loadpatents
Patent applications and USPTO patent grants for Terry; Thomas Lawrence.The latest application filed is for "window in thin polishing pad".
Patent | Date |
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Window In Thin Polishing Pad App 20220023990 - Hu; Yongqi ;   et al. | 2022-01-27 |
Window in thin polishing pad Grant 11,161,218 - Hu , et al. November 2, 2 | 2021-11-02 |
Window in Thin Polishing Pad App 20190152017 - Hu; Yongqi ;   et al. | 2019-05-23 |
Method of placing window in thin polishing pad Grant 10,213,894 - Hu , et al. Feb | 2019-02-26 |
Chemical Mechanical Polishing Tool With Robot Access To Cassettes App 20180056479 - Hu; Yongqi ;   et al. | 2018-03-01 |
Window In Thin Polishing Pad App 20170246722 - Hu; Yongqi ;   et al. | 2017-08-31 |
Load cup substrate sensing Grant 8,734,202 - Lischka , et al. May 27, 2 | 2014-05-27 |
Load Cup Substrate Sensing App 20130260646 - LISCHKA; David James ;   et al. | 2013-10-03 |
Load cup substrate sensing Grant 8,454,408 - Lischka , et al. June 4, 2 | 2013-06-04 |
Load Cup Substrate Sensing App 20100130102 - Lischka; David James ;   et al. | 2010-05-27 |
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