Tashiro; Yukihito
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tashiro; Yukihito.The latest application filed is for "vacuum processing apparatus".
- Tashiro; Yukihito - Kanagawa JP
- Tashiro; Yukihito - Chigasaki JP
- TASHIRO; Yukihito - Chigasaki-shi JP
- Tashiro; Yukihito - Tokyo JP
- Tashiro; Yukihito - Chofu JP
- Tashiro; Yukihito - Chofu-shi JP
| Patent | Date |
|---|---|
| Vacuum Processing Apparatus App 20220154324 - Tashiro; Yukihito ; et al. | 2022-05-19 |
| Sputtering Apparatus App 20220145445 - Suzuki; Koji ; et al. | 2022-05-12 |
| Sputtering apparatus and method of forming film Grant 11,056,323 - Nakamura , et al. July 6, 2 | 2021-07-06 |
| Cathode device and sputtering apparatus Grant 10,934,616 - Tashiro , et al. March 2, 2 | 2021-03-02 |
| Cathode Device And Sputtering Apparatus App 20200377992 - TASHIRO; Yukihito ; et al. | 2020-12-03 |
| Cathode unit for sputtering apparatus Grant 10,844,474 - Nakamura , et al. November 24, 2 | 2020-11-24 |
| Holding apparatus Grant 10,763,153 - Tashiro , et al. Sep | 2020-09-01 |
| Sputtering Apparatus and Method of Forming Film App 20200080192 - Nakamura; Shinya ; et al. | 2020-03-12 |
| Cathode Unit for Sputtering Apparatus App 20190194798 - Nakamura; Shinya ; et al. | 2019-06-27 |
| Holding Apparatus App 20190103301 - Tashiro; Yukihito ; et al. | 2019-04-04 |
| Articulated robot, and conveying device Grant 9,561,586 - Tashiro February 7, 2 | 2017-02-07 |
| Substrate processing apparatus Grant 9,355,878 - Abarra , et al. May 31, 2 | 2016-05-31 |
| Substrate transport apparatus, and system and method for manufacturing electronic device Grant 9,346,171 - Watanabe , et al. May 24, 2 | 2016-05-24 |
| Substrate processing apparatus Grant 9,245,785 - Tashiro , et al. January 26, 2 | 2016-01-26 |
| Articulated Robot, And Conveying Device App 20150343630 - TASHIRO; Yukihito | 2015-12-03 |
| Vacuum actuator including a stator forming a part of a vacuum partition wall Grant 8,912,697 - Watanabe , et al. December 16, 2 | 2014-12-16 |
| Substrate Processing Apparatus App 20140105709 - ABARRA; Einstein Noel ; et al. | 2014-04-17 |
| Substrate Transport Apparatus, And System And Method For Manufacturing Electronic Device App 20130202398 - Watanabe; Kazuhito ; et al. | 2013-08-08 |
| Substrate Processing Apparatus App 20120148375 - Tashiro; Yukihito ; et al. | 2012-06-14 |
| Substrate Conveyance Apparatus, Electronic Device Manufacturing System, And Electronic Device Manufacturing Method App 20120014770 - Watanabe; Kazuhito ; et al. | 2012-01-19 |
| Vacuum Actuator And Substrate Transport Robot App 20110156514 - WATANABE; Kazuhito ; et al. | 2011-06-30 |
| Vacuum Processing Apparatus, Method for Manufacturing Semiconductor Device, and System For Manufacturing Semiconductor Device App 20080171435 - Fujii; Takahiro ; et al. | 2008-07-17 |
| Multichamber Substrate Processing Apparatus App 20010052392 - NAKAMURA, MASAHIKO ; et al. | 2001-12-20 |
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