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Processing systems and methods for halide scavenging Grant 9,991,134 - Wang , et al. June 5, 2 | 2018-06-05 |
Methods for forming low resistivity interconnects Grant 9,812,328 - Singh , et al. November 7, 2 | 2017-11-07 |
Integrated bit-line airgap formation and gate stack post clean Grant 9,773,695 - Purayath , et al. September 26, 2 | 2017-09-26 |
Processing systems and methods for halide scavenging Grant 9,704,723 - Wang , et al. July 11, 2 | 2017-07-11 |
Processing systems and methods for halide scavenging Grant 9,659,792 - Wang , et al. May 23, 2 | 2017-05-23 |
Integrated Bit-line Airgap Formation And Gate Stack Post Clean App 20170040207 - Purayath; Vinod R. ;   et al. | 2017-02-09 |
Methods For Forming Low Resistivity Interconnects App 20160372371 - SINGH; Kaushal K. ;   et al. | 2016-12-22 |
Integrated bit-line airgap formation and gate stack post clean Grant 9,496,167 - Purayath , et al. November 15, 2 | 2016-11-15 |
Processing systems and methods for halide scavenging Grant 9,449,850 - Wang , et al. September 20, 2 | 2016-09-20 |
Semiconductor device processing tools and methods for patterning substrates Grant 9,431,267 - Trivedi , et al. August 30, 2 | 2016-08-30 |
Integrated oxide recess and floating gate fin trimming Grant 9,378,978 - Purayath , et al. June 28, 2 | 2016-06-28 |
Processing Systems And Methods For Halide Scavenging App 20160064233 - Wang; Anchuan ;   et al. | 2016-03-03 |
Wordline 3d Flash Memory Air Gap App 20160043099 - Purayath; Vinod R. ;   et al. | 2016-02-11 |
Integrated Oxide And Si Etch For 3d Cell Channel Mobility Improvements App 20160042968 - Purayath; Vinod R. ;   et al. | 2016-02-11 |
Integrated Bit-line Airgap Formation And Gate Stack Post Clean App 20160035614 - Purayath; Vinod R. ;   et al. | 2016-02-04 |
Integrated Oxide Recess And Floating Gate Fin Trimming App 20160035586 - Purayath; Vinod R. ;   et al. | 2016-02-04 |
Processing Systems And Methods For Halide Scavenging App 20160027673 - Wang; Anchuan ;   et al. | 2016-01-28 |
Processing Systems And Methods For Halide Scavenging App 20150332930 - Wang; Anchuan ;   et al. | 2015-11-19 |
Processing systems and methods for halide scavenging Grant 9,184,055 - Wang , et al. November 10, 2 | 2015-11-10 |
Integrated oxide and nitride recess for better channel contact in 3D architectures Grant 9,165,786 - Purayath , et al. October 20, 2 | 2015-10-20 |
Metal air gap Grant 9,159,606 - Purayath , et al. October 13, 2 | 2015-10-13 |
Storage sub-system for a computer comprising write-once memory devices and write-many memory devices and related method Grant 9,152,562 - Scheuerlein , et al. October 6, 2 | 2015-10-06 |
Processing systems and methods for halide scavenging Grant 9,153,442 - Wang , et al. October 6, 2 | 2015-10-06 |
Processing Systems And Methods For Halide Scavenging App 20150235865 - Wang; Anchuan ;   et al. | 2015-08-20 |
Processing systems and methods for halide scavenging Grant 9,093,371 - Wang , et al. July 28, 2 | 2015-07-28 |
Processing systems and methods for halide scavenging Grant 9,023,732 - Wang , et al. May 5, 2 | 2015-05-05 |
Processing Systems And Methods For Halide Scavenging App 20140273406 - Wang; Anchuan ;   et al. | 2014-09-18 |
Processing Systems And Methods For Halide Scavenging App 20140262038 - Wang; Anchuan ;   et al. | 2014-09-18 |
Processing Systems And Methods For Halide Scavenging App 20140271097 - WANG; Anchuan ;   et al. | 2014-09-18 |
Processing Systems And Methods For Halide Scavenging App 20140273489 - Wang; Anchuan ;   et al. | 2014-09-18 |
