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Method For Producing Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Pattern Forming Method, And Method For Manufacturing Electronic Device
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Composition for forming upper layer film, pattern forming method, resist pattern, and method for manufacturing electronic device
Grant 11,281,103 - Hatakeyama , et al. March 22, 2 | 2022-03-22 |
Pattern forming method, method for manufacturing electronic device, laminate film, and composition for forming upper layer film
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Active Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
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Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
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Pattern forming method, resist pattern, method for manufacturing electronic device, and composition for forming upper layer film
Grant 10,852,637 - Inoue , et al. December 1, 2 | 2020-12-01 |
Photosensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
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Photosensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
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Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturin
App 20200159117 - NISHIO; Ryo ; et al. | 2020-05-21 |
Pattern forming method, resist pattern, and process for producing electronic device
Grant 10,578,968 - Yamamoto , et al. | 2020-03-03 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, Method For Manufacturing El
App 20190204736 - MARUMO; Kazuhiro ; et al. | 2019-07-04 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Actinic Ray-sensitive Or Radiation-sensitive Film, Pattern Formi
App 20190171104 - Takada; Akira ; et al. | 2019-06-06 |
Pattern forming method, composition for forming protective film, method for manufacturing electronic device, and electronic device
Grant 10,175,578 - Inoue , et al. J | 2019-01-08 |
Pattern forming method, resist pattern, and method for manufacturing electronic device
Grant 10,114,292 - Inoue , et al. October 30, 2 | 2018-10-30 |
Pattern Forming Method, Method For Manufacturing Electronic Device, Laminate Film, And Composition For Forming Upper Layer Film
App 20180275518 - INOUE; Naoki ; et al. | 2018-09-27 |
Pattern Forming Method, Resist Pattern, Method For Manufacturing Electronic Device, And Composition For Forming Upper Layer Film
App 20180081277 - INOUE; Naoki ; et al. | 2018-03-22 |
Pattern Forming Method, Resist Pattern, Method For Manufacturing Electronic Device, And Composition For Forming Upper Layer Film
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Composition For Forming Upper Layer Film, Pattern Forming Method, Resist Pattern, And Method For Manufacturing Electronic Device
App 20170371244 - HATAKEYAMA; Naoya ; et al. | 2017-12-28 |
Composition For Forming Upper Layer Film, Pattern Forming Method Using The Same, And Method For Manufacturing Electronic Device
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Pattern Forming Method, Resist Pattern, Method For Manufacturing Electronic Device, And Electronic Device
App 20170349686 - INOUE; Naoki ; et al. | 2017-12-07 |
Pattern formation method, etching method, electronic device manufacturing method, and electronic device
Grant 9,810,981 - Ueba , et al. November 7, 2 | 2017-11-07 |
Pattern Forming Method, Resist Pattern, And Process For Producing Electronic Device
App 20170199461 - YAMAMOTO; Kei ; et al. | 2017-07-13 |
Pattern Forming Method, Resist Pattern, And Method For Manufacturing Electronic Device
App 20170199460 - TANGO; Naohiro ; et al. | 2017-07-13 |
Pattern Forming Method, Composition For Forming Upper Layer Film, Resist Pattern, And Method For Manufacturing Electronic Device
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Pattern Forming Method, Resist Pattern, And Method For Manufacturing Electronic Device
App 20170184974 - INOUE; Naoki ; et al. | 2017-06-29 |
Pattern Forming Method, Composition For Forming Protective Film, Method For Manufacturing Electronic Device, And Electronic Device
App 20170176862 - INOUE; Naoki ; et al. | 2017-06-22 |
Pattern Formation Method, Etching Method, Electronic Device Manufacturing Method, And Electronic Device
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Actinic ray- or radiation-sensitive resin composition, actinic ray- or radiation-sensitive film and method of forming pattern
Grant 9,454,079 - Shibuya , et al. September 27, 2 | 2016-09-27 |
Pattern Forming Method And Method For Manufacturing Electronic Device
App 20160026083 - TANGO; Naohiro ; et al. | 2016-01-28 |
Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same
Grant 8,846,290 - Tango , et al. September 30, 2 | 2014-09-30 |
Actinic ray-sensitive or radiation-sensitive resin composition, and actinic ray-sensitive or radiation-sensitive film and pattern forming method using the same composition
Grant 8,846,293 - Iizuka , et al. September 30, 2 | 2014-09-30 |
Actinic-ray-sensitive or radiation-sensitive resin composition, resist film and pattern forming method each using the composition, method for preparing electronic device, and electronic device
Grant 8,841,060 - Kataoka , et al. September 23, 2 | 2014-09-23 |
Actinic Ray- Or Radiation-sensitive Resin Composition, Actinic Ray- Or Radiation-sensitive Film And Method Of Forming Pattern
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Actinic Ray- Or Radiation-sensitive Resin Composition, Actinic Ray- Or Radiation-sensitive Film And Method Of Forming Pattern
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Actinic-ray- Or Radiation-sensitive Resin Composition, Actinic-ray- Or Radiation-sensitive Film Therefrom, Method Of Forming Pattern Using The Composition, Process For Manufacturing Electronic Device And Electronic Device
App 20140212814 - ITO; Junichi ; et al. | 2014-07-31 |
Actinic-ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film And Pattern Forming Method Each Using The Composition, Method For Preparing Electronic Device, And Electronic Device
App 20130004740 - KATAOKA; Shohei ; et al. | 2013-01-03 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, And Actinic Ray-sensitive Or Radiation-sensitive Film And Pattern Forming Method Using The Same Composition
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Actinic-ray-sensitive Or Radiation-sensitive Resin Composition, And Resist Film And Pattern Forming Method Using The Same
App 20120164573 - Tango; Naohiro ; et al. | 2012-06-28 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, And Resist Film And Pattern Forming Method Using The Same
App 20120129100 - Shibuya; Akinori ; et al. | 2012-05-24 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition And Pattern Forming Method Using The Same
App 20120015302 - Tango; Naohiro ; et al. | 2012-01-19 |
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