Patent | Date |
---|
Method For Producing An Epitaxial Semiconductor Layer App 20150357193 - Temmler; Dietmar ;   et al. | 2015-12-10 |
Method for producing a structure on the surface of a substrate Grant 8,003,538 - Nolscher , et al. August 23, 2 | 2011-08-23 |
3-D channel field-effect transistor, memory cell and integrated circuit Grant 7,834,395 - Temmler , et al. November 16, 2 | 2010-11-16 |
Semiconductor device, method for manufacturing a semiconductor device and mask for manufacturing a semiconductor device Grant 7,535,044 - Noelscher , et al. May 19, 2 | 2009-05-19 |
Method For Producing A Structure On The Surface Of A Substrate App 20080206681 - Nolscher; Christoph ;   et al. | 2008-08-28 |
Method Of Manufacturing A 3-d Channel Field-effect Transistor And An Integrated Circuit App 20080194068 - Temmler; Dietmar ;   et al. | 2008-08-14 |
3-D Channel Field-Effect Transistor, Memory Cell and Integrated Circuit App 20080191257 - Temmler; Dietmar ;   et al. | 2008-08-14 |
Trench and a trench capacitor and method for forming the same Grant 7,410,864 - Temmler August 12, 2 | 2008-08-12 |
Semiconductor device, method for manufacturing a semiconductor device and mask for manufacturing a semiconductor device App 20080179705 - Noelscher; Christoph ;   et al. | 2008-07-31 |
Method for producing a structure on the surface of a substrate Grant 7,368,385 - Nolscher , et al. May 6, 2 | 2008-05-06 |
Trench isolation having a self-adjusting surface seal and method for producing one such trench isolation Grant 7,294,902 - Temmler , et al. November 13, 2 | 2007-11-13 |
Method for filling trench and relief geometries in semiconductor structures Grant 7,265,025 - Temmler , et al. September 4, 2 | 2007-09-04 |
Method for fabricating a shadow mask in a trench of a microelectronic or micromechanical structure Grant 7,250,336 - Regul , et al. July 31, 2 | 2007-07-31 |
Memory chip having a memory cell with low-temperature layers in the memory trench and fabrication method App 20070134871 - Temmler; Dietmar ;   et al. | 2007-06-14 |
Dram memory cell with a trench capacitor and method for production thereof Grant 7,223,651 - Richter , et al. May 29, 2 | 2007-05-29 |
Method and apparatus for determination of the depth of depressions which are formed in a mount substrate Grant 7,152,461 - Temmler , et al. December 26, 2 | 2006-12-26 |
Field effect transistor and method for the production thereof App 20060231918 - Popp; Martin ;   et al. | 2006-10-19 |
Field effect transistor and method for fabricating it App 20060231874 - Popp; Martin ;   et al. | 2006-10-19 |
Field effect transistor and method for fabricating it Grant 7,119,384 - Popp , et al. October 10, 2 | 2006-10-10 |
Method for fabricating a hole trench storage capacitor in a semiconductor substrate, and hole trench storage capacitor Grant 7,084,029 - Kundalgurki , et al. August 1, 2 | 2006-08-01 |
Method for fabricating a buried conductive connection to a trench capacitor and a memory cell with such a connection App 20060134877 - Goebel; Bernd ;   et al. | 2006-06-22 |
Semiconductor memory cell with trench capacitor and selection transistor and method for fabricating it Grant 7,049,647 - Karcher , et al. May 23, 2 | 2006-05-23 |
Memory cell having a thin insulation collar and memory module Grant 7,012,289 - Popp , et al. March 14, 2 | 2006-03-14 |
Method of producing a structure on the surface of a substrate App 20060024621 - Nolscher; Christoph ;   et al. | 2006-02-02 |
Method for fabricating a trench contact to a deep trench capacitor having a polysilicon filling Grant 6,989,311 - Schrems , et al. January 24, 2 | 2006-01-24 |
Method for fabricating a shadow mask in a trench of a microelectronic or micromechanical structure App 20060003560 - Regul; Jorn ;   et al. | 2006-01-05 |
