Patent | Date |
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Materials for polishing liquid for metal, polishing liquid for metal, method for preparation thereof and polishing method using the same Grant 8,900,477 - Uchida , et al. December 2, 2 | 2014-12-02 |
Abrasive, method of polishing target member and process for producing semiconductor device Grant 08616936 - | 2013-12-31 |
Abrasive, method of polishing target member and process for producing semiconductor device Grant 8,616,936 - Yoshida , et al. December 31, 2 | 2013-12-31 |
Abrasive liquid for metal and method for polishing Grant 8,491,807 - Uchida , et al. July 23, 2 | 2013-07-23 |
Abrasive, Method Of Polishing Target Member And Process For Producing Semiconductor Device App 20120227331 - YOSHIDA; Masato ;   et al. | 2012-09-13 |
Materials for polishing liquid for metal, polishing liquid for metal, method for preparation thereof and polishing method using the same Grant 8,226,849 - Uchida , et al. July 24, 2 | 2012-07-24 |
Abrasive, method of polishing target member and process for producing semiconductor device Grant 8,162,725 - Yoshida , et al. April 24, 2 | 2012-04-24 |
Abrasive, method of polishing target member and process for producing semiconductor device Grant 8,137,159 - Yoshida , et al. March 20, 2 | 2012-03-20 |
Abrasive Liquid For Metal and Method for Polishing App 20120048830 - Uchida; Takeshi ;   et al. | 2012-03-01 |
Abrasive, Method of Polishing Target Member and Process for Producing Semiconductor Device App 20110312251 - Yoshida; Masato ;   et al. | 2011-12-22 |
Abrasive liquid for metal and method for polishing Grant 8,038,898 - Uchida , et al. October 18, 2 | 2011-10-18 |
Abrasive, method of polishing target member and process for producing semiconductor device Grant 7,963,825 - Yoshida , et al. June 21, 2 | 2011-06-21 |
Abrasive, method of polishing target member and process for producing semiconductor device Grant 7,871,308 - Yoshida , et al. January 18, 2 | 2011-01-18 |
Cerium oxide abrasive and method of polishing substrates Grant 7,867,303 - Yoshida , et al. January 11, 2 | 2011-01-11 |
Polishing Slurry And Method Of Polishing App 20100301265 - KURATA; Yasushi ;   et al. | 2010-12-02 |
Polishing fluid and method of polishing Grant 7,799,688 - Kurata , et al. September 21, 2 | 2010-09-21 |
Materials for polishing liquid for metal, polishing liquid for metal, method for preparation thereof and polishing method using the same Grant 7,799,686 - Uchida , et al. September 21, 2 | 2010-09-21 |
Cerium oxide abrasive and method of polishing substrates Grant 7,708,788 - Yoshida , et al. May 4, 2 | 2010-05-04 |
Abrasive, Method Of Polishing Target Member And Process For Producing Semiconductor Device App 20080271383 - Yoshida; Masato ;   et al. | 2008-11-06 |
Materials For Polishing Liquid For Metal, Polishing Liquid For Metal, Method For Preparation Thereof And Polishing Method Using The Same App 20080121840 - Uchida; Takeshi ;   et al. | 2008-05-29 |
Abrasive, method of polishing target member and process for producing semiconductor device App 20070266642 - Yoshida; Masato ;   et al. | 2007-11-22 |
Metal-Polishing Liquid And Polishing Method Using The Same App 20070196975 - Nomura; Yutaka ;   et al. | 2007-08-23 |
Materials for polishing liquid for metal, polishing liquid for metal, method for preparation thereof and polishing method using the same Grant 7,250,369 - Uchida , et al. July 31, 2 | 2007-07-31 |
Materials for polishing liquid for metal, polishing liquid for metal, method for preparation thereof and polishing method using the same App 20070167017 - Uchida; Takeshi ;   et al. | 2007-07-19 |
Abrasive, method of polishing target member and process for producing semiconductor device Grant 7,115,021 - Yoshida , et al. October 3, 2 | 2006-10-03 |
Materials for polishing liquid for metal, polishing liquid for metal, method for preparation thereof and polishing method using the same App 20060216939 - Uchida; Takeshi ;   et al. | 2006-09-28 |
Cerium Oxide Abrasive And Method Of Polishing Substrates App 20060180787 - Yoshida; Masato ;   et al. | 2006-08-17 |
Cerium Oxide Abrasive And Method Of Polishing Substrates App 20060118524 - Yoshida; Masato ;   et al. | 2006-06-08 |
Polishing fluid and method of polishing App 20050173669 - Kurata, Yasushi ;   et al. | 2005-08-11 |
Abrasive liquid for metal and method for polishing Grant 6,899,821 - Uchida , et al. May 31, 2 | 2005-05-31 |
Abrasive liquid for metal and method for polishing App 20050095860 - Uchida, Takeshi ;   et al. | 2005-05-05 |
Cerium oxide abrasive and method of polishing substrates App 20050085168 - Yoshida, Masato ;   et al. | 2005-04-21 |
Cerium oxide abrasive and method of polishing substrates Grant 6,863,700 - Yoshida , et al. March 8, 2 | 2005-03-08 |
CMP (chemical mechanical polishing) polishing liquid for metal and polishing method App 20030219982 - Kurata, Yasushi ;   et al. | 2003-11-27 |
Abrasive, method of polishing target member and process for producing semiconductor device App 20020090895 - Yoshida, Masato ;   et al. | 2002-07-11 |
Cerium Oxide abrasive and method of polishing substrates App 20020069593 - Yoshida, Masato ;   et al. | 2002-06-13 |
Abrasive liquid for metal and method for polishing App 20020017630 - Uchida, Takeshi ;   et al. | 2002-02-14 |
Abrasive, method of polishing wafer, and method of producing semiconductor device Grant 6,343,976 - Yoshida , et al. February 5, 2 | 2002-02-05 |
Cerium oxide abrasive and method of polishing substrates Grant 6,221,118 - Yoshida , et al. April 24, 2 | 2001-04-24 |