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Patent applications and USPTO patent grants for Terasawa; Toshihiro.The latest application filed is for "ion source, ion implantation apparatus, and ion source operating method".
Patent | Date |
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Ion source, ion implantation apparatus, and ion source operating method Grant 10,910,192 - Higashi , et al. February 2, 2 | 2021-02-02 |
Ion Source, Ion Implantation Apparatus, And Ion Source Operating Method App 20200402759 - HIGASHI; Akio ;   et al. | 2020-12-24 |
Ion source and ion implantation apparatus Grant 10,529,532 - Yuze , et al. J | 2020-01-07 |
Ion Source And Ion Implantation Apparatus App 20190237290 - YUZE; Takumi ;   et al. | 2019-08-01 |
Ion Irradiation Device And Ion Irradiation Method App 20160013011 - YUZE; Takumi ;   et al. | 2016-01-14 |
Deposition apparatus and deposition method App 20080011602 - Ota; Hidenobu ;   et al. | 2008-01-17 |
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