Trench and a trench capacitor and method for forming the same App 20050250290 - Temmler, Dietmar | 2005-11-10 |
Method and apparatus for determination of the depth of depressions which are formed in a mount substrate App 20050199078 - Temmler, Dietmar ;   et al. | 2005-09-15 |
Method for producing an electrically conductive contact Grant 6,924,225 - Popp , et al. August 2, 2 | 2005-08-02 |
Method for filling trench and relief geometries in semiconductor structures App 20050148171 - Temmler, Dietmar ;   et al. | 2005-07-07 |
Method for fabricating a hole trench storage capacitor in a semiconductor substrate, and hole trench storage capacitor App 20050093049 - Kundalgurki, Srivatsa ;   et al. | 2005-05-05 |
Memory chip with low-temperature layers in the trench capacitor App 20050090053 - Temmler, Dietmar ;   et al. | 2005-04-28 |
Method for producing an electrically conductive contact App 20050079702 - Popp, Martin ;   et al. | 2005-04-14 |
Trench isolation having a self-adjusting surface seal and method for producing one such trench isolation App 20050040134 - Temmler, Dietmar ;   et al. | 2005-02-24 |
Field effect transistor and method for production thereof App 20050029583 - Popp, Martin ;   et al. | 2005-02-10 |
Method for fabricating a deep trench capacitor for dynamic memory cells Grant 6,841,443 - Temmler , et al. January 11, 2 | 2005-01-11 |
Semiconductor memory cell and method for fabricating the memory cell Grant 6,828,192 - Gustin , et al. December 7, 2 | 2004-12-07 |
Method for producing a cavity in a monocrystalline silicon substrate and a semiconductor component having a cavity in a monocrystalline silicon substrate with an epitaxial covering layer Grant 6,821,863 - Popp , et al. November 23, 2 | 2004-11-23 |
Memory with a memory cell comprising a selection transistor and a memory capacitor and method for production thereof App 20040227174 - Richter, Frank ;   et al. | 2004-11-18 |
Semiconductor memory cell and method for fabricating the memory cell App 20040157389 - Gustin, Wolfgang ;   et al. | 2004-08-12 |
Memory cell arrangement and method for its fabrication Grant 6,773,983 - Richter , et al. August 10, 2 | 2004-08-10 |
Memory cell having a thin insulation collar and memory module App 20040032027 - Popp, Martin ;   et al. | 2004-02-19 |
Method for fabricating a deep trench capacitor for dynamic memory cells App 20040023464 - Temmler, Dietmar ;   et al. | 2004-02-05 |
Memory with trench capacitor and selection transistor and method for fabricating it Grant 6,664,167 - Temmler , et al. December 16, 2 | 2003-12-16 |
Semiconductor memory cell with trench capacitor and selection transistor and method for fabricating it App 20030168690 - Karcher, Wolfram ;   et al. | 2003-09-11 |
Method for producing a cavity in a monocrystalline silicon substrate and a semiconductor component having a cavity in a monocrystalline silicon substrate with an epitaxial covering layer App 20030136994 - Popp, Martin ;   et al. | 2003-07-24 |
One-transistor memory cell configuration and method for its fabrication App 20030025140 - Kusters, Karl Heinz ;   et al. | 2003-02-06 |
Memory cell arrangement and method for its fabricating it App 20020191455 - Richter, Frank ;   et al. | 2002-12-19 |
Method for fabricating a trench contact to a deep trench capacitor having a polysilicon filling App 20020173110 - Schrems, Martin ;   et al. | 2002-11-21 |
Memory with trench capacitor and selection transistor and method for fabricating it App 20020137278 - Temmler, Dietmar ;   et al. | 2002-09-26 |
Method for fabricating a field-effect transistor having an anti-punch-through implantation region App 20010004541 - Richter, Frank ;   et al. | 2001-06-21 |