Tanimoto; Sayaka
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tanimoto; Sayaka.The latest application filed is for "charged particle beam apparatus".
- Tanimoto; Sayaka - Tokyo JP
- TANIMOTO; Sayaka - Kokubunji JP
- Tanimoto; Sayaka - Kodaira JP
- Tanimoto; Sayaka - Palo Alto CA
- Tanimoto; Sayaka - Polo Alto CA
| Patent | Date |
|---|---|
| Charged particle beam apparatus Grant 10,037,866 - Enyama , et al. July 31, 2 | 2018-07-31 |
| Charged Particle Beam Apparatus App 20170025251 - ENYAMA; Momoyo ; et al. | 2017-01-26 |
| Charged particle beam apparatus Grant 9,287,082 - Morita , et al. March 15, 2 | 2016-03-15 |
| Charged Particle Beam Apparatus App 20150228443 - MORITA; Kenichi ; et al. | 2015-08-13 |
| Electron Beam Apparatus And Lens Array App 20130248731 - TANIMOTO; Sayaka ; et al. | 2013-09-26 |
| Charged particle beam apparatus Grant 8,193,493 - Tanimoto , et al. June 5, 2 | 2012-06-05 |
| Charged particle beam apparatus and control method therefor Grant 8,026,482 - Fukuda , et al. September 27, 2 | 2011-09-27 |
| Charged Particle Beam Apparatus App 20110139985 - TANIMOTO; Sayaka ; et al. | 2011-06-16 |
| Charged particle beam apparatus Grant 7,906,761 - Tanimoto , et al. March 15, 2 | 2011-03-15 |
| Electron beam apparatus Grant 7,880,143 - Tanimoto , et al. February 1, 2 | 2011-02-01 |
| Electron Beam Apparatus App 20100133433 - TANIMOTO; Sayaka ; et al. | 2010-06-03 |
| Metrology system of fine pattern for process control by charged particle beam Grant 7,679,056 - Yamanashi , et al. March 16, 2 | 2010-03-16 |
| Charged particle beam apparatus and pattern measuring method Grant 7,655,907 - Tanimoto , et al. February 2, 2 | 2010-02-02 |
| Charged Particle Beam Apparatus And Control Method Therefor App 20090140143 - FUKUDA; Muneyuki ; et al. | 2009-06-04 |
| Charged Particle Beam Apparatus App 20080230697 - TANIMOTO; Sayaka ; et al. | 2008-09-25 |
| Charged particle beam application system Grant 7,408,760 - Tanimoto , et al. August 5, 2 | 2008-08-05 |
| Method and apparatus for applying charged particle beam Grant 7,378,668 - Tanimoto , et al. May 27, 2 | 2008-05-27 |
| Charged Particle Beam Apparatus App 20080067376 - Tanimoto; Sayaka ; et al. | 2008-03-20 |
| Charged particle beam apparatus and pattern measuring method App 20070272858 - Tanimoto; Sayaka ; et al. | 2007-11-29 |
| System and method for electron-beam lithography Grant 7,276,709 - Fukushima , et al. October 2, 2 | 2007-10-02 |
| Metrology System of Fine pattern for Process Control by Charged Particle Beam App 20070221844 - Yamanashi; Hiromasa ; et al. | 2007-09-27 |
| Method and apparatus for applying charged particle beam App 20060289781 - Tanimoto; Sayaka ; et al. | 2006-12-28 |
| Method of charged particle beam lithography and equipment for charged particle beam lithography Grant 7,105,842 - Tanimoto , et al. September 12, 2 | 2006-09-12 |
| Electron beam writing equipment and electron beam writing method Grant 7,098,464 - Sohda , et al. August 29, 2 | 2006-08-29 |
| Multi-charged beam lens and charged beam exposure apparatus using the same Grant 7,060,984 - Nagae , et al. June 13, 2 | 2006-06-13 |
| Charged particle beam application system App 20060056131 - Tanimoto; Sayaka ; et al. | 2006-03-16 |
| System and method for electron-beam lithography App 20050230637 - Fukushima, Yoshimasa ; et al. | 2005-10-20 |
| Multi-charged beam lens and charged beam exposure apparatus using the same App 20050077475 - Nagae, Kenichi ; et al. | 2005-04-14 |
| Electron beam writing equipment and electron beam writing method App 20050072939 - Sohda, Yasunari ; et al. | 2005-04-07 |
| Method of charged particle beam lithography and equipment for charged particle beam lithography App 20050072941 - Tanimoto, Sayaka ; et al. | 2005-04-07 |
| Multibeam generating apparatus and electron beam drawing apparatus Grant 6,870,310 - Okunuki , et al. March 22, 2 | 2005-03-22 |
| Multibeam generating apparatus and electron beam drawing apparatus App 20040056578 - Okunuki, Masahiko ; et al. | 2004-03-25 |
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