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Patent applications and USPTO patent grants for Tarshish-Shapir; Inna.The latest application filed is for "composite overlay metrology target".
Patent | Date |
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Metrology targets and methods with oblique periodic structures Grant 11,137,692 - Feler , et al. October 5, 2 | 2021-10-05 |
Composite Overlay Metrology Target App 20210240089 - Golotsvan; Anna ;   et al. | 2021-08-05 |
Field-to-field Corrections Using Overlay Targets App 20210200105 - Leshinsky-Altshuller; Enna ;   et al. | 2021-07-01 |
Field-to-field corrections using overlay targets Grant 10,990,022 - Leshinsky-Altshuller , et al. April 27, 2 | 2021-04-27 |
Verification Metrology Targets and Their Design App 20200348604 - Adel; Michael E. ;   et al. | 2020-11-05 |
Verification metrology target and their design Grant 10,705,434 - Adel , et al. | 2020-07-07 |
Field-to-Field Corrections Using Overlay Targets App 20200201193 - Leshinsky-Altshuller; Enna ;   et al. | 2020-06-25 |
Metrology Targets And Methods With Oblique Periodic Structures App 20200124982 - Feler; Yoel ;   et al. | 2020-04-23 |
Method, system, and user interface for metrology target characterization Grant 10,242,290 - Tarshish-Shapir , et al. | 2019-03-26 |
Verification Metrology Targets And Their Design App 20170060001 - Adel; Michael E. ;   et al. | 2017-03-02 |
Metrology Target Characterization App 20140136137 - Tarshish-Shapir; Inna ;   et al. | 2014-05-15 |
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