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Method Of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, And Recording Medium App 20220102136 - NODA; Takaaki ;   et al. | 2022-03-31 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, And Recording Medium App 20210407774 - IMAMURA; Tomoki ;   et al. | 2021-12-30 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 10,840,094 - Maeda , et al. November 17, 2 | 2020-11-17 |
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium Grant 10,714,336 - Horita , et al. | 2020-07-14 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 10,607,833 - Harada , et al. | 2020-03-31 |
Substrate processing apparatus and guide portion Grant 10,513,774 - Terasaki , et al. Dec | 2019-12-24 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 10,513,775 - Yamakoshi , et al. Dec | 2019-12-24 |
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medi App 20190214250 - HORITA; Hideki ;   et al. | 2019-07-11 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20190206679 - MAEDA; Kiyohiko ;   et al. | 2019-07-04 |
Processing Method, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium App 20190127848 - NAGATO; Masaya ;   et al. | 2019-05-02 |
Gas Supply Nozzle, Substrate Processing Apparatus, And Non-transitory Computer-readable Recording Medium App 20180363137 - TAKAGI; Kosuke ;   et al. | 2018-12-20 |
Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium Grant 10,081,868 - Takagi , et al. September 25, 2 | 2018-09-25 |
Method of manufacturing semiconductor device Grant 9,934,960 - Horita , et al. April 3, 2 | 2018-04-03 |
Method of manufacturing semiconductor device Grant 9,905,413 - Yamakoshi , et al. February 27, 2 | 2018-02-27 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20170298508 - YAMAKOSHI; Risa ;   et al. | 2017-10-19 |
Method Of Manufacturing Semiconductor Device App 20170178889 - YAMAKOSHI; Risa ;   et al. | 2017-06-22 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20170170004 - HARADA; Katsuyoshi ;   et al. | 2017-06-15 |
Gas Supply Nozzle, Substrate Processing Apparatus, And Non-transitory Computer-readable Recording Medium App 20170051408 - TAKAGI; Kosuke ;   et al. | 2017-02-23 |
Return nozzle Grant D773,609 - Morita , et al. December 6, 2 | 2016-12-06 |
Return nozzle Grant D771,543 - Morita , et al. November 15, 2 | 2016-11-15 |
Return nozzle Grant D771,772 - Morita , et al. November 15, 2 | 2016-11-15 |
Substrate Processing Apparatus And Guide Portion App 20160298235 - TERASAKI; Masato ;   et al. | 2016-10-13 |
Method of Manufacturing Semiconductor Device App 20160284539 - HORITA; Hideki ;   et al. | 2016-09-29 |
Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium Grant 9,401,272 - Terasaki , et al. July 26, 2 | 2016-07-26 |
Method of manufacturing semiconductor device, method of processing substrate and non-transitory computer readable recording medium Grant 9,190,264 - Yuasa , et al. November 17, 2 | 2015-11-17 |
Reaction tube Grant D739,832 - Yamazaki , et al. September 29, 2 | 2015-09-29 |
Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus Grant 9,006,116 - Terasaki April 14, 2 | 2015-04-14 |
Reaction tube Grant D725,055 - Yamazaki , et al. March 24, 2 | 2015-03-24 |
Reaction tube Grant D720,707 - Yamazaki , et al. January 6, 2 | 2015-01-06 |
Reaction tube Grant D719,114 - Yamazaki , et al. December 9, 2 | 2014-12-09 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Non-transitory Computer-readable Recording Medium App 20140357058 - TAKAGI; Kosuke ;   et al. | 2014-12-04 |
Cleaning Method, Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Non-transitory Computer-readable Recording Medium App 20140287594 - TERASAKI; Masato ;   et al. | 2014-09-25 |
Reaction tube Grant D711,843 - Yamazaki , et al. August 26, 2 | 2014-08-26 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Method And Substrate Processing Apparatus App 20140099797 - Terasaki; Masato | 2014-04-10 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, Substrate Processing Apparatus And Non-transitory Computer Readable Recording Medium App 20130084712 - YUASA; Kazuhiro ;   et al. | 2013-04-04 |
Substrate treatment device and manufacturing method of semiconductor device Grant 7,795,157 - Terasaki , et al. September 14, 2 | 2010-09-14 |
Substrate Treatment Device and Manufacturing Method of Semiconductor Device App 20090170338 - Terasaki; Masato ;   et al. | 2009-07-02 |
Method for manufacturing semiconductor device, method for processing substrate, and substrate processing apparatus App 20020192984 - Hiyama, Shin ;   et al. | 2002-12-19 |
Method of plasma processing a substrate placed on a substrate table Grant 6,194,037 - Terasaki , et al. February 27, 2 | 2001-02-27 |