemispherical grain (HSG) silicon to enhance capacitance for application in high density DRAMs Grant 5,663,090 - Dennison , et al. September 2, 1	1997-09-02
Method to form hemispherical grain (HSG) silicon by implant seeding followed by vacuum anneal Grant 5,658,381 - Thakur , et al. August 19, 1	1997-08-19
Method to form hemi-spherical grain (HSG) silicon from amorphous silicon Grant 5,656,531 - Thakur , et al. August 12, 1	1997-08-12
Control and 3-dimensional simulation model of temperature variations in a rapid thermal processing machine Grant 5,654,904 - Thakur August 5, 1	1997-08-05
Method for optimizing thermal budgets in fabricating semiconductors Grant 5,646,075 - Thakur , et al. July 8, 1	1997-07-08
Semiconductor processing method of providing a conductively doped layer of hemispherical grain polysilicon Grant 5,639,685 - Zahurak , et al. June 17, 1	1997-06-17
Method for forming hemispherical grained silicon Grant 5,634,974 - Weimer , et al. June 3, 1	1997-06-03
Method to prepare hemi-spherical grain (HSG) silicon using a fluorine based gas mixture and high vacuum anneal Grant 5,629,223 - Thakur May 13, 1	1997-05-13
High pressure reoxidation anneal of silicon nitride for reduced thermal budget silicon processing Grant 5,624,865 - Schuegraf , et al. April 29, 1	1997-04-29
Reflectance method for accurate process calibration in semiconductor wafer heat treatment Grant 5,618,461 - Burke , et al. April 8, 1	1997-04-08
Control and 3-dimensional simulation model of temperature variations in a rapid thermal processing machine Grant 5,561,612 - Thakur October 1, 1	1996-10-01
System for compensating against wafer edge heat loss in rapid thermal processing Grant 5,504,831 - Sandhu , et al. April 2, 1	1996-04-02
Method for optimizing thermal budgets in fabricating semconductors Grant 5,474,955 - Thakur December 12, 1	1995-12-12
Advanced technique to improve the bonding arrangement on silicon surfaces to promote uniform nitridation Grant 5,445,999 - Thakur , et al. August 29, 1	1995-08-29
Method DRAM polycide rowline formation Grant 5,425,392 - Thakur , et al. June 20, 1	1995-06-20
Method for chemical vapor depositing a titanium nitride layer on a semiconductor wafer and method of annealing tin films Grant 5,416,045 - Kauffman , et al. May 16, 1	1995-05-16
Method to prepare hemi-spherical grain (HSG) silicon using a fluorine based gas mixture and high vacuum anneal Grant 5,407,534 - Thakur April 18, 1	1995-04-18
Method for reducing the effects of semiconductor substrate deformities Grant 5,382,551 - Thakur , et al. January 17, 1	1995-01-17
Method of manufacturing small geometry MOS field-effect transistors having improved barrier layer to hot electron injection Grant 5,382,533 - Ahmad , et al. January 17, 1	1995-01-17
Method for fabricating stacked layer Si.sub.3 N.sub.4 for low leakage high capacitance films using rapid thermal nitridation Grant 5,376,593 - Sandhu , et al. December 27, 1	1994-12-27
Approach to avoid buckling in BPSG by using an intermediate barrier layer Grant 5,372,974 - Doan , et al. December 13, 1	1994-12-13
System for repeatable temperature measurement using surface reflectivity Grant 5,364,187 - Thakur , et al. November 15, 1	1994-11-15
Method for fabricating hybrid oxides for thinner gate devices Grant 5,360,769 - Thakur , et al. * November 1, 1	1994-11-01
Method for forming enhanced capacitance stacked capacitor structures using hemi-spherical grain polysilicon Grant 5,340,765 - Dennison , et al. August 23, 1	1994-08-23
Method for enhancing nitridation and oxidation growth by introducing pulsed NF.sub.3 Grant 5,264,396 - Thakur , et al. November 23, 1	1993-11-23