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Patent applications and USPTO patent grants for te Nijenhuis; Harald.The latest application filed is for "vapor accumulator for corrosive gases with purging".
Patent | Date |
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Vapor Accumulator For Corrosive Gases With Purging App 20220213599 - Lind; Gary Bridger ;   et al. | 2022-07-07 |
Configurable liquid precursor vaporizer Grant 10,107,490 - Smith , et al. October 23, 2 | 2018-10-23 |
Treatment for flowable dielectric deposition on substrate surfaces Grant 9,847,222 - Reilly , et al. December 19, 2 | 2017-12-19 |
Dual-plenum showerhead with interleaved plenum sub-volumes Grant 9,728,380 - Mohn , et al. August 8, 2 | 2017-08-08 |
System and apparatus for flowable deposition in semiconductor fabrication Grant 9,719,169 - Mohn , et al. August 1, 2 | 2017-08-01 |
Variable Showerhead Flow By Varying Internal Baffle Conductance App 20160020074 - Mohn; Jonathan D. ;   et al. | 2016-01-21 |
Configurable Liquid Precursor Vaporizer App 20150377481 - Smith; Colin F. ;   et al. | 2015-12-31 |
Variable showerhead flow by varying internal baffle conductance Grant 9,121,097 - Mohn , et al. September 1, 2 | 2015-09-01 |
Atomic Layer Removal Process With Higher Etch Amount App 20150118848 - Draeger; Nerissa ;   et al. | 2015-04-30 |
Treatment For Flowable Dielectric Deposition On Substrate Surfaces App 20150118862 - Reilly; Patrick ;   et al. | 2015-04-30 |
Variable Showerhead Flow By Varying Internal Baffle Conductance App 20140061324 - Mohn; Jonathan D. ;   et al. | 2014-03-06 |
Defect Reduction In Plasma Processing App 20140049162 - Thomas; George ;   et al. | 2014-02-20 |
System And Apparatus For Flowable Deposition In Semiconductor Fabrication App 20120161405 - Mohn; Jonathan D. ;   et al. | 2012-06-28 |
Bottom Up Fill In High Aspect Ratio Trenches App 20120149213 - Nittala; Lakshminarayana ;   et al. | 2012-06-14 |
Protective layer to enable damage free gap fill Grant 8,133,797 - van Schravendijk , et al. March 13, 2 | 2012-03-13 |
Atomic layer removal process with higher etch amount Grant 8,058,179 - Draeger , et al. November 15, 2 | 2011-11-15 |
Atomic layer removal for high aspect ratio gapfill Grant 7,981,763 - van Schravendijk , et al. July 19, 2 | 2011-07-19 |
Protective Layer To Enable Damage Free Gap Fill App 20090286381 - van Schravendijk; Bart ;   et al. | 2009-11-19 |
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