Taylor; Travis R.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Taylor; Travis R..The latest application filed is for "halogen removal module and associated systems and methods".

Company Profile

1.13.9

Taylor; Travis R. - Portland OR
Taylor; Travis R. - Fremont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Halogen removal module and associated systems and methods Grant 10,903,065 - Taylor , et al. January 26, 2	2021-01-26
Halogen Removal Module and Associated Systems and Methods App 20180330942 - Taylor; Travis R. ; et al.	2018-11-15
In Situ Clean Using High Vapor Pressure Aerosols App 20180311707 - Taylor; Travis R. ; et al.	2018-11-01
Chambers For Particle Reduction In Substrate Processing Systems App 20160233114 - Taylor; Travis R.	2016-08-11
Systems and methods for quantifying particle performance in a substrate processing system Grant 9,335,248 - Taylor May 10, 2	2016-05-10
Plasma confinement ring assembly for plasma processing chambers Grant 9,076,826 - de la Llera , et al. July 7, 2	2015-07-07
Edge Ring Assembly For Plasma Etching Chambers App 20140367047 - Kang; Michael S. ; et al.	2014-12-18
Edge ring assembly for plasma etching chambers Grant 8,845,856 - Kang , et al. September 30, 2	2014-09-30
High lifetime consumable silicon nitride-silicon dioxide plasma processing components Grant 8,622,021 - Taylor , et al. January 7, 2	2014-01-07
Plasma Confinement Ring Assembly For Plasma Processing Chambers App 20120073754 - de la Llera; Anthony ; et al.	2012-03-29
Edge Ring Assembly For Plasma Etching Chambers App 20110126984 - Kang; Michael S. ; et al.	2011-06-02
High Lifetime Consumable Silicon Nitride-silicon Dioxide Plasma Processing Components App 20110021031 - Taylor; Travis R. ; et al.	2011-01-27
System and method for in situ characterization and maintenance of polishing pad smoothness in chemical mechanical polishing Grant 7,153,182 - Taylor , et al. December 26, 2	2006-12-26
Assembly and method for generating a hydrodynamic air bearing Grant 7,025,660 - Taylor , et al. April 11, 2	2006-04-11
Apparatus and associated method for conditioning in chemical mechanical planarization Grant 7,004,825 - Taylor , et al. February 28, 2	2006-02-28
Assembly and method for generating a hydrodynamic air bearing App 20050037692 - Taylor, Travis R. ; et al.	2005-02-17
Platen assembly having a topographically altered platen surface Grant 6,712,679 - Taylor , et al. March 30, 2	2004-03-30
Belt wiper for a chemical mechanical planarization system Grant 6,666,755 - Taylor , et al. December 23, 2	2003-12-23
Platen assembly having a topographically altered platen surface App 20030032379 - Taylor, Travis R. ; et al.	2003-02-13

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