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Etching Method For Oxide Semiconductor Film
App 20220122852 - HIRATA; Akiko ; et al. | 2022-04-21 |
Dry etching equipment and method for producing semiconductor device
Grant 10,998,174 - Kuboi , et al. May 4, 2 | 2021-05-04 |
Etching characteristic estimation method, program, information processing apparatus, processing apparatus, designing method, and production method
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Etching Characteristic Estimation Method, Program, Information Processing Apparatus, Processing Apparatus, Designing Method, And Production Method
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Simulator, processing system, damage evaluation method and damage evaluation program
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Predicting ultraviolet ray damage with visible wavelength spectroscopy during a semiconductor manufacturing process
Grant 9,287,097 - Kuboi , et al. March 15, 2 | 2016-03-15 |
Shape simulation apparatus, shape simulation program, semiconductor production apparatus, and semiconductor device production method
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Solid-state imaging device, fabrication method thereof, imaging apparatus, and fabrication method of anti-reflection structure
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Semiconductor manufacturing device, semiconductor device manufacturing method, simulation device, and simulation program
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Shape Simulation Apparatus, Shape Simulation Program, Semiconductor Production Apparatus, And Semiconductor Device Production Method
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Shape simulation apparatus, shape simulation program, semiconductor production apparatus, and semiconductor device production method
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Simulation Method, Simulation Program, And Semiconductor Manufacturing Apparatus
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Simulator, Processing System, Damage Evaluation Method And Damage Evaluation Program
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Semiconductor Manufacturing Device, Semiconductor Device Manufacturing Method, Simulation Device, And Simulation Program
App 20110160889 - Kuboi; Nobuyuki ; et al. | 2011-06-30 |
Shape Simulation Apparatus, Shape Simulation Program, Semiconductor Production Apparatus, And Semiconductor Device Production Method
App 20110082577 - Kuboi; Nobuyuki ; et al. | 2011-04-07 |
Dry etching method and production method of magnetic memory device
Grant 7,808,026 - Shiraiwa , et al. October 5, 2 | 2010-10-05 |
Solid-state Imaging Device, Fabrication Method Thereof, Imaging Apparatus, And Fabrication Method Of Anti-reflection Structure
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Dry Etching Equipment And Method For Producing Semiconductor Device
App 20090162950 - Kuboi; Nobuyuki ; et al. | 2009-06-25 |
Dry etching method and production method of magnetic memory device
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Dry etching method and production method of magnetic memory device
App 20080286883 - Shiraiwa; Toshiaki ; et al. | 2008-11-20 |
Plasma monitoring method, plasma processing method, method of manufacturing semiconductor device, and plasma processing system
Grant 7,439,068 - Tatsumi October 21, 2 | 2008-10-21 |
Pattern Forming Method And Method Of Manufacturing Semiconductor Devices
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Dry etching process and method for manufacturing magnetic memory device
App 20070026681 - Shiraiwa; Toshiaki ; et al. | 2007-02-01 |
Plasma etching method
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Plasma monitoring method, plasma processing method, method of manufacturing semiconductor device, and plasma processing system
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Method of producing semiconductor device
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Dry etching method for W polycide using sulfur deposition
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Dry etching method
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Dry etching method by sulfur conditioning
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Etching process of silicon material
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Dry etching method
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