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Imprint Apparatus And Method For Manufacturing Article
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Imprint Apparatus, Method Of Operating The Same, And Method Of Manufacturing Article
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Supply apparatus which supplies radicals, lithography apparatus, and method of manufacturing article
Grant 8,980,533 - Terashima March 17, 2 | 2015-03-17 |
Supply Apparatus Which Supplies Radicals, Lithography Apparatus, And Method Of Manufacturing Article
App 20140113235 - Terashima; Shigeru | 2014-04-24 |
Charged particle beam drawing apparatus, and method of manufacturing article
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Exposure apparatus and device manufacturing method
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Energy beam drawing apparatus and method of manufacturing device
Grant 8,563,950 - Nakayama , et al. October 22, 2 | 2013-10-22 |
Charged Particle Beam Drawing Apparatus, And Method Of Manufacturing Article
App 20130040240 - Terashima; Shigeru | 2013-02-14 |
Charged-particle Beam Drawing Apparatus And Article Manufacturing Method
App 20120183905 - TERASHIMA; Shigeru ; et al. | 2012-07-19 |
Energy Beam Drawing Apparatus And Method Of Manufacturing Device
App 20120181455 - NAKAYAMA; Takahiro ; et al. | 2012-07-19 |
Exposure Apparatus And Device Manufacturing Method
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Exposure apparatus, control method for the same, and device manufacturing method
Grant 8,004,657 - Tanabe , et al. August 23, 2 | 2011-08-23 |
Exposure apparatus and device manufacturing method
Grant 7,738,076 - Hasegawa , et al. June 15, 2 | 2010-06-15 |
Exposure apparatus and method, and device manufacturing method
Grant 7,724,348 - Gomei , et al. May 25, 2 | 2010-05-25 |
Exposure apparatus with tanks storing helium gas and method of manufacturing device using exposure apparatus
Grant 7,566,422 - Hara , et al. July 28, 2 | 2009-07-28 |
Exposure Apparatus
App 20080304031 - Kanehira; Mika ; et al. | 2008-12-11 |
Exposure Apparatus, Control Method For The Same, And Device Manufacturing Method
App 20070202423 - Tanabe; Masayuki ; et al. | 2007-08-30 |
Exposure apparatus and method of producing device
Grant 7,212,273 - Terashima May 1, 2 | 2007-05-01 |
Exposure apparatus and device manufacturing method
App 20060274292 - Hasegawa; Noriyasu ; et al. | 2006-12-07 |
Exposure apparatus and device manufacturing method
Grant 7,123,343 - Hasegawa , et al. October 17, 2 | 2006-10-17 |
Exposure apparatus
Grant 7,050,152 - Terashima , et al. May 23, 2 | 2006-05-23 |
Exposure apparatus
Grant 7,027,131 - Terashima April 11, 2 | 2006-04-11 |
Processing apparatus, measuring apparatus, and device manufacturing method
Grant 6,984,362 - Hara , et al. January 10, 2 | 2006-01-10 |
Processing apparatus, measuring apparatus, and device manufacturing method
App 20050271558 - Hara, Shinichi ; et al. | 2005-12-08 |
Exposure apparatus
Grant 6,954,255 - Hasegawa , et al. October 11, 2 | 2005-10-11 |
Exposure apparatus and device manufacturing method
App 20050213063 - Hasegawa, Noriyasu ; et al. | 2005-09-29 |
Exposure apparatus and device manufacturing method
Grant 6,934,003 - Hasegawa , et al. August 23, 2 | 2005-08-23 |
Exposure apparatus
App 20050030504 - Terashima, Shigeru ; et al. | 2005-02-10 |
Processing apparatus for processing sample in predetermined atmosphere
App 20040187786 - Tanaka, Yutaka ; et al. | 2004-09-30 |
Exposure apparatus
App 20040179179 - Terashima, Shigeru | 2004-09-16 |
Exposure apparatus and method of producing device
App 20040174505 - Terashima, Shigeru | 2004-09-09 |
Processing apparatus for processing sample in predetermined atmosphere
Grant 6,750,946 - Tanaka , et al. June 15, 2 | 2004-06-15 |
Exposure apparatus and control method therefor, and device manufacturing method
Grant 6,721,032 - Hasegawa , et al. April 13, 2 | 2004-04-13 |
Exposure apparatus
Grant 6,721,031 - Hasegawa , et al. April 13, 2 | 2004-04-13 |
Processing apparatus, measuring apparatus, and device manufacturing method
App 20040022694 - Hara, Shinichi ; et al. | 2004-02-05 |
Exposure apparatus and device manufacturing method
App 20030169407 - Hasegawa, Noriyasu ; et al. | 2003-09-11 |
Processing apparatus with pressure control and gas recirculation system
Grant 6,616,898 - Hara , et al. September 9, 2 | 2003-09-09 |
X-ray exposure apparatus
Grant 6,603,833 - Terashima , et al. August 5, 2 | 2003-08-05 |
Exposure apparatus and control method therefor, and device manufacturing method
App 20030025889 - Hasegawa, Noriyasu ; et al. | 2003-02-06 |
Exposure apparatus
App 20020191163 - Hasegawa, Noriyasu ; et al. | 2002-12-19 |
Exposure apparatus
App 20020191166 - Hasegawa, Noriyasu ; et al. | 2002-12-19 |
Exposure method, exposure device and semiconductor device manufacturing method
Grant 6,453,000 - Terashima , et al. September 17, 2 | 2002-09-17 |
X-ray exposure apparatus
App 20020106050 - Terashima, Shigeru ; et al. | 2002-08-08 |
Processing Apparatus, Measuring Apparatus, And Device Manufacturing Method
App 20020094306 - HARA, SHINICHI ; et al. | 2002-07-18 |
Processing apparatus for processing sample in predetermined atmosphere
App 20020002946 - Tanaka, Yutaka ; et al. | 2002-01-10 |
Electron beam exposure apparatus
Grant 6,225,637 - Terashima , et al. May 1, 2 | 2001-05-01 |
Electron beam exposure apparatus
Grant 6,054,713 - Miyake , et al. April 25, 2 | 2000-04-25 |
Exposure apparatus for controlling intensity of exposure radiation
Grant 5,157,700 - Kurosawa , et al. October 20, 1 | 1992-10-20 |
Exposure method and apparatus
Grant 5,131,022 - Terashima , et al. July 14, 1 | 1992-07-14 |
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