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Method For Forming Gate Insulator Film And Heat Treatment Method App 20210327709 - TANIMURA; Hideaki ;   et al. | 2021-10-21 |
Light-irradiation Heat Treatment Apparatus App 20210274598 - ABE; Makoto ;   et al. | 2021-09-02 |
Light-irradiation heat treatment apparatus Grant 11,089,657 - Abe , et al. August 10, 2 | 2021-08-10 |
Method for fabricating p-type gallium nitride semiconductor and method of heat treatment Grant 10,985,021 - Tanimura , et al. April 20, 2 | 2021-04-20 |
Light-irradiation heat treatment method and heat treatment apparatus Grant 10,978,319 - Aoyama , et al. April 13, 2 | 2021-04-13 |
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Heat treatment method for dopant introduction Grant 10,777,415 - Fuse , et al. Sept | 2020-09-15 |
Heat treatment method for p-type semiconductor Grant 10,699,906 - Tanimura | 2020-06-30 |
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Light-irradiation heat treatment method and heat treatment apparatus Grant 10,580,667 - Aoyama , et al. | 2020-03-03 |
Method For Fabricating P-type Gallium Nitride Semiconductor And Method Of Heat Treatment App 20200066532 - TANIMURA; Hideaki ;   et al. | 2020-02-27 |
Light-irradiation Heat Treatment Method And Heat Treatment Apparatus App 20190311924 - AOYAMA; Takayuki ;   et al. | 2019-10-10 |
Light irradiation type heat treatment method and heat treatment apparatus Grant 10,424,483 - Aoyama , et al. Sept | 2019-09-24 |
Method Of Heat-treating Polysilicon App 20190267250 - Tanimura; Hideaki ;   et al. | 2019-08-29 |
Heat Treatment Method For Dopant Introduction App 20190244817 - FUSE; Kazuhiko ;   et al. | 2019-08-08 |
Method and apparatus for light-irradiation heat treatment Grant 10,347,512 - Tanimura , et al. July 9, 2 | 2019-07-09 |
Heat Treatment Method And Heat Treatment Apparatus App 20190164789 - AOYAMA; Takayuki ;   et al. | 2019-05-30 |
Light Irradiation Type Heat Treatment Method And Heat Treatment Apparatus App 20190109007 - AOYAMA; Takayuki ;   et al. | 2019-04-11 |
Light-irradiation Heat Treatment Method And Heat Treatment Apparatus App 20190027385 - AOYAMA; Takayuki ;   et al. | 2019-01-24 |
Light irradiation type heat treatment method and heat treatment apparatus Grant 10,181,404 - Aoyama , et al. Ja | 2019-01-15 |
Light-irradiation heat treatment method and heat treatment apparatus Grant 10,121,683 - Aoyama , et al. November 6, 2 | 2018-11-06 |
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Dopant Introduction Method And Heat Treatment Method App 20180166281 - Fuse; Kazuhiko ;   et al. | 2018-06-14 |
Dopant Introduction Method And Thermal Treatment Method App 20180144939 - TANIMURA; Hideaki ;   et al. | 2018-05-24 |
Heat Treatment Method For P-type Semiconductor App 20180033640 - TANIMURA; Hideaki | 2018-02-01 |
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Light-irradiation Heat Treatment Method And Heat Treatment Apparatus App 20180005848 - AOYAMA; TAKAYUKI ;   et al. | 2018-01-04 |
Light Irradiation Type Heat Treatment Method And Heat Treatment Apparatus App 20170309489 - AOYAMA; Takayuki ;   et al. | 2017-10-26 |
Apparatus and method for light-irradiation heat treatment Grant 9,799,517 - Tanimura , et al. October 24, 2 | 2017-10-24 |
Light irradiation type heat treatment method and heat treatment apparatus Grant 9,741,576 - Aoyama , et al. August 22, 2 | 2017-08-22 |
Method For Forming Junction In Semiconductor App 20170221715 - TANIMURA; Hideaki ;   et al. | 2017-08-03 |
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Method And Apparatus For Light-irradiation Heat Treatment App 20170011923 - TANIMURA; Hideaki ;   et al. | 2017-01-12 |
Apparatus And Method For Light-irradiation Heat Treatment App 20170011922 - TANIMURA; Hideaki ;   et al. | 2017-01-12 |
Light-irradiation Heat Treatment Apparatus App 20160262207 - ABE; Makoto ;   et al. | 2016-09-08 |