Tertitski; Leonid M.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tertitski; Leonid M..The latest application filed is for "method for non-contact low substrate temperature measurement".
- Tertitski; Leonid M. - Vista CA
- TERTITSKI; Leonid M. - Los Gatos CA
- Tertitski; Leonid M. - San Jose CA US
| Patent | Date |
|---|---|
| Thermal processing chamber with low temperature control Grant 10,948,353 - Hawrylchak , et al. March 16, 2 | 2021-03-16 |
| Method For Non-contact Low Substrate Temperature Measurement App 20200381278 - VELLORE; Kim Ramkumar ; et al. | 2020-12-03 |
| Thermal Processing Chamber With Low Temperature Control App 20200149968 - HAWRYLCHAK; Lara ; et al. | 2020-05-14 |
| Thermal cooling member with low temperature control Grant 10,571,337 - Hawrylchak , et al. Feb | 2020-02-25 |
| Thermal Processing Chamber With Low Temperature Control App 20180340832 - HAWRYLCHAK; Lara ; et al. | 2018-11-29 |
| Visual feedback for process control in RTP chambers Grant 10,109,514 - Vellore , et al. October 23, 2 | 2018-10-23 |
| System and method to detect substrate and/or substrate support misalignment using imaging Grant 9,959,610 - Tertitski , et al. May 1, 2 | 2018-05-01 |
| Visual Feedback For Process Control In Rtp Chambers App 20170345693 - VELLORE; Kim ; et al. | 2017-11-30 |
| Visual feedback for process control in RTP chambers Grant 9,735,034 - Vellore , et al. August 15, 2 | 2017-08-15 |
| System And Method To Detect Substrate And/or Substrate Support Misalignment Using Imaging App 20160125589 - TERTITSKI; Leonid M. ; et al. | 2016-05-05 |
| Low Temperature Rtp Control Using Ir Camera App 20150131698 - VELLORE; Kim ; et al. | 2015-05-14 |
| Visual Feedback For Process Control In Rtp Chambers App 20150041453 - VELLORE; Kim ; et al. | 2015-02-12 |
| Scanned laser light source Grant 8,829,393 - Jennings , et al. September 9, 2 | 2014-09-09 |
| Laser beam positioning system Grant 8,692,151 - Tertitski , et al. April 8, 2 | 2014-04-08 |
| Protection device for solid state laser Grant 8,503,497 - Serebryanov , et al. August 6, 2 | 2013-08-06 |
| Thermal flux processing by scanning a focused line beam Grant 8,288,685 - Jennings , et al. October 16, 2 | 2012-10-16 |
| Scanned laser light source App 20120205347 - Jennings; Dean C. ; et al. | 2012-08-16 |
| Protection Device For Solid State Laser App 20120170603 - SEREBRYANOV; Oleg ; et al. | 2012-07-05 |
| Thermal flux processing by scanning a focused line beam Grant 8,178,819 - Jennings , et al. May 15, 2 | 2012-05-15 |
| Laser Beam Positioning System App 20110239421 - Tertitski; Leonid M. ; et al. | 2011-10-06 |
| Thermal Flux Processing By Scanning A Focused Line Beam App 20110095007 - Jennings; Dean C. ; et al. | 2011-04-28 |
| Graphical user interface that is convertible at runtime Grant 7,904,821 - Tertitski , et al. March 8, 2 | 2011-03-08 |
| Thermal flux processing by scanning a focused line beam Grant 7,875,829 - Jennings , et al. January 25, 2 | 2011-01-25 |
| Thermal flux processing by scanning a focused line beam Grant 7,872,209 - Jennings , et al. January 18, 2 | 2011-01-18 |
| Semiconductor thermal process control Grant 7,778,533 - Aderhold , et al. August 17, 2 | 2010-08-17 |
| Rapid Cooling Of A Substrate By Motion App 20100193154 - ADERHOLD; WOLFGANG R. ; et al. | 2010-08-05 |
| Semiconductor thermal process control utilizing position oriented temperature generated thermal mask Grant 7,667,162 - Aderhold , et al. February 23, 2 | 2010-02-23 |
| Thermal Flux Processing By Scanning A Focused Line Beam App 20080041831 - Jennings; Dean C. ; et al. | 2008-02-21 |
| Scanning laser light source App 20070114214 - Jennings; Dean C. ; et al. | 2007-05-24 |
| Thermal Flux Processing By Scanning A Focused Line Beam App 20070108166 - Jennings; Dean C. ; et al. | 2007-05-17 |
| Thermal flux processing by scanning Grant 6,987,240 - Jennings , et al. January 17, 2 | 2006-01-17 |
| Semiconductor thermal process control App 20050254804 - Aderhold, Wolfgang R. ; et al. | 2005-11-17 |
| Thermal flux processing by scanning a focused line beam App 20050218124 - Jennings, Dean C. ; et al. | 2005-10-06 |
| Semiconductor thermal process control App 20040052512 - Aderhold, Wolfgang R. ; et al. | 2004-03-18 |
| Thermal flux processing by scanning App 20030196996 - Jennings, Dean C. ; et al. | 2003-10-23 |
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