Terada; Kazuo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Terada; Kazuo.The latest application filed is for "substrate processing apparatus and substrate processing method".

Company Profile

0.16.8

Terada; Kazuo - Koshi JP
TERADA; Kazuo - Koshi City JP
TERADA; Kazuo - Koshi-shi JP
Terada; Kazuo - Yokohama JP
Terada; Kazuo - Kumamoto-ken JP
Terada; Kazuo - Machida JP
Terada; Kazuo - Tokyo JP
Terada; Kazuo - Mishima JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Supercritical processing apparatus, substrate processing system and supercritical processing method Grant 9,076,643 - Toshima , et al. July 7, 2	2015-07-07
Heating device, coating and developing system, heating method and storage medium Grant 8,933,376 - Fukuoka , et al. January 13, 2	2015-01-13
Substrate carrying apparatus having circumferential sidewall and substrate processing system Grant 8,434,423 - Toshima , et al. May 7, 2	2013-05-07
Substrate processing apparatus and substrate processing method Grant 8,235,061 - Toshima , et al. August 7, 2	2012-08-07
Heating apparatus and heating method Grant 8,217,313 - Fukuoka , et al. July 10, 2	2012-07-10
Substrate treatment apparatus Grant 8,006,636 - Terada , et al. August 30, 2	2011-08-30
Heat treatment device Grant 7,871,265 - Fukuoka , et al. January 18, 2	2011-01-18
Supercritical Processing Apparatus, Substrate Processing System And Supercritical Processing Method App 20110000507 - TOSHIMA; Takayuki ; et al.	2011-01-06
Substrate Processing Apparatus And Substrate Processing Method App 20110000512 - TOSHIMA; Takayuki ; et al.	2011-01-06
Substrate Carrying Apparatus And Substrate Processing System App 20100192992 - TOSHIMA; Takayuki ; et al.	2010-08-05
Substrate Treatment Apparatus App 20090025637 - TERADA; Kazuo ; et al.	2009-01-29
Heating Apparatus And Heating Method App 20080185370 - Fukuoka; Tetsuo ; et al.	2008-08-07
Heating Device, Heating Method And Storage Medium App 20080182217 - Fukuoka; Tetsuo ; et al.	2008-07-31
Heating Device, Coating And Developing System, Heating Method And Storage Medium App 20080169279 - Fukuoka; Tetsuo ; et al.	2008-07-17
Heat treatment device App 20080135207 - Fukuoka; Tetsuo ; et al.	2008-06-12
Method for removing organic compound by ultraviolet radiation and apparatus therefor Grant 6,756,087 - Terada June 29, 2	2004-06-29
Method for removing organic compound by ultraviolet radiation Grant 6,468,599 - Terada October 22, 2	2002-10-22
Method and apparatus for controlling temperature in rapid heat treatment system Grant 5,616,264 - Nishi , et al. April 1, 1	1997-04-01
Treatment object supporting device Grant 5,334,257 - Nishi , et al. August 2, 1	1994-08-02
System and method for supporting and rotating substrates in a process chamber Grant 5,324,540 - Terada June 28, 1	1994-06-28
Process for producing a magnet of strontium ferrite having high performance Grant 5,061,412 - Okumori , et al. October 29, 1	1991-10-29

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