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Patent applications and USPTO patent grants for Tesauro; Mark Richard.The latest application filed is for "hard mask for copper plasma etch".
Patent | Date |
---|---|
Method of utilizing hard mask for copper plasma etch Grant 6,797,640 - Tesauro , et al. September 28, 2 | 2004-09-28 |
Hard Mask for copper plasma etch App 20020048952 - Tesauro, Mark Richard ;   et al. | 2002-04-25 |
Hard Mask For Copper Plasma Etch App 20010035582 - TESAURO, MARK RICHARD ;   et al. | 2001-11-01 |
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