TANIMOTO; Akikazu
Patent Applications and Registrations
Patent applications and USPTO patent grants for TANIMOTO; Akikazu.The latest application filed is for "exposure apparatus and method for producing device".
Company Profile
0.48.24
- TANIMOTO; Akikazu - Yokohama JP
- TANIMOTO; Akikazu - Yokohama-shi JP
- Tanimoto; Akikazu - Kanagawa-ken JP
- Tanimoto; Akikazu - Yokohama-city JP
- Tanimoto; Akikazu - Kawasaki JP
Patent Activity
| Patent | Date |
|---|---|
| Exposure Apparatus And Method For Producing Device App 20180196352 - KOBAYASHI; Naoyuki ; et al. | 2018-07-12 |
| Exposure apparatus and method for producing device Grant 9,939,739 - Kobayashi , et al. April 10, 2 | 2018-04-10 |
| Exposure Apparatus And Method For Producing Device App 20160216612 - KOBAYASHI; Naoyuki ; et al. | 2016-07-28 |
| Exposure apparatus and method for producing device Grant 9,304,392 - Kobayashi , et al. April 5, 2 | 2016-04-05 |
| Exposure Apparatus And Method For Producing Device App 20140293249 - KOBAYASHI; Naoyuki ; et al. | 2014-10-02 |
| Exposure apparatus and method for producing device Grant 8,780,327 - Kobayashi , et al. July 15, 2 | 2014-07-15 |
| Exposure apparatus and method for producing device Grant 8,760,617 - Kobayashi , et al. June 24, 2 | 2014-06-24 |
| Exposure Apparatus And Method For Producing Device App 20130169945 - KOBAYASHI; Naoyuki ; et al. | 2013-07-04 |
| Exposure apparatus and method for producing device Grant 8,384,877 - Kobayashi , et al. February 26, 2 | 2013-02-26 |
| Exposure Apparatus, Exposure Method, Measurement Method, And Device Manufacturing Method App 20130016329 - TANIMOTO; Akikazu | 2013-01-17 |
| Exposure apparatus and method for producing device Grant 8,174,668 - Kobayashi , et al. May 8, 2 | 2012-05-08 |
| Exposure apparatus and method for producing device Grant 8,169,592 - Kobayashi , et al. May 1, 2 | 2012-05-01 |
| Cleaning method, device manufacturing method, cleaning substrate, liquid immersion member, liquid immersion exposure apparatus, and dummy substrate App 20120057139 - TANIMOTO; Akikazu ; et al. | 2012-03-08 |
| Exposure apparatus and method for producing device Grant 8,130,363 - Kobayashi , et al. March 6, 2 | 2012-03-06 |
| Exposure apparatus and method for producing device Grant 8,072,576 - Kobayashi , et al. December 6, 2 | 2011-12-06 |
| Exposure apparatus and method for producing device App 20110199594 - Kobayashi; Naoyuki ; et al. | 2011-08-18 |
| Interferometric position-measuring devices and methods Grant 7,876,452 - Sogard , et al. January 25, 2 | 2011-01-25 |
| Cleaning tool, cleaning method, and device fabricating method App 20100039628 - Shiraishi; Kenichi ; et al. | 2010-02-18 |
| Exposure Method and Apparatus, and Electronic Device Manufacturing Method App 20090011368 - Ichihara; Yutaka ; et al. | 2009-01-08 |
| Interferometric Position-measuring Devices And Methods App 20080291464 - Sogard; Michael R. ; et al. | 2008-11-27 |
| Exposure Apparatus and method for producing device App 20080231825 - Kobayashi; Naoyuki ; et al. | 2008-09-25 |
| Exposure apparatus and method for producing device App 20080225250 - Kobayashi; Naoyuki ; et al. | 2008-09-18 |
| Exposure apparatus and method for producing device App 20080225249 - Kobayashi; Naoyuki ; et al. | 2008-09-18 |
| Exposure apparatus and method for producing device Grant 7,388,649 - Kobayashi , et al. June 17, 2 | 2008-06-17 |
| Exposure apparatus and method for producing device App 20080030696 - Kobayashi; Naoyuki ; et al. | 2008-02-07 |
| Exposure apparatus and method for producing device App 20080030695 - Kobayashi; Naoyuki ; et al. | 2008-02-07 |
| Exposure Apparatus And Method For Producing Device App 20070247600 - Kobayashi; Naoyuki ; et al. | 2007-10-25 |
| Exposure apparatus and method for producing device App 20070132968 - Kobayashi; Naoyuki ; et al. | 2007-06-14 |
| Exposure apparatus and method for producing device App 20070064210 - Kobayashi; Naoyuki ; et al. | 2007-03-22 |
| Exposure apparatus and method for producing device App 20060077367 - Kobayashi; Naoyuki ; et al. | 2006-04-13 |
| Exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the same Grant 6,894,763 - Murakami , et al. May 17, 2 | 2005-05-17 |
