TEZUKA; Yoshihiro

Patent Applications and Registrations

Patent applications and USPTO patent grants for TEZUKA; Yoshihiro.The latest application filed is for "measurement tool and method for lithography masks".

Company Profile

0.7.8

TEZUKA; Yoshihiro - Tsukuba-shi JP
Tezuka; Yoshihiro - Tsukuba JP
Tezuka; Yoshihiro - Ibaraki JP
Tezuka; Yoshihiro - Saitama-ken JP
Tezuka; Yoshihiro - Tokyo JP
Tezuka; Yoshihiro - Kamifukuoka JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Measurement Tool And Method For Lithography Masks App 20220011679 - TEZUKA; Yoshihiro ; et al.	2022-01-13
Measurement Tool And Methods For Euv Lithography Masks App 20220004106 - Tezuka; Yoshihiro ; et al.	2022-01-06
Detecting and characterizing mask blank defects using angular distribution of scattered light Grant 7,679,731 - Tezuka March 16, 2	2010-03-16
Method and system of defect inspection for mask blank and method of manufacturing semiconductor device using the same Grant 7,630,068 - Tanaka , et al. December 8, 2	2009-12-08
Method and system of defect inspection for mask blank and method of manufacturing semiconductor device using the same App 20070188743 - Tanaka; Toshihiko ; et al.	2007-08-16
Detecting and characterizing mask blank defects using angular distribution of scattered light App 20070158636 - Tezuka; Yoshihiro	2007-07-12
Mask blanks inspection tool Grant 7,220,969 - Tezuka , et al. May 22, 2	2007-05-22
Mask blanks inspection tool App 20060138338 - Tezuka; Yoshihiro ; et al.	2006-06-29
Mask Blanks Inspection Method And Mask Blank Inspection Tool App 20060054836 - Tezuka; Yoshihiro ; et al.	2006-03-16
Mask blanks inspection method and mask blank inspection tool Grant 7,005,649 - Tezuka , et al. February 28, 2	2006-02-28
Method and apparatus for photomask fabrication App 20060027325 - Tezuka; Yoshihiro ; et al.	2006-02-09
Method and apparatus for photomask fabrication Grant 6,979,408 - Tezuka , et al. December 27, 2	2005-12-27
Method and apparatus for photomask fabrication App 20040244912 - Tezuka, Yoshihiro ; et al.	2004-12-09
Modulation of peripheral critical dimension on photomask with differential electron beam dose Grant 6,210,843 - Chen , et al. April 3, 2	2001-04-03
Method for depositing a titanium film Grant 5,942,282 - Tada , et al. August 24, 1	1999-08-24

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