Processing Systems And Methods For Halide Scavenging App 20140273488 - Wang; Anchuan ;   et al. | 2014-09-18 |
Processing Systems And Methods For Halide Scavenging App 20140273481 - Wang; Anchuan ;   et al. | 2014-09-18 |
Semiconductor Device Processing Tools And Methods For Patterning Substrates App 20140154887 - Trivedi; Mayur ;   et al. | 2014-06-05 |
Processing multilayer semiconductors with multiple heat sources Grant 8,536,492 - Ramamurthy , et al. September 17, 2 | 2013-09-17 |
Storage Sub-system For A Computer Comprising Write-once Memory Devices And Write-many Memory Devices And Related Method App 20130013847 - Scheuerlein; Roy E. ;   et al. | 2013-01-10 |
Stabilization of high-k dielectric materials Grant 8,323,754 - Olsen , et al. December 4, 2 | 2012-12-04 |
Storage sub-system for a computer comprising write-once memory devices and write-many memory devices and related method Grant 8,275,927 - Scheuerlein , et al. September 25, 2 | 2012-09-25 |
Substrate Processing Apparatus Using A Batch Processing Chamber App 20120210937 - THAKUR; RANDHIR ;   et al. | 2012-08-23 |
Remote Hydrogen Plasma Source Of Silicon Containing Film Deposition App 20120171852 - Yuan; Zheng ;   et al. | 2012-07-05 |
Processing multilayer semiconductors with multiple heat sources Grant 7,986,871 - Ramamurthy , et al. July 26, 2 | 2011-07-26 |
Method And Apparatus For Deposition On Large Area Substrates Having Reduced Gas Usage App 20110033638 - Ponnekanti; Hari ;   et al. | 2011-02-10 |
Substrate Processing Apparatus Using A Batch Processing Chamber App 20100173495 - Thakur; Randhir ;   et al. | 2010-07-08 |
Systems for Flash Heating in Atomic Layer Deposition App 20100024732 - Mokhlesi; Nima ;   et al. | 2010-02-04 |
Method of making a nonvolatile memory device including forming a pillar shaped semiconductor device and a shadow mask Grant 7,579,232 - Ping , et al. August 25, 2 | 2009-08-25 |
Method And Apparatus For Wafer Cleaning App 20090205677 - Thakur; Randhir ;   et al. | 2009-08-20 |
Storage Sub-system For A Computer Comprising Write-once Memory Devices And Write-many Memory Devices And Related Method App 20090172321 - Scheuerlein; Roy E. ;   et al. | 2009-07-02 |
Processing Multilayer Semiconductors With Multiple Heat Sources App 20090010626 - RAMAMURTHY; SUNDAR ;   et al. | 2009-01-08 |
Method for stabilizing high pressure oxidation of a semiconductor device Grant 7,410,911 - Gealy , et al. August 12, 2 | 2008-08-12 |
Low temperature epitaxial growth of silicon-containing films using UV radiation Grant 7,396,743 - Singh , et al. July 8, 2 | 2008-07-08 |
Method For Semiconductor Processing App 20080044595 - Thakur; Randhir ;   et al. | 2008-02-21 |
Atomic Layer Deposition of Oxides Using Krypton as an Ion Generating Feeding Gas App 20070281105 - Mokhlesi; Nima ;   et al. | 2007-12-06 |
Flash Heating in Atomic Layer Deposition App 20070281082 - Mokhlesi; Nima ;   et al. | 2007-12-06 |
Systems for Atomic Layer Deposition of Oxides Using Krypton as an Ion Generating Feeding Gas App 20070277735 - Mokhlesi; Nima ;   et al. | 2007-12-06 |
Apparatus for stabilizing high pressure oxidation of a semiconductor device Grant 7,282,457 - Gealy , et al. October 16, 2 | 2007-10-16 |
Apparatus for stabilizing high pressure oxidation of a semiconductor device Grant 7,279,435 - Gealy , et al. October 9, 2 | 2007-10-09 |
UV assisted low temperature epitaxial growth of silicon-containing films App 20070232031 - Singh; Kaushal K. ;   et al. | 2007-10-04 |
