Patent | Date |
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Element mapping unit, scanning transmission electron microscope, and element mapping method Grant 7,928,376 - Kaji , et al. April 19, 2 | 2011-04-19 |
Monochromator and scanning electron microscope using the same Grant 7,838,827 - Ose , et al. November 23, 2 | 2010-11-23 |
Monochromator and scanning electron microscope using the same App 20080237463 - Ose; Yoichi ;   et al. | 2008-10-02 |
Monochromator and scanning electron microscope using the same Grant 7,315,024 - Ose , et al. January 1, 2 | 2008-01-01 |
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method Grant 7,250,601 - Kaji , et al. July 31, 2 | 2007-07-31 |
Monochromator and scanning electron microscope using the same App 20060219910 - Ose; Yoichi ;   et al. | 2006-10-05 |
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method App 20060163479 - Kaji; Kazutoshi ;   et al. | 2006-07-27 |
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method Grant 7,067,805 - Kajl , et al. June 27, 2 | 2006-06-27 |
Monochromator and scanning electron microscope using the same Grant 7,022,983 - Ose , et al. April 4, 2 | 2006-04-04 |
Element mapping unit, scanning transmission electron microscope, and element mapping method App 20060011836 - Kaji; Kazutoshi ;   et al. | 2006-01-19 |
Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method Grant 6,933,501 - Kaji , et al. August 23, 2 | 2005-08-23 |
Monochromator and scanning electron microscope using the same App 20040188607 - Ose, Yoichi ;   et al. | 2004-09-30 |
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method App 20040183011 - Kaji, Kazutoshi ;   et al. | 2004-09-23 |
Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method Grant 6,794,648 - Kaji , et al. September 21, 2 | 2004-09-21 |
Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method App 20040169143 - Kaji, Kazutoshi ;   et al. | 2004-09-02 |
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method Grant 6,703,613 - Kaji , et al. March 9, 2 | 2004-03-09 |
Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method App 20030085356 - Kaji, Kazutoshi ;   et al. | 2003-05-08 |
Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method App 20030085350 - Kaji, Kazutoshi ;   et al. | 2003-05-08 |
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method App 20020096632 - Kaji, Kazutoshi ;   et al. | 2002-07-25 |
Projecting type charged particle microscope and projecting type substrate inspection system Grant 6,310,341 - Todokoro , et al. October 30, 2 | 2001-10-30 |
Energy filter and electron microscope equipped with the energy filter Grant 6,150,657 - Kimoto , et al. November 21, 2 | 2000-11-21 |
Electron energy filter and transmission electron microscope provided with the same Grant 5,585,630 - Taniguchi , et al. December 17, 1 | 1996-12-17 |
Electrostatic lens arrangement of multi-stages of multi-pole electrodes and mass spectrometer using the same Grant 5,291,016 - Taya March 1, 1 | 1994-03-01 |
Analyzer tube for mass spectrometry Grant 4,947,041 - Taya August 7, 1 | 1990-08-07 |
Electric multipole lens Grant 4,870,283 - Taya September 26, 1 | 1989-09-26 |
Ion implantation apparatus for semiconductor manufacture Grant 4,839,523 - Taya , et al. June 13, 1 | 1989-06-13 |
Microwave discharge type ion source for ion injection devices Grant 4,703,180 - Taya October 27, 1 | 1987-10-27 |
Ion implanter Grant 4,634,931 - Taya , et al. January 6, 1 | 1987-01-06 |
Specimens rotating device Grant 4,599,516 - Taya , et al. July 8, 1 | 1986-07-08 |
Ion implantation apparatus Grant 4,476,393 - Taya , et al. October 9, 1 | 1984-10-09 |