Te Sligte; Edwin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Te Sligte; Edwin.The latest application filed is for "method for removing a contamination layer by an atomic layer etching process".

Company Profile

3.7.11

Te Sligte; Edwin - Waarte NL
Te Sligte; Edwin - Waalre NL
Te Sligte; Edwin - Eindhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for removing a contamination layer by an atomic layer etching process Grant 11,199,363 - Roozeboom , et al. December 14, 2	2021-12-14
Component for use in a patterning device environment Grant 11,048,180 - Nikipelov , et al. June 29, 2	2021-06-29
Optical element and optical system for EUV lithography, and method for treating such an optical element Grant 10,690,812 - Bekman , et al.	2020-06-23
Method For Removing A Contamination Layer By An Atomic Layer Etching Process App 20200142327 - ROOZEBOOM; Fred ; et al.	2020-05-07
Component for Use in a Patterning Device Environment App 20200096880 - NIKIPELOV; Andrey ; et al.	2020-03-26
EUV lithography system and operating method Grant 10,073,361 - Ehm , et al. September 11, 2	2018-09-11
EUV Lithography System And Operating Method App 20170212433 - EHM; Dirk Heinrich ; et al.	2017-07-27
Cleaning Apparatus and Associated Low Pressure Chamber Apparatus App 20170045832 - MOLKENBOER; Freek Theodorus ; et al.	2017-02-16
Optical Element And Optical System For Euv Lithography, And Method For Treating Such An Optical Element App 20160187543 - BEKMAN; Hermanus Hendricus Petrus Theodorus ; et al.	2016-06-30
Device and method for generating a plasma discharge for patterning the surface of a substrate Grant 9,161,427 - Blom , et al. October 13, 2	2015-10-13
Method for removing a contamination layer from an optical surface and arrangement therefor Grant 8,980,009 - Ehm , et al. March 17, 2	2015-03-17
Device And Method For Generating A Plasma Discharge For Patterning The Surface Of A Substrate App 20130206720 - Blom; Paulus Petrus Maria ; et al.	2013-08-15
Method For Removing A Contamination Layer From An Optical Surface And Arrangement Therefor App 20130186430 - Ehm; Dirk Heinrich ; et al.	2013-07-25
Method Of Making A Support Structure App 20130126226 - Koster; Norbertus Benedictus ; et al.	2013-05-23
Hydrogen Radical Generator App 20120006258 - Schasfoort; Gerard Frans Jozef ; et al.	2012-01-12

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.