| Patent | Date |
|---|
Three-dimensional memory device containing auxiliary support pillar structures and method of making the same
Grant 11,398,497 - Kajiwara , et al. July 26, 2 | 2022-07-26 |
Three-dimensional memory device with via structures surrounded by perforated dielectric moat structure and methods of making the same
Grant 11,282,783 - Otsu , et al. March 22, 2 | 2022-03-22 |
Three-dimensional Memory Device Containing Auxilliary Support Pillar Structures And Method Of Making The Same
App 20210358941 - KAJIWARA; Kengo ; et al. | 2021-11-18 |
Three-dimensional Memory Device With Via Structures Surrounded By Perforated Dielectric Moat Structure And Methods Of Making The Same
App 20210210424 - OTSU; Yoshitaka ; et al. | 2021-07-08 |
Three-dimensional Memory Device Containing Through-array Contact Via Structures Between Dielectric Barrier Walls And Methods Of Making The Same
App 20200402905 - OTSU; Yoshitaka ; et al. | 2020-12-24 |
Three-dimensional memory device containing through-array contact via structures between dielectric barrier walls and methods of making the same
Grant 10,872,857 - Otsu , et al. December 22, 2 | 2020-12-22 |
A Three-dimensional Memory Device Having A Backside Contact Via Structure With A Laterally Bulging Portion At A Level Of Source Contact Layer
App 20200357815 - Iwai; Takaaki ; et al. | 2020-11-12 |
Three-dimensional memory device with leakage reducing support pillar structures and method of making thereof
Grant 10,014,316 - Yu , et al. July 3, 2 | 2018-07-03 |
Three-dimensional Memory Device With Leakage Reducing Support Pillar Structures And Method Of Making Thereof
App 20180108671 - YU; Fabo ; et al. | 2018-04-19 |
Method of making a monolithic three dimensional NAND string using a select gate etch stop layer
Grant 9,548,313 - Yada , et al. January 17, 2 | 2017-01-17 |
Metallic etch stop layer in a three-dimensional memory structure
Grant 9,530,788 - Oginoe , et al. December 27, 2 | 2016-12-27 |
Metallic Etch Stop Layer In A Three-dimensional Memory Structure
App 20160276359 - OGINOE; Tomohiro ; et al. | 2016-09-22 |
Method of making a three-dimensional memory array with etch stop
Grant 9,437,606 - Makala , et al. September 6, 2 | 2016-09-06 |
Method Of Making A Monolithic Three Dimensional Nand String Using A Select Gate Etch Stop Layer
App 20150348984 - YADA; Shinsuke ; et al. | 2015-12-03 |
Semiconductor device production method
Grant 9,117,675 - Oh , et al. August 25, 2 | 2015-08-25 |
Method of forming an active area with floating gate negative offset profile in FG NAND memory
Grant 9,099,496 - Tian , et al. August 4, 2 | 2015-08-04 |
Spacer passivation for high aspect ratio etching of multilayer stacks for three dimensional NAND device
Grant 9,093,480 - Makala , et al. July 28, 2 | 2015-07-28 |
Method Of Making A Three-Dimensional Memory Array With Etch Stop
App 20150008503 - MAKALA; Raghuveer S. ; et al. | 2015-01-08 |
Method Of Forming An Active Area With Floating Gate Negative Offset Profile In Fg Nand Memory
App 20140367762 - Tian; Ming ; et al. | 2014-12-18 |
Spacer Passivation For High Aspect Ratio Etching Of Multilayer Stacks For Three Dimensional Nand Device
App 20140295636 - Makala; Raghuveer S. ; et al. | 2014-10-02 |
Semiconductor device and fabrication method
Grant 8,847,282 - Haneda , et al. September 30, 2 | 2014-09-30 |
Method of manufacturing semiconductor device
Grant 8,835,327 - Terahara , et al. September 16, 2 | 2014-09-16 |
Semiconductor Device And Fabrication Method
App 20140138769 - Haneda; Masaki ; et al. | 2014-05-22 |
Semiconductor device and fabrication method
Grant 8,709,896 - Haneda , et al. April 29, 2 | 2014-04-29 |
Semiconductor Device Production Method
App 20140057421 - OH; JUNJI ; et al. | 2014-02-27 |
