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Patent applications and USPTO patent grants for Tatic-Lucic; Svetlana.The latest application filed is for "recessed electrode for electrostatically actuated structures".
Patent | Date |
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Trilayered beam MEMS device and related methods Grant 6,917,086 - Cunningham , et al. July 12, 2 | 2005-07-12 |
MEMS device having a trilayered beam and related methods Grant 6,876,047 - Cunningham , et al. April 5, 2 | 2005-04-05 |
Recessed electrode for electrostatically actuated structures App 20050048687 - Tatic-Lucic, Svetlana | 2005-03-03 |
Trilayered beam MEMS device and related methods App 20040188785 - Cunningham, Shawn Jay ;   et al. | 2004-09-30 |
Recessed electrode for electrostatically actuated structures App 20040159532 - Tatic-Lucic, Svetlana ;   et al. | 2004-08-19 |
Trilayered beam MEMS device and related methods Grant 6,746,891 - Cunningham , et al. June 8, 2 | 2004-06-08 |
MEMS device having a trilayered beam and related methods App 20030116848 - Cunningham, Shawn Jay ;   et al. | 2003-06-26 |
Trilayered beam MEMS device and related methods App 20030119221 - Cunningham, Shawn Jay ;   et al. | 2003-06-26 |
Method for fabricating a through-wafer optical MEMS device having an anti-reflective coating App 20030021004 - Cunningham, Shawn Jay ;   et al. | 2003-01-30 |
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