| Patent | Date |
|---|
System, method, and computer program for analyzing operation of fluid control device
Grant 11,371,627 - Suzuki , et al. June 28, 2 | 2022-06-28 |
Valve Device, Flow Rate Control Method, Fluid Control Device, Semiconductor Manufacturing Method, And Semiconductor Manufacturing Apparatus Using The Valve Device
App 20220196163 - TSUCHIGUCHI; Daihi ; et al. | 2022-06-23 |
Abnormality diagnosis method of fluid supply line
Grant 11,340,636 - Tanno , et al. May 24, 2 | 2022-05-24 |
Valve Device, Flow Control Method, Fluid Control Device, Semiconductor Manufacturing Method, And Semiconductor Manufacturing Apparatus
App 20220082176 - TANNO; Ryutaro ; et al. | 2022-03-17 |
Valve and fluid supply line
Grant 11,243,549 - Tanno , et al. February 8, 2 | 2022-02-08 |
Work Management Apparatus, Work Management Method, And Work Management System
App 20220019187 - KAWAUCHI; Yuto ; et al. | 2022-01-20 |
Anomaly detection device for fluid controller, anomaly detection system, anamoly detection method, and fluid controller
Grant 11,226,257 - Harada , et al. January 18, 2 | 2022-01-18 |
Valve Device
App 20210372532 - TANNO; Ryutaro ; et al. | 2021-12-02 |
Fluid control device
Grant 11,162,606 - Suzuki , et al. November 2, 2 | 2021-11-02 |
Fluid Control Device, Abnormality Detection Method of Fluid Control Device, Abnormality Detection Device, and Abnormality Detection System
App 20210302264 - Tanno; Ryutaro ; et al. | 2021-09-30 |
Fluid Control Apparatus, Fluid Control Device, and Operation Analysis System
App 20210303008 - Tanno; Ryutaro ; et al. | 2021-09-30 |
Electromagnetic Valve, Valve Device, Fluid Control Device, And Electromagnetic Valve Replacement Method
App 20210293345 - TANNO; Ryutaro ; et al. | 2021-09-23 |
Diaphragm Valve And Monitoring Method Thereof
App 20210262576 - SUZUKI; Yuya ; et al. | 2021-08-26 |
Fluid Control Device
App 20210215269 - Tanno; Ryutaro ; et al. | 2021-07-15 |
Blood Vessel Obstruction Diagnosis Method, Apparatus & System
App 20210128099 - Al-Noor; Fouad ; et al. | 2021-05-06 |
Management system, method, and computer program for semiconductor fabrication apparatus
Grant 10,998,211 - Tanno , et al. May 4, 2 | 2021-05-04 |
Fluid Control Device
App 20210123544 - Tanno; Ryutaro ; et al. | 2021-04-29 |
Fluid Control Device
App 20210116047 - Suzuki; Yuya ; et al. | 2021-04-22 |
Valve, Abnormality Diagnosis Method of Valve, and Computer Program
App 20200393060 - Tanno; Ryutaro ; et al. | 2020-12-17 |
Valve Device
App 20200386342 - YOSHIDA; Toshihide ; et al. | 2020-12-10 |
Abnormality Diagnosis Method of Fluid Supply Line
App 20200363826 - Tanno; Ryutaro ; et al. | 2020-11-19 |
Fluid Supply Line And Motion Analysis System
App 20200285256 - Tanno; Ryutaro ; et al. | 2020-09-10 |
Valve And Fluid Supply Line
App 20200225686 - Tanno; Ryutaro ; et al. | 2020-07-16 |
Management System, Method, and Computer Program for Semiconductor Fabrication Apparatus
App 20200185242 - Tanno; Ryutaro ; et al. | 2020-06-11 |
System, Method, and Computer Program for Analyzing Operation of Fluid Control Device
App 20200080663 - Suzuki; Yuya ; et al. | 2020-03-12 |
Valve Device And Semiconductor Production Device
App 20200011448 - TANNO; Ryutaro ; et al. | 2020-01-09 |
Neural Trees
App 20200005148 - NORI; Aditya Vithal ; et al. | 2020-01-02 |
Anomaly Detection Device for Fluid Controller, Anomaly Detection System, Anamoly Detection Method, and Fluid Controller
App 20190360887 - Harada; Akihiro ; et al. | 2019-11-28 |
Diaphragm valve
Grant 9,822,888 - Akamoto , et al. November 21, 2 | 2017-11-21 |
Lock device and valve device
Grant 9,803,776 - Akamoto , et al. October 31, 2 | 2017-10-31 |
Lock Device and Valve Device
App 20160091111 - Akamoto; Hisatoshi ; et al. | 2016-03-31 |
Diaphragm Valve
App 20150144822 - Akamoto; Hisatoshi ; et al. | 2015-05-28 |
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