Method Of Manufacturing Semiconductor Device
App 20140051222 - TERAHARA; MASANORI ; et al. | 2014-02-20 |
Method Of Manufacturing Semiconductor Device
App 20130244405 - Terahara; Masanori ; et al. | 2013-09-19 |
Semiconductor Device And Fabrication Method
App 20120256264 - Haneda; Masaki ; et al. | 2012-10-11 |
Method for manufacturing semiconductor device
Grant 8,273,630 - Wada , et al. September 25, 2 | 2012-09-25 |
Semiconductor device and method of manufacturing a semiconductor device
Grant 8,193,048 - Miyamoto , et al. June 5, 2 | 2012-06-05 |
Method For Manufacturing Semiconductor Device
App 20120009752 - Wada; Takayuki ; et al. | 2012-01-12 |
Method Of Manufacturing Semiconductor Device Which A Plurality Of Types Of Transistors Are Mounted
App 20120001265 - TERAHARA; Masanori ; et al. | 2012-01-05 |
Method for manufacturing semiconductor device
Grant 8,043,917 - Wada , et al. October 25, 2 | 2011-10-25 |
Method of manufacturing semiconductor device on which a plurality of types of transistors are mounted
Grant 8,039,358 - Terahara , et al. October 18, 2 | 2011-10-18 |
Method of manufacturing semiconductor device having device characteristics improved by straining surface of active region
Grant 7,951,686 - Kishii , et al. May 31, 2 | 2011-05-31 |
Method of fabricating a semiconductor device with reduced oxide film variation
Grant 7,947,567 - Oh , et al. May 24, 2 | 2011-05-24 |
Method for manufacturing semiconductor device and semiconductor device manufacturing system
Grant 7,846,792 - Terahara December 7, 2 | 2010-12-07 |
Semiconductor device having device characteristics improved by straining surface of active region and its manufacture method
App 20100144117 - Kishii; Sadahiro ; et al. | 2010-06-10 |
Semiconductor device having device characteristics improved by straining surface of active region and its manufacture method
Grant 7,701,016 - Kishii , et al. April 20, 2 | 2010-04-20 |
Method For Manufacturing Semiconductor Device
App 20090317956 - Wada; Takayuki ; et al. | 2009-12-24 |
Method for fabricating semiconductor device
Grant 7,601,576 - Suzuki , et al. October 13, 2 | 2009-10-13 |
Method For Manufacturing Semiconductor Device And Semiconductor Device Manufacturing System
App 20090197355 - Terahara; Masanori | 2009-08-06 |
Manufacturing method of semiconductor device
Grant 7,541,120 - Terahara June 2, 2 | 2009-06-02 |
Semiconductor device and method for manufacturing the same
Grant 7,501,686 - Okuno , et al. March 10, 2 | 2009-03-10 |
Semiconductor Device And Method Of Manufacturing A Semiconductor Device
App 20080237784 - MIYAMOTO; Masato ; et al. | 2008-10-02 |
Method Of Manufacturing Semiconductor Device And Semiconductor Device
App 20080237812 - TERAHARA; Masanori ; et al. | 2008-10-02 |
Method Of Correcting A Mask Pattern And Method Of Manufacturing A Semiconductor Device
App 20080241973 - TERAHARA; Masanori | 2008-10-02 |
Semiconductor Device Fabrication Method And Semiconductor Device Fabrication System
App 20080081384 - OH; Junji ; et al. | 2008-04-03 |
Semiconductor device having device characteristics improved by straining surface of active region and its manufacture method
App 20070228488 - Kishii; Sadahiro ; et al. | 2007-10-04 |
Method for fabricating semiconductor device
App 20070048916 - Suzuki; Rintaro ; et al. | 2007-03-01 |
Semiconductor device and method for manufacturing the same
App 20060281245 - Okuno; Masaki ; et al. | 2006-12-14 |
Manufacturing method of semiconductor device
App 20060093963 - Terahara; Masanori | 2006-05-04 |
Semiconductor device fabrication method
Grant 6,979,610 - Terahara , et al. December 27, 2 | 2005-12-27 |
Semiconductor device fabrication method
App 20040092082 - Terahara, Masanori ; et al. | 2004-05-13 |
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