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Patent applications and USPTO patent grants for TEGENBOSCH; Henricus Gerardus.The latest application filed is for "guiding device and associated system".
Patent | Date |
---|---|
Guiding Device And Associated System App 20210141311 - LABETSKI; Dzmitry ;   et al. | 2021-05-13 |
Guiding device and associated system Grant 10,955,749 - Labetski , et al. March 23, 2 | 2021-03-23 |
Guiding Device And Associated System App 20200089124 - LABETSKI; Dzmitry ;   et al. | 2020-03-19 |
Optical element mount for lithographic apparatus Grant 9,335,641 - Tegenbosch , et al. May 10, 2 | 2016-05-10 |
Radiation source Grant 9,119,280 - Kempen , et al. August 25, 2 | 2015-08-25 |
Radiation Source App 20140160453 - Kempen; Antonius Theodorus Wilhelmus ;   et al. | 2014-06-12 |
Optical Element Mount For Lithographic Apparatus App 20110205517 - Tegenbosch; Henricus Gerardus ;   et al. | 2011-08-25 |
Lithographic support structure Grant 7,486,384 - Tinnemans , et al. February 3, 2 | 2009-02-03 |
Lithographic support structure App 20080297758 - Tinnemans; Patricius Aloysius Jacobus ;   et al. | 2008-12-04 |
Lithographic apparatus and device manufacturing method Grant 7,382,440 - Tegenbosch June 3, 2 | 2008-06-03 |
Lithographic apparatus and device manufacturing method Grant 7,362,415 - Franken , et al. April 22, 2 | 2008-04-22 |
Lithographic apparatus and device manufacturing method Grant 7,184,128 - Tegenbosch , et al. February 27, 2 | 2007-02-27 |
Lithographic apparatus and device manufacturing method App 20060119815 - Franken; Dominicus Jacobus Petrus Adrianus ;   et al. | 2006-06-08 |
Lithographic apparatus and device manufacturing method App 20050286034 - Tegenbosch, Henricus Gerardus ;   et al. | 2005-12-29 |
Lithographic apparatus and device manufacturing method App 20050151948 - Tegenbosch, Henricus Gerardus | 2005-07-14 |
Lithographic support structure App 20040246459 - Tinnemans, Patricius Aloysius Jacobus ;   et al. | 2004-12-09 |
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