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Method of etch model calibration using optical scatterometry
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Method Of Etch Model Calibration Using Optical Scatterometry
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Methods And Apparatuses For Etch Profile Optimization By Reflectance Spectra Matching And Surface Kinetic Model Optimization
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Design Layout Pattern Proximity Correction Through Edge Placement Error Prediction
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Methods And Apparatuses For Etch Profile Optimization By Reflectance Spectra Matching And Surface Kinetic Model Optimization
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Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization
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Design Layout Pattern Proximity Correction Through Fast Edge Placement Error Prediction
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Methods And Apparatuses For Etch Profile Optimization By Reflectance Spectra Matching And Surface Kinetic Model Optimization
App 20170371991 - Tetiker; Mehmet Derya ; et al. | 2017-12-28 |
Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization
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Etch Metric Sensitivity For Endpoint Detection
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Methods And Apparatuses For Etch Profile Optimization By Reflectance Spectra Matching And Surface Kinetic Model Optimization
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System And Method For Detecting A Process Point In Mult-mode Pulse Processes
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Methods And Apparatuses For Etch Profile Matching By Surface Kinetic Model Optimization
App 20170176983 - Tetiker; Mehmet Derya ; et al. | 2017-06-22 |
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