Low temperature epitaxial growth of silicon-containing films using close proximity UV radiation Grant 7,262,116 - Singh , et al. August 28, 2 | 2007-08-28 |
Integrated Vacuum Metrology For Cluster Tool App 20070196011 - Cox; Damon K. ;   et al. | 2007-08-23 |
Diffusion-enhanced crystallization of amorphous materials to improve surface roughness Grant 7,238,613 - Ping , et al. July 3, 2 | 2007-07-03 |
Cluster Tool For Advanced Front-end Processing App 20070134821 - Thakur; Randhir ;   et al. | 2007-06-14 |
Method To Form A Device On A Soi Substrate App 20070066023 - Thakur; Randhir ;   et al. | 2007-03-22 |
Method of forming shallow doped junctions having a variable profile gradation of dopants Grant 7,179,703 - Gonzalez , et al. February 20, 2 | 2007-02-20 |
Method and apparatus for semiconductor processing App 20070020890 - Thakur; Randhir ;   et al. | 2007-01-25 |
Method and apparatus for wafer cleaning App 20060266389 - Thakur; Randhir ;   et al. | 2006-11-30 |
Low temperature epitaxial growth of silicon-containing films using close proximity UV radiation App 20060258124 - Singh; Kaushal K. ;   et al. | 2006-11-16 |
Substrate processing platform allowing processing in different ambients App 20060240680 - Yokota; Yoshitaka ;   et al. | 2006-10-26 |
Substrate processing apparatus using a batch processing chamber App 20060156979 - Thakur; Randhir ;   et al. | 2006-07-20 |
Method of forming shallow doped junctions having a variable profile gradation of dopants Grant 7,060,599 - Gonzalez , et al. June 13, 2 | 2006-06-13 |
Method of forming shallow doped junctions having a variable profile gradation of dopants App 20060081926 - Gonzalez; Fernando ;   et al. | 2006-04-20 |
Method for stabilizing high pressure oxidation of a semiconductor device App 20060035473 - Gealy; F. Daniel ;   et al. | 2006-02-16 |
Processing multilayer semiconductors with multiple heat sources App 20060018639 - Ramamurthy; Sundar ;   et al. | 2006-01-26 |
Method for stabilizing high pressure oxidation of a semiconductor device App 20050279283 - Gealy, F. Daniel ;   et al. | 2005-12-22 |
Low temperature epitaxial growth of silicon-containing films using UV radiation App 20050277272 - Singh, Kaushal K. ;   et al. | 2005-12-15 |
Stabilization of high-k dielectric materials App 20050260357 - Olsen, Christopher ;   et al. | 2005-11-24 |
Diffusion-enhanced crystallization of amorphous materials to improve surface roughness App 20050239263 - Ping, Er-Xuan ;   et al. | 2005-10-27 |
Method for stabilizing high pressure oxidation of a semiconductor device Grant 6,955,996 - Gealy , et al. October 18, 2 | 2005-10-18 |
Diffusion-enhanced crystallization of amorphous materials to improve surface roughness Grant 6,930,015 - Ping , et al. August 16, 2 | 2005-08-16 |
Method and apparatus to improve thickness uniformity of surfaces for integrated device manufacturing Grant 6,927,169 - Maydan , et al. August 9, 2 | 2005-08-09 |
Apparatus for stabilizing high pressure oxidation of a semiconductor device App 20050028936 - Gealy, F. Daniel ;   et al. | 2005-02-10 |
Shallow doped junctions with a variable profile gradation of dopants App 20040222462 - Gonzalez, Fernando ;   et al. | 2004-11-11 |
Optimal spike anneal ambient Grant 6,803,297 - Jennings , et al. October 12, 2 | 2004-10-12 |
Method for stabilizing high pressure oxidation of a semiconductor device App 20040185677 - Gealy, F. Daniel ;   et al. | 2004-09-23 |
Method and apparatus to improve thickness uniformity of surfaces for integrated device manufacturing App 20040121605 - Maydan, Dan ;   et al. | 2004-06-24 |
