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Patent applications and USPTO patent grants for Telmec Co., Ltd..The latest application filed is for "two dimensional driving device for use in a positioning device in a semiconductor manufacturing apparatus".
Patent | Date |
---|---|
Two dimensional driving device for use in a positioning device in a semiconductor manufacturing apparatus Grant 4,555,650 - Asakawa November 26, 1 | 1985-11-26 |
Two-dimensional precise positioning device for use in a semiconductor manufacturing apparatus Grant 4,535,278 - Asakawa August 13, 1 | 1985-08-13 |
Positioning stage having a vibration suppressor Grant 4,525,659 - Imahashi , et al. June 25, 1 | 1985-06-25 |
Apparatus for registering a mask pattern in a photo-etching apparatus for semiconductor devices Grant 4,441,250 - Imahashi April 10, 1 | 1984-04-10 |
Method and apparatus for measuring a gap distance between a mask and a wafer to be used in fabrication of semiconductor integrated circuits Grant 4,397,078 - Imahashi August 9, 1 | 1983-08-09 |
Method for registering a mask pattern in a photo-etching apparatus for semiconductor devices Grant 4,377,028 - Imahashi March 22, 1 | 1983-03-22 |
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