loadpatents
Patent applications and USPTO patent grants for Taniyama; Yasushi.The latest application filed is for "wafer stocker".
Patent | Date |
---|---|
Transfer chamber Grant 11,424,145 - Kawai , et al. August 23, 2 | 2022-08-23 |
Wafer Stocker App 20220037184 - Taniyama; Yasushi ;   et al. | 2022-02-03 |
Gas supply device, method for controlling gas supply device, load port, and semiconductor manufacturing apparatus Grant 11,139,188 - Taniyama , et al. October 5, 2 | 2021-10-05 |
Load port Grant 10,947,063 - Suzuki , et al. March 16, 2 | 2021-03-16 |
Door opening/closing system, and load port equipped with door opening/closing system Grant 10,930,537 - Kawai , et al. February 23, 2 | 2021-02-23 |
Gas injection device Grant 10,923,372 - Kawai , et al. February 16, 2 | 2021-02-16 |
Transfer Chamber App 20200312686 - Kawai; Toshihiro ;   et al. | 2020-10-01 |
Transfer chamber Grant 10,672,632 - Kawai , et al. | 2020-06-02 |
Door Opening/closing System, And Load Port Equipped With Door Opening/closing System App 20200168495 - KAWAI; Toshihiro ;   et al. | 2020-05-28 |
Transfer chamber Grant 10,658,217 - Kawai , et al. | 2020-05-19 |
Door opening/closing system, and load port equipped with door opening/closing system Grant 10,586,723 - Kawai , et al. | 2020-03-10 |
Load Port App 20200071091 - SUZUKI; Atsushi ;   et al. | 2020-03-05 |
Load port Grant 10,501,271 - Suzuki , et al. Dec | 2019-12-10 |
Exhaust Nozzle Unit, Load Port, And Efem App 20190326134 - Suzuki; Atsushi ;   et al. | 2019-10-24 |
Method For Manufacturing Semiconductor App 20190145641 - Taniyama; Yasushi ;   et al. | 2019-05-16 |
Gas Supply Device, Method For Controlling Gas Supply Device, Load Port, And Semiconductor Manufacturing Apparatus App 20180315632 - Taniyama; Yasushi ;   et al. | 2018-11-01 |
Gas Injection Device App 20180254209 - KAWAI; Toshihiro ;   et al. | 2018-09-06 |
Load Port App 20180229945 - SUZUKI; Atsushi ;   et al. | 2018-08-16 |
Door Opening/closing System, And Load Port Equipped With Door Opening/closing System App 20180204753 - KAWAI; Toshihiro ;   et al. | 2018-07-19 |
Transfer Chamber App 20180047602 - Kawai; Toshihiro ;   et al. | 2018-02-15 |
Transfer Chamber App 20180040493 - Kawai; Toshihiro ;   et al. | 2018-02-08 |
Efem Grant 9,704,727 - Segawa , et al. July 11, 2 | 2017-07-11 |
Atmosphere replacement apparatus, substrate transport apparatus, substrate transport system, and EFEM Grant 9,412,634 - Segawa , et al. August 9, 2 | 2016-08-09 |
Efem App 20150170945 - Segawa; Mikio ;   et al. | 2015-06-18 |
Atmosphere Replacement Apparatus, Substrate Transport Apparatus, Substrate Transport System, And Efem App 20150128441 - Segawa; Mikio ;   et al. | 2015-05-14 |
Efem And Load Port App 20150024671 - Taniyama; Yasushi ;   et al. | 2015-01-22 |
Load port Grant 8,540,473 - Asa , et al. September 24, 2 | 2013-09-24 |
Load Port App 20120034051 - ASA; Fuminori ;   et al. | 2012-02-09 |
Transportation apparatus and tension adjustment method of belt in the same Grant 7,987,742 - Tachibana , et al. August 2, 2 | 2011-08-02 |
Untreated body transfer device and semiconductor manufacturing device with the untreated body transfer device Grant 7,393,172 - Saeki , et al. July 1, 2 | 2008-07-01 |
Transportation apparatus and tension adjustment method of belt in the same App 20080152465 - Tachibana; Sachio ;   et al. | 2008-06-26 |
Port structure in semiconductor processing system Grant 7,279,067 - Yoshida , et al. October 9, 2 | 2007-10-09 |
Mounting/demounting device for wafer carrier lid Grant 6,984,097 - Saeki , et al. January 10, 2 | 2006-01-10 |
Port structure in semiconductor processing system App 20050103270 - Yoshida, Tetsuo ;   et al. | 2005-05-19 |
Device for attaching target substrate transfer container to semiconductor processing apparatus Grant 6,676,356 - Saeki , et al. January 13, 2 | 2004-01-13 |
Semiconductor processing system Grant 6,540,869 - Saeki , et al. April 1, 2 | 2003-04-01 |
Apparatus for detaching/attaching wafer carrier lid App 20020179892 - Saeki, Hiroaki ;   et al. | 2002-12-05 |
Device for attaching target substrate transfer container to semiconductor processing apparatus App 20020051701 - Saeki, Hiroaki ;   et al. | 2002-05-02 |
Semiconductor processing system App 20010053324 - Saeki, Hiroaki ;   et al. | 2001-12-20 |
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