DRAM capacitor formulation using a double-sided electrode Grant 6,737,696 - DeBoer , et al. May 18, 2 | 2004-05-18 |
Shallow doped junctions with a variable profile gradation of dopants Grant 6,717,211 - Gonzalez , et al. April 6, 2 | 2004-04-06 |
Optimal spike anneal ambient App 20040058512 - Jennings, Dean ;   et al. | 2004-03-25 |
Formation of conductive rugged silicon Grant 6,699,752 - Ping , et al. March 2, 2 | 2004-03-02 |
Double layer electrode and barrier system on hemispherical grain silicon for use with high dielectric constant materials and methods for fabricating the same Grant 6,673,689 - Al-Shareef , et al. January 6, 2 | 2004-01-06 |
DRAM capacitor formulation using a double-sided electrode Grant 6,635,547 - DeBoer , et al. October 21, 2 | 2003-10-21 |
Method and apparatus for wafer cleaning App 20030192570 - Thakur, Randhir ;   et al. | 2003-10-16 |
Method and apparatus for wafer cleaning App 20030192577 - Thakur, Randhir ;   et al. | 2003-10-16 |
Method for stabilizing high pressure oxidation of a semiconductor device Grant 6,596,651 - Gealy , et al. July 22, 2 | 2003-07-22 |
Diffusion-enhanced crystallization of amorphous materials to improve surface roughness App 20030129807 - Ping, Er-Xuan ;   et al. | 2003-07-10 |
Formation of conductive rugged silicon App 20030124799 - Ping, Er-Xuan ;   et al. | 2003-07-03 |
Method and apparatus for stabilizing high pressure oxidation of a semiconductor device App 20020192978 - Gealy, F. Daniel ;   et al. | 2002-12-19 |
Double layer electrode and barrier system on hemispherical grain silicon for use with high dielectric constant materials and methods for fabricating the same App 20020155658 - Al-Shareef, Husam N. ;   et al. | 2002-10-24 |
DRAM capacitor formulation using a double-sided electrode Grant 6,451,661 - DeBoer , et al. September 17, 2 | 2002-09-17 |
Shallow doped junctions with a variable profile gradation of dopants App 20020024100 - Gonzalez, Fernando ;   et al. | 2002-02-28 |
DRAM capacitor formulation using a double-sided electrode App 20010053576 - DeBoer, Scott J. ;   et al. | 2001-12-20 |
Isolation structure and process therefor App 20010044193 - Lane, Richard ;   et al. | 2001-11-22 |
Method and apparatus for stabilizing high pressure oxidation of a semiconductor device App 20010044219 - Gealy, F. Daniel ;   et al. | 2001-11-22 |
Double layer electrode and barrier system on hemispherical grain silicon for use with high dielectric constant materials and methods for fabricating the same App 20010039097 - Al-Shareef, Husam N. ;   et al. | 2001-11-08 |
Method and apparatus for stabilizing high pressure oxidation of a semiconductor device Grant 6,291,364 - Gealy , et al. September 18, 2 | 2001-09-18 |
Double layer electrode and barrier system on hemispherical grain silicon for use with high dielectric constant materials and methods for fabricating the same Grant 6,281,543 - Al-Shareef , et al. August 28, 2 | 2001-08-28 |
Method and apparatus for stabilizing high pressure oxidation of a semiconductor device App 20010008750 - Gealy, Daniel ;   et al. | 2001-07-19 |
High selectivity etching process for oxides App 20010006167 - Thakur, Randhir ;   et al. | 2001-07-05 |
High selectivity etching process for oxides Grant 6,217,784 - Thakur , et al. April 17, 2 | 2001-04-17 |
Method for forming a dielectric Grant 6,207,587 - Li , et al. March 27, 2 | 2001-03-27 |
High selectivity etching process for oxides Grant 6,126,847 - Thakur , et al. October 3, 2 | 2000-10-03 |
Shallow junction formation using multiple implant sources Grant 5,897,363 - Gonzalez , et al. April 27, 1 | 1999-04-27 |