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Patent applications and USPTO patent grants for Teoh, Hongbee.The latest application filed is for "apparatus and method for controlled cleaving".
Patent | Date |
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Apparatus and method for controlled cleaving App 20050150597 - Henley, Francois ;   et al. | 2005-07-14 |
Showerhead assembly for a processing chamber Grant 6,827,815 - Hytros , et al. December 7, 2 | 2004-12-07 |
Showerhead assembly for a processing chamber App 20030132319 - Hytros, Mark M. ;   et al. | 2003-07-17 |
.method Of Cvd Titanium Nitride Film Deposition For Increased Titanium Nitride Film Uniformity App 20030017268 - Hu, Jianhua ;   et al. | 2003-01-23 |
Ceramic substrate support Grant 6,494,955 - Lei , et al. December 17, 2 | 2002-12-17 |
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