| Apparatus and method for pattern exposure and method for adjusting the apparatus Grant 6,727,980 - Ota , et al. April 27, 2 | 2004-04-27 |
| Light exposure apparatus Grant 6,713,747 - Tanimoto March 30, 2 | 2004-03-30 |
| Environmental-control method and apparatus for an exposure system Grant 6,704,088 - Tanimoto March 9, 2 | 2004-03-09 |
| Exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the same App 20030218730 - Murakami, Seiro ; et al. | 2003-11-27 |
| Environmental-control method and apparatus for an exposure system App 20030164929 - Tanimoto, Akikazu | 2003-09-04 |
| Light exposure apparatus App 20020190189 - Tanimoto, Akikazu | 2002-12-19 |
| Apparatus and method for pattern exposure and method for adjusting the apparatus App 20020041368 - Ota, Kazuya ; et al. | 2002-04-11 |
| Alignment method and exposure apparatus for use in such alignment method Grant 5,906,901 - Tanimoto May 25, 1 | 1999-05-25 |
| Method for removing a thin film layer Grant 5,656,229 - Tanimoto , et al. August 12, 1 | 1997-08-12 |
| Method of and apparatus for measuring coordinate position and positioning an object Grant 5,151,749 - Tanimoto , et al. September 29, 1 | 1992-09-29 |
| Illuminating optical system in an exposure apparatus Grant 5,048,926 - Tanimoto September 17, 1 | 1991-09-17 |
| Exposure control device Grant 4,970,546 - Suzuki , et al. November 13, 1 | 1990-11-13 |
| Apparatus capable of adjusting the light amount Grant 4,884,101 - Tanimoto November 28, 1 | 1989-11-28 |
| Projection exposure apparatus Grant 4,870,452 - Tanimoto , et al. September 26, 1 | 1989-09-26 |
| Laser beam working system Grant 4,820,899 - Hikima , et al. April 11, 1 | 1989-04-11 |
| Projection optical apparatus Grant 4,801,977 - Ishizaka , et al. January 31, 1 | 1989-01-31 |
| Exposure apparatus for production of integrated circuit Grant RE32,795 - Matsuura , et al. December 6, 1 | 1988-12-06 |
| Foreign substance inspecting system including a calibration standard Grant 4,776,693 - Imamura , et al. October 11, 1 | 1988-10-11 |
| Laser processing apparatus Grant 4,769,523 - Tanimoto , et al. September 6, 1 | 1988-09-06 |
| Laser beam scanning pattern generation system with positional and dimensional error correction Grant 4,761,561 - Fujiwara , et al. August 2, 1 | 1988-08-02 |
| Projection optical apparatus Grant 4,730,900 - Uehara , et al. March 15, 1 | 1988-03-15 |
| Exposure apparatus Grant 4,711,567 - Tanimoto December 8, 1 | 1987-12-08 |
| Position detecting system Grant 4,702,606 - Matsuura , et al. October 27, 1 | 1987-10-27 |
| Projection optical apparatus Grant 4,701,606 - Tanimoto , et al. October 20, 1 | 1987-10-20 |
| Process of transfer of mask pattern onto substrate and apparatus for alignment therebetween Grant 4,699,515 - Tanimoto , et al. October 13, 1 | 1987-10-13 |
| Projection exposure apparatus Grant 4,690,528 - Tanimoto , et al. September 1, 1 | 1987-09-01 |
| Projection optical apparatus Grant 4,687,322 - Tanimoto , et al. August 18, 1 | 1987-08-18 |
| Alignment apparatus Grant 4,677,301 - Tanimoto , et al. June 30, 1 | 1987-06-30 |
| Apparatus for aligning mask and wafer used in semiconductor circuit element fabrication Grant 4,636,626 - Hazama , et al. January 13, 1 | 1987-01-13 |
| Exposure apparatus Grant 4,629,313 - Tanimoto December 16, 1 | 1986-12-16 |
| Foreign substance inspecting apparatus Grant 4,610,541 - Tanimoto , et al. * September 9, 1 | 1986-09-09 |
| Inspecting method for mask for producing semiconductor device Grant 4,586,822 - Tanimoto May 6, 1 | 1986-05-06 |
| Apparatus for detecting foreign matters on a planar substrate Grant 4,568,835 - Imamura , et al. February 4, 1 | 1986-02-04 |
| Foreign substance inspecting apparatus Grant 4,468,120 - Tanimoto , et al. August 28, 1 | 1984-08-28 |
| Exposure apparatus for production of integrated circuit Grant 4,465,368 - Matsuura , et al. August 14, 1 | 1984-08-14 |
| Alignment device Grant 4,385,838 - Nakazawa , et al. May 31, 1 | 1983-05-31 |
| Apparatus for measuring the line width of a pattern Grant 4,112,309 - Nakazawa , et al. September 5, 1 | 1978-09-05 |
| Automatic alignment apparatus Grant 4,103,998 - Nakazawa , et al. August 1, 1 | 1978-08-01 |
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