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Patent applications and USPTO patent grants for Tebje; Lars.The latest application filed is for "micromechanical structure and micromechanical sensor".
Patent | Date |
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Micromechanical Structure And Micromechanical Sensor App 20220091154 - Nagel; Cristian ;   et al. | 2022-03-24 |
Micromechanical Sensor Device And Corresponding Production Method App 20220063990 - Tebje; Lars ;   et al. | 2022-03-03 |
Micromechanical System, Method For Operating A Micromechanical System App 20220049958 - Tebje; Lars ;   et al. | 2022-02-17 |
Micromechanical inertial sensor Grant 11,215,632 - Classen , et al. January 4, 2 | 2022-01-04 |
Method for manufacturing a MEMS element Grant 10,775,170 - Braeuer , et al. Sept | 2020-09-15 |
Micromechanical Inertial Sensor App 20200241035 - Classen; Johannes ;   et al. | 2020-07-30 |
Method For Operating A Micromechanical Inertial Sensor App 20190383852 - Tebje; Lars ;   et al. | 2019-12-19 |
Micromechanical sensor Grant 9,791,273 - Tebje , et al. October 17, 2 | 2017-10-17 |
Interposer For Mounting A Vertically Integrated Hybrid Component On A Component Carrier App 20170081177 - Neul; Reinhard ;   et al. | 2017-03-23 |
Method For Manufacturing A Mems Element App 20170059321 - BRAEUER; Joerg ;   et al. | 2017-03-02 |
Micromechanical acceleration sensor Grant 9,581,613 - Ullrich , et al. February 28, 2 | 2017-02-28 |
Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component Grant 9,428,378 - Heuck , et al. August 30, 2 | 2016-08-30 |
Micromechanical Acceleration Sensor App 20150355217 - ULLRICH; Guenther Nino-Carlo ;   et al. | 2015-12-10 |
Vertical Hybrid Integrated MEMS ASIC Component Having A Stress Decoupling Structure App 20150353345 - HEUCK; Friedjof ;   et al. | 2015-12-10 |
Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component App 20150353346 - HEUCK; Friedjof ;   et al. | 2015-12-10 |
Micromechanical component and method for manufacturing a micromechanical component Grant 9,097,736 - Classen , et al. August 4, 2 | 2015-08-04 |
Micromechanical Sensor App 20150053000 - TEBJE; Lars ;   et al. | 2015-02-26 |
Inertial sensor with overlapping torsional springs Grant 8,915,138 - Ullrich , et al. December 23, 2 | 2014-12-23 |
Micromechanical structure, in particular sensor arrangement, and corresponding operating method Grant 8,901,679 - Classen , et al. December 2, 2 | 2014-12-02 |
Hybrid intergrated component and method for the manufacture thereof Grant 8,796,791 - Franke , et al. August 5, 2 | 2014-08-05 |
Micromechanical Structure, In Particular Sensor Arrangement, And Corresponding Operating Method App 20140021515 - Classen; Johannes ;   et al. | 2014-01-23 |
Micromechanical component and method for operating a micromechanical component Grant 8,596,122 - Classen , et al. December 3, 2 | 2013-12-03 |
Hybrid Intergrated Component And Method For The Manufacture Thereof App 20130299927 - Franke; Axel ;   et al. | 2013-11-14 |
Acceleration sensor having an electrode bridge Grant 8,573,059 - Kaelberer , et al. November 5, 2 | 2013-11-05 |
Micromechanical Component And Method For Manufacturing A Micromechanical Component App 20130104654 - CLASSEN; Johannes ;   et al. | 2013-05-02 |
Micromechanical z-sensor Grant 8,402,826 - Classen , et al. March 26, 2 | 2013-03-26 |
Micromechanical acceleration sensor having an open seismic mass Grant 8,393,215 - Stahl , et al. March 12, 2 | 2013-03-12 |
Acceleration sensor and method for its manufacture Grant 8,336,382 - Classen , et al. December 25, 2 | 2012-12-25 |
Triaxial acceleration sensor Grant 8,333,113 - Classen , et al. December 18, 2 | 2012-12-18 |
Inertial Sensor App 20120297879 - ULLRICH; Guenther-Nino-Carlo ;   et al. | 2012-11-29 |
Triaxial acceleration sensor Grant 8,272,268 - Classen , et al. September 25, 2 | 2012-09-25 |
Sensor And Method For Manufacturing A Sensor App 20110226059 - Wellner; Patrick ;   et al. | 2011-09-22 |
Acceleration Sensor Having An Electrode Bridge App 20110197678 - Kaelberer; Arnd ;   et al. | 2011-08-18 |
Micromechanical Component And Method For Operating A Micromechanical Component App 20110154899 - Classen; Johannes ;   et al. | 2011-06-30 |
Micromechanical system including a suspension and an electrode positioned movably Grant 7,878,061 - Classen , et al. February 1, 2 | 2011-02-01 |
Micromechanical Component And Method For Operating A Micromechanical Component App 20100206072 - Tebje; Lars ;   et al. | 2010-08-19 |
Acceleration sensor Grant 7,730,783 - Classen , et al. June 8, 2 | 2010-06-08 |
Acceleration Sensor And Method For Its Manufacture App 20100107762 - CLASSEN; Johannes ;   et al. | 2010-05-06 |
Triaxial Acceleration Sensor App 20100043549 - Classen; Johannes ;   et al. | 2010-02-25 |
Micromechanical Z-sensor App 20100024553 - Classen; Johannes ;   et al. | 2010-02-04 |
Triaxial Acceleration Sensor App 20100024554 - Classen; Johannes ;   et al. | 2010-02-04 |
Micromechanical Acceleration Sensor Having An Open Seismic Mass App 20090314085 - Stahl; Heiko ;   et al. | 2009-12-24 |
Micromechanical System App 20090152654 - Classen; Johannes ;   et al. | 2009-06-18 |
Acceleration sensor App 20080141774 - Classen; Johannes ;   et al. | 2008-06-19 |
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