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Reactor cleaning apparatus Grant 9,216,444 - Endoh , et al. December 22, 2 | 2015-12-22 |
Silicon seed rod assembly of polycrystalline silicon, method of forming the same, polycrystalline silicon producing apparatus, and method of producing polycrystalline silicon Grant 9,090,962 - Tebakari , et al. July 28, 2 | 2015-07-28 |
Manufacturing apparatus of polycrystalline silicon Grant 8,840,723 - Endoh , et al. September 23, 2 | 2014-09-23 |
Polycrystalline silicon reactor Grant 8,703,248 - Endoh , et al. April 22, 2 | 2014-04-22 |
Manufacturing apparatus of polycrystalline silicon Grant 8,652,256 - Endoh , et al. February 18, 2 | 2014-02-18 |
Apparatus for producing polycrystalline silicon Grant 8,623,139 - Endoh , et al. January 7, 2 | 2014-01-07 |
Silicon Seed Rod Assembly Of Polycrystalline Silicon, Method Of Forming The Same, Polycrystalline Silicon Producing Apparatus, And Method Of Producing Polycrystalline Silicon App 20130224401 - Tebakari; Masayuki ;   et al. | 2013-08-29 |
Polycrystalline silicon manufacturing apparatus and manufacturing method Grant 8,329,132 - Endoh , et al. December 11, 2 | 2012-12-11 |
Apparatus for producing trichlorosilane, and method for producing trichlorosilane Grant 8,282,902 - Tebakari October 9, 2 | 2012-10-09 |
Polycrystalline silicon manufacturing apparatus Grant 8,187,382 - Endoh , et al. May 29, 2 | 2012-05-29 |
Method for manufacturing polycrystalline silicon Grant 8,043,660 - Endoh , et al. October 25, 2 | 2011-10-25 |
Reactor cleaning apparatus App 20110232694 - Endoh; Toshihide ;   et al. | 2011-09-29 |
Method for producing polycrystalline silicon, and facility for producing polycrystalline silicon Grant 8,017,099 - Tebakari September 13, 2 | 2011-09-13 |
Reactor cleaning apparatus Grant 7,975,709 - Endoh , et al. July 12, 2 | 2011-07-12 |
Polymer inactivation method for polycrystalline silicon manufacturing device Grant 7,875,349 - Endoh , et al. January 25, 2 | 2011-01-25 |
Manufacturing apparatus of polycrystalline silicon App 20100229796 - Endoh; Toshihide ;   et al. | 2010-09-16 |
Method for producing polycrystalline silicon, and facility for producing polycrystalline silicon App 20100160591 - Tebakari; Masayuki | 2010-06-24 |
Manufacturing Apparatus Of Polycrystalline Silicon App 20100058988 - Endoh; Toshihide ;   et al. | 2010-03-11 |
Apparatus For Producing Polycrystalline Silicon App 20090314207 - Endoh; Toshihide ;   et al. | 2009-12-24 |
Apparatus For Producing Trichlorosilane, And Method For Producing Trichlorosilane App 20090297708 - Tebakari; Masayuki | 2009-12-03 |
Polycrystalline silicon manufacturing apparatus App 20090241838 - Endoh; Toshihide ;   et al. | 2009-10-01 |
Polymer inactivation method for polycrystalline silicon manufacturing device App 20090246113 - Endoh; Toshihide ;   et al. | 2009-10-01 |
Polycrystalline Silicon Reactor App 20090238992 - ENDOH; Toshihide ;   et al. | 2009-09-24 |
Reactor cleaning apparatus App 20090188532 - Endoh; Toshihide ;   et al. | 2009-07-30 |
Silicon seed rod assembly of polycrystalline silicon, method of forming the same, polycrystalline silicon producing apparatus, and method of producing polycrystalline silicon App 20090165704 - Tebakari; Masayuki ;   et al. | 2009-07-02 |
Method for manufacturing polycrystalline silicon App 20090136666 - Endoh; Toshihide ;   et al. | 2009-05-28 |
Polycrystalline silicon manufacturing apparatus and manufacturing method App 20090136408 - Endoh; Toshihide ;   et al. | 2009